• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.214-216
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• 2006

In this study, in order to develop the composition ceramics for low loss and low temperature sintering multilayer piezoelectric actuator, PMN-PZN-PZT ceramics were fabricated using two stage calcination method and $Li_2CO_3$, $Bi_2O_3$ and CuO as sintering aids and their piezoelectric characteristics were investigated according to the 2nd calcination and sintering temperature. At the calcination temperature of $750^{\circ}C$ and sintering temperature of $930^{\circ}C$, density, electromechanical coupling factor ($k_p$), mechanical quality factor ($Q_m$), Dielectric constant (${\varepsilon}_r$) and piezoelectric constant ($d_{33}$) of specimen showed the optimum value of $7.94g/cm^2$ 0.581, 1554, 1555 and 356pC/N, respectively for multilayer piezoelectric actuator application.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.362-367
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• 2008

In the present work, we address electric fatigue behavior in bending piezoelectric actuators using an acoustic emission technique. Electric cyclic fatigue tests have been performed up to ten million cycles on the fabricated specimens. To confirm the fatigue damage onset and its pathway, the source location and distributions of the AE behavior in terms of count rate are analyzed over the fatigue range. It is concluded that electric cyclic loading leads to fatigue damages such as transgranular damages and intergranular cracking in the surface of the PZT ceramic layer, and intergranular cracking even develops into the PZT inner layer, thereby degrading the displacement performance. The electric-induced fatigue behavior seems to show not a continuous process but a step-by-step process because of the brittleness of PZT ceramic. Nevertheless, this fatigue damage and cracking do not cause the final failure of the bending piezoelectric actuator loaded up to 107 cycles. Investigations of the AE behavior and the linear AE source location reveal that the onset time of the fatigue damage varies considerably depending on the existence of a glass-epoxy protecting layer.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1039-1043
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• 2007

In this paper, in order to develop low temperature sintering ceramics for multilayer piezoelectric actuator application, PMN-PZN-PZT ceramics were fabricated using $LiCO_3,\;Bi_2O_3$ and CuO as sintering aids. And also, their piezoelectric and dielectric properties were investigated according to the milling time. All the specimens sintered at $930\;^{\circ}C$ showed tetragonal phases without secondary phases. With increasing milling time, piezoelectric and dielectric characteristic of specimens increased up to 60 hours milling time and then decreased due to the agglomeration of fine particle. Accordingly, it seems that 60 hour is optimum milling condition. At the sintering temperature of $930\;^{\circ}C$ and milling time of 60 hour, density, dielectric constant(${\varepsilon}_r$), electromechanical coupling factor (kp), mechanical quality factor (Qm), piezoelectric d constant showed the optimum value of $7.95\;g/m^3$, 1382, 0.546, 1749, 330 pC/N, respectively for multilayer piezoelectric actuator application.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.48-52
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• 2001

In this paper presents an accurate AFM used that is free from the Z-directional distortion of a servo actuator is described. Two mathematical correction methods by the in-situ self-calibrationare employed in this AFM. One is the method by the integration, and the other is the method by inverse function of the calibration curve. The in situ self-calibration method by the integration, the derivative of the calibration curve function of the PZT actuator is calculated from the profile measurement data sets which are obtained by repeating measurements after a small Z-directional shift. Input displacement at each sampling point is approximately estimated first by using a straight calibration line. The derivative is integrated with reference to the approximate input to obtain the approximate calibration curve. Then the approximation of the input value of each sampling point is improved using the obtained calibration curve. Next the integral of the derivative is improved using the newly estimated input values. As a result of repeating these improving process, the calibration curve converges to the correct one, and the distortion of the AFM image can be corrected. In the in situ self-calibration through evaluating the inverse function of the calibration curve, the profile measurement data sets were used during the data processing technique. Principles and experimental results of the two methods are presented.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.255-256
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• 2007

In the study, in order to develop low temperature sintering ceramics for multilayer piezoelectric actuator, PMN-PNN-PZT ceramics were fabricated using $Na_2CO_3,\;Li_2CO_3$ as sintering aids and their dielectric and piezoelectric properties were investigated according to the variations of $MnO_2$ as additives and sintering aids. At the sintering temperature of $900^{\circ}C$ and 0.1wt% $MnO_2$ as sintering aids, density, electromechanical coupling factor$(k_p)$, mechanical quality factor$(Q_m)$, piezoelectric constant$(d_{33})$, and dielectric constant $({\varepsilon}_r)$ showed the optimum value of $7.87[g/cm^3]$, 0.61, 1131, 1127 and 376, respectively, for multilayer piezoelectric actuator application.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.05a
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• pp.126-129
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• 2001

LIPCA (LIghtweight Piezo-composite Curved Actuator) is an actuator device which is lighter than other conventional piezoelectric ceramic type actuator. LIPCA is composed of a piezoelectric ceramic layer and fiber reinforced light composite layers, typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. LIPCA has curved shape like a typical THUNDER (thin-layer composite unimorph feroelectric driver and sensor), but it is lighter an than THUNDER. Since the curved shape of LIPCA is from the thermal deformation during the manufacturing process of unsymmetrically laminated lay-up structure, an analysis for the thermal deformation and residual stresses induced during the manufacturing process is very important for an optimal design to increase the performance of LIPCA. To investigate the thermal deformation behavior and the induced residual stresses of LIPCA at room temperature, the curvatures of LIPCA were measured and compared with those predicted from the analysis using the classical lamination theory. A methodology is being studied to find an optimal stacking sequence and geometry of LIPCA to have larger specific actuating displacement and higher force. The residual stresses induced during the cooling process of the piezo-composite actuators have been calculated. A lay-up geometry for the PZT ceramic layer to have compression stress in the geometrical principal direction has been designed.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.5-8
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• 2005

In this paper, the electromechanical displacements of curved piezoelectric actuators composed of PZT ceramic and laminated composite materials are calculated based on high performance computing technology and the optimal configuration of composite curved actuator is examined. To accurately predict the local pre-stress in the device due to the mismatch in coefficients of thermal expansion, carbon-epoxy and glass-epoxy as well as PZT ceramic are numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers increases the number of degrees of freedom, large-scale structural analyses are performed through the PEGASUS supercomputer, which is installed in our laboratory. In the first stage, the curved shape of the actuator and the internal stress in each layer are obtained by the cured curvature analysis. Subsequently, the displacement due to the piezoelectric force (which is resulted from applied voltage) is also calculated. The performance of composite curved actuator is investigated by comparing the displacements obtained by the variation of thickness and elastic modulus of laminated composite layers. In order to consider the finite deformation in the first analysis stage and include the pre-stress due to curing process in the second stage, nonlinear finite element analyses are carried out.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.9-12
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• 2005

Recently, research on the morphing wing is an interesting issue to develop the capability of the wing such as improving the lift and reduction of drag during the operation of an aircraft by changing the wing shape from one configuration to another. A more efficient weight reduction of the wing using smart or morphing wing concept can be achieved in comparison with the conventional flaps. In this study, it is investigated the behaviors of the morphing wing using Macro Fiber Composite (MFC) actuators. Generally, MFC is the piezocomposite actuator with the rectangular PZT fiber and epoxy matrix, and uses the interdigitated electrode to produce more powerful actuation in the in-plane direction. Furthermore, it can produce the twisting actuation as compared with the traditional PZT actuators. In the formulation, the first-order shear deformation plate theory is used, and finite element method is adopted in the numerical analysis of the model. Results show the characteristics of the static behavior of the morphing wing according to the change of the actuation voltage.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.6
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• pp.193-199
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• 2001

Active control of forced vibration of the cantilevered laminated composite plates using collocated piezoceramic sensor/actuator is analyzed numerically and verified experimentally for various fiber orientations. Impact on the stiffness and the damping properties is studied by varying stacking sequence of [$\theta$$_{4}$O$_{2}$90$_{2}$]s for the laminated composite plate. For the forced vibration control, the plate is excited by one pair of collocated PZT exciters in resonance and its vibrational response is suppressed by the other collocated PZT sensor/actuator using direct negative velocity feedback. It is shown that the active control of forced vibration is more effective for the smart laminated plate with higher modal damped stiffness(2ζ$\omega$/aup 2/) .