• Journal of the Korean Ceramic Society
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• v.40 no.4
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• pp.385-392
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• 2003

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2524-2528
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• 2003

High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.6
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• pp.514-521
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• 2000

In this study, a surface generating system with a bundle of wires, which can reproduce a certain range of surface roughness of the objects without direct machining process, is implemented. The system consists of a bundle of wires, a PZT actuator, a vertical table system actuated linearly along two perpendicular axes, and an image processing system. Through the development of the operational software for all of those subsystems by a common language(Visual C＋＋) of the implemented system, the complete process except arrangement of a bundle of wires are automated. Lastly, through the experiments of generating the flat surface of some virtual object and then of measuring the reproduced surface roughness, it is confirmed that the implemented system has excellent performance.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• Journal of Advanced Marine Engineering and Technology
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• v.32 no.3
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• pp.437-445
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• 2008

This paper deals with the experimental assessment of the vibration suppression of the smart structures. First. we have presented a new high-speed active control system using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, N/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers for fast data processing. Next, we have tested the processing time of the peripheral devices, and provided the corresponding test results. Since fast data processing is very important in the active vibration control of the structures, we have focused on achieving the fast loop times of the control system. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.1
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• pp.86-91
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• 2007

A sensor using quartz toning fork is presented for measuring liquid density. It consists of a PZT plate as an actuator for piezoelectric excitation and a quartz tuning fork as a sensor for resonant frequency detection. The resonant frequency is determined from the sensing voltage measured in tuning fork when the excitation frequencies of PZT actuator are swept around the resonant frequencies of tuning fork. The resonant frequency determined the liquid density. The density values of three kinds of organic solvents are measured and compared with the standard values. The experimental results are in agreement with the standard values and the maximum standard deviation is less than 9%.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.416-420
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• 2002

This Paper describes a matched-filter type strain sensor system using optical fiber Bragg grating (FBG) sensor. Matched-filter type uses another wavelength-matched FBG filter to track wavelength shift in the FBG sensor. Filter FBG is attached on a fiber stretcher and stretched by PZT actuator. To overcome the nonlinearity and hysteresis of the PZT actuator that degrades system accuracy, a string resonator which can measure an absolute strain is employed. And the effect of vibration modes on string resonator is investigated particularly regarding its sensitivity and stability.

• Journal of Aerospace System Engineering
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• v.13 no.5
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• pp.9-15
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• 2019

In this paper, dynamic analysis of a nonlinear active vibration absorber is conducted with a time delay acceleration feedback to suppress the vibration of a nonlinear single degree of freedom primary system. The primary system consisting of linear and nonlinear cubic springs, mass, and damper is subjected to the multi-harmonic hard excitation with a parametric excitation. It is proposed to reduce the vibration of the primary system and the absorber by using a lead zirconate titanate (PZT) stack actuator in series with a spring in the absorber which configures as an active vibration absorber. The method of multiple scales (MMS) is used to obtain the approximate solution of the system under the internal resonance, subharmonic, superharmonic, and principal parametric resonance conditions simultaneously. Frequency and time responses of the system are investigated considering a delay in the feedback for the various parameters of the absorber configuration and controlling force.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.9
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• pp.766-770
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• 2007

In this study, in order to develop low temperature sintering ceramics for multilayer piezoelectric actuator, $0.07Pb(Mn_{1/3}Nb_{2/3})O_3-xPb(Ni_{1/3}Nb_{2/3})O_3-(0.93-x)Pb(Zr,Ti)O_3$ ceramics system were fabricated using $Li_2CO_3-Bi_2O_3-CuO$ sintering aids and the specimens were sintered at $930^{\circ}C$. Thereafter, their piezoelectric and dielectric characteristics were investigated according to the amount of PNN substitution. At 9 mol% PNN substitution, density, electromechanical coupling factor ($k_p$), dielectric constant, mechanical quality factor ($Q_m$) and piezoelectric constant ($d_{33}$) showed the optimum value of $7.86g/cm^3$, 0.60, 1640, 1323 and 387 pC/N, respectively. It is considered that these values are suitable for piezoelectric divece application such ad multilayer piezoelectric actuator and ultrasonic vibrator with pure Ag internal electrode.