• 제목/요약/키워드: PZT-5H

검색결과 71건 처리시간 0.026초

자기센서용 Fe78B13Si9/PZT/Fe78B13Si9 적층구조 소자의 ME 특성 (Magnetoelectric Characteristics on Layered Fe78B13Si9/PZT/Fe78B13Si9 Composites for Magnetic Field Sensor)

  • 류지구;전성즙
    • 센서학회지
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    • 제24권3호
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    • pp.181-187
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    • 2015
  • The magnetoelectric characteristics on layered $Fe_{78}B_{13}Si_9/PZT$ and $Fe_{78}B_{13}Si_9/PZT/Fe_{78}B_{13}Si_9$($t_m=0.017$, 0.034mm) composites by epoxy bonding for magnetic field sensor were investigated in the low-frequency range and resonance frequency range. The optimal bias magnetic field $H_{dc}$ of these samples was about 23~63 Oe range. The Me coefficient of $Fe_{78}B_{13}Si_9/PZT/Fe_{78}B_{13}Si_9(t_m=0.034mm)$ composites reaches a maximum of $186mV/cm{\cdot}Oe$ at $H_{dc}=63Oe$, f=50 Hz and a maximum of $1280mV/cm{\cdot}Oe$ at $H_{dc}=63Oe$, resonance frequency $f_r=95.5KHz$. The output voltage shows linearity proportional to ac fields $H_{ac}$ and is about U=0~130.6 mV at $H_{ac}=0{\sim}7Oe$, f=50 Hz, U=0~12.4 V at $H_{ac}=0{\sim}10Oe$, $f_r=95.5KHz$(resonance frequency). The optimal frequency(f=50 Hz) of this sample is around the utility ac frequency(f=60 Hz). Therefore, this sample will allow for ac magnetic field sensor at utility frequency and low bias magnetic fields $H_{dc}$.

Flux법에 의해 제조된 압전 세라믹(PZT)의 유전 및 압전특성 (Dielectric and Piezoelectric Properties on the Piezoceramics PZT by Molten Salt Synthesis)

  • 이수호;박준범;사공건
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1992년도 하계학술대회 논문집 B
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    • pp.721-723
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    • 1992
  • The electrical resistivity and piezoelectric properties have been studied for Lead Zirconate-Titanate(PZT) with $Nb_2O_5$ dopant, fabricated from conventional mixed-oxide powders and molten salt synthesis. The resistivity and electromechanical coupling factor(Kp) were increased with increasing Nb contents. The reason for increasing of the electrical resistivity below the Curie Temperature(Tc), It is believed that the p-type electrical conduction in PZT is caused by the lead vacancies. The electromechanical coupling factor(Kr) and piezoelectric constant $d_{33}$ were improved by Nb additives. This behavior can be explained as a compensation effect and $Nb^{5+}$ can serve as a donar and contribute electrons to the conduction process. As a result, the optimized $Nb_2O_5$ dopants on the PZT specimens were 0.75 wt%.

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기포탑반응기에서 연속공정을 이용한 PZT 분말의 합성 (The Synthesis of PZT Using Continuous Process in a Bubble Column Reactor)

  • 현성호;김정환;허윤행
    • 환경위생공학
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    • 제13권1호
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    • pp.147-156
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    • 1998
  • A synthesis process for PZT powder using $NH_{3}$ gas as a precipitator in a bubble column reactor was experimentally successful in develope a production process of piezoelectric ceramic PZT powder. Also as a reaction by coprecipitation, the crystalized PZT ceramic powder at the condition of over pH 9 could be attained. The time needed for reaction on the condition of $NH_{3}$ gas flow rate = 0.5 1/min, Ar gas flow rate = 2.0 1/min. Feed flow rate = 2.33 ml/sec was less than five minutes, so it could synthesize PZT powder for such a few moments. And the synthesized PZT powder was $0.17{\mu}m$ in diameter on an average.

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PZT센서를 이용한 철골보 손상계측 (A Damage Measurement of Steel Beam using PZT Sensor)

  • 서혜원;박민석;이수헌;신경재
    • 한국강구조학회 논문집
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    • 제22권5호
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    • pp.477-485
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    • 2010
  • 다양한 모니터링 센서는 구조물의 손상측정과 예측에 많이 사용되고 있다. 광섬유센서, 압전소자(PZT) 센서, MEMS(Micro Electro Mechanical System)센서 등의 스마트 센서는 기존 센서를 대체하여 많은 분야에서 사용되고 있다. 본 논문에서는 PZT센서를 실험체에 부착한 후 충격하중을 가하여 PZT센서의 출력 전압의 특성을 이용하여 실험체의 손상을 예측하고자 하였다. PZT센서를 이용한 보 이음부의 손상실험에서는 $H-400{\times}200{\times}8{\times}13$ 철골을 이용하여 단순보를 제작하고 중앙에 볼트 이음을 하였으며, PZT센서의 민감도 측정을 위해 기존 가속도계의 가속도값과 PZT센서의 전압값의 FFT 결과를 비교하였다. 또한 이음부의 볼트풀림을 이용하여 단순보의 손상을 가정하고 손상계측실험도 병행하였다. 철골 플레이트 보의 손상계측 실험에서는 $PL600{\times}65{\times}5.8$로 단순보 실험체를 제작하여 세 곳에 손상을 주어 충격하중 실험을 하였다. 손상의 정도는 쇠톱을 이용하여 보 단면의 양쪽에 6~42 mm로 절단하였다. FFT를 사용하여 손상의 유무에 따른 고유진동수의 비(${\omega}_c/{\omega}$)를 구하여 손상을 파악하였고 모드에 따른 손상의 위치와 정도를 파악하였다.

Sol-gel 압전체 박막을 이용한 각속도 센서에 대한 연구 (Study on Angular Rate Sensor using Sol-Gel PZT thin film)

  • Lee, S. H.;R. Meada;M. Esashi
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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    • pp.34-34
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    • 2003
  • Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

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부분수산법으로 제조한 PZT세라믹스의 특성에 미치는Nb2O5 첨가효과 (The Effect of Nb2O5 Addition on Properties of PZT Ceramics Prepared by Partial Oxalate Method)

  • 김태주;남효덕;이준형
    • 한국전기전자재료학회논문지
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    • 제16권1호
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    • pp.33-38
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    • 2003
  • Highly homogeneous PZT powder was prepared by a partial oxalate method using chemicals of (Z $r_{0.53}$ $Ti_{0.47}$) $O_2$, Pb(N $o_3$)$_2$and (COOH)$_2$ㆍ2$H_2O$. N $b_2$ $O_{5}$ addition effect on microstructure and electrical properties of PZT ceramics was investigated. When the precursors were calcined at 71$0^{\circ}C$, a single perovskite phase was obtained. After sintering at 110$0^{\circ}C$, X-ray diffraction Patterns showed coexistence of rhombohedral and tetragonal phases regardless of the N $b_2$ $O_{5}$ content. As the content of N $b_2$ $O_{5}$ increased, grain size decreased but sintered density increased. The electromechanical coupling factor of kp and the piezoelectric constant of $d_{31}$ increased linearly with the content of N $b_2$ $O_{5}$, and those values reached 0.7 and -200, respectively, when 1.2 mol% of N $b_2$ $O_{5}$ is added. is added.ded.

TiN/W 플러그 구조 위에 제작된 Ir/$IrO_2$/PZT/Pt/$IrO_2$/Ir 강유전체 커패시터의 전기적 특성 (Electrical Properties of Integrated Ir/$IrO_2$/PZT/Pt/$IrO_2$/Ir Ferroelectric Capacitor on TiN/W Plug Structure)

  • 최지혜;권순용;황성연;김윤정;손영진;조성실;이애경;박상현;이백희;박남균;박해찬;장헌용;홍석경;홍성주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.321-322
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    • 2006
  • The electrical properties of PZT thin film capacitor on TiN/W plug structure were investigated for high density ferroelectric memory devices. In order to enhance the ferroelectric properties of PZT capacitor, the process conditions of bottom electrodes were optimized. The fabricated PZT capacitor on TiN/W plug showed good remanent polarization, leakage current, and contact resistance of TiN/W plug, which were $33\;{\mu}C/cm^2$, $1.2{\times}10^{-6}\;A/cm^2$, and 5.3 ohm/contact, respectively.

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압전 액츄에이터용 PSN-PZT 세라믹스의 압전 특성에 미치는 MnO2 첨가 효과 (Effect of MnO2 on piezoelectric properties of PSN-PZT ceramics for piezoelectric actuator applications)

  • 최정운;송건화;김한지;윤석진;유광수
    • 센서학회지
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    • 제16권2호
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    • pp.120-125
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    • 2007
  • The effect of $MnO_{2}$ as a sintering additive on the microstructures and the piezoelectric properties, especially mechanical quality factor, of 0.05 Pb$(Sb_{0.5}Nb_{0.5})O_{3}$-0.95 Pb$(Zr_{0.52}Ti_{0.48})O_{3}$ (PSN-PZT) piezoelectric ceramics was investigated. The samples were sintered at $1250^{\circ}C$ for 2 h. The crystal structure and surface morphology of the sample were examined using XRD and FE-SEM, respectively. A study on the influence of $MnO_{2}$ additives on the dielectric and piezoelectric properties showed that the $MnO_{2}$-added PSN-PZT system exhibited a high mechanical quality factor and well-situated piezoelectric properties. The optimized results of $d_{33}$ (319 pC/N), $k_{p}$ (55 %), and $Q_{m}$ (751.24) were obtained at 0.2 wt% $MnO_{2}$ added PSN-PZT piezoelectrics.

지향성 스피커용 PSN-PZT 세라믹스의 압전 특성에 미치는 CeO2 첨가 효과 (Effect of CeO2 on piezoelectric properties of PSN-PZT ceramics for a hypersonic sound speaker application)

  • 최정범;송건화;김한지;황성익;유광수
    • 센서학회지
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    • 제17권2호
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    • pp.127-132
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    • 2008
  • The effect of $CeO_2$ as a sintering additive on the microstructure and the piezoelectric property of yPb$(Sb_{0.5}Nb_{0.5})O_3$-(1-y)Pb$(Zr_{0.52}Ti_{0.48})O_3$ ($0{\leq}y{\leq}0.1$, PSN-PZT) for a hypersonic sound speaker (HSS) application was investigated. The samples were sintered at $1250^{\circ}C$ for 2 h. The crystal structure and surface morphology of the samples were examined using XRD and FE-SEM, respectively. Study on the influence of $CeO_2$ additives on the dielectric and piezoelectric properties indicated that the $CeO_2$-added PSN-PZT system had a high piezoelectric properties. The optimized results of ${\varepsilon}_r=1209$, $K_p$=52% $d_{33}$=351(pC/N) and $Q_m$=1230.16 were obtained at 0.4 wt.% $CeO_2$-added PSN-PZT.

기포탑반응기에서 가스 SENSOR 재료인 PZT 분말의 합성(I)

  • 현성호;김정환
    • 한국화재소방학회논문지
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    • 제10권2호
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    • pp.40-51
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    • 1996
  • A synthesis process for PZT powder using NH$_3$ gas as a precipitator in a bubble column reactor was experimentally successful in develope a production process of Piezoelectric ceramic PZT powder. Also as a reaction by coprecipitation, the crystalized PZT ceramic powder at the condition of over pH 9 could be attained. The time needed for reaction on the condition of NH$_3$ gas flow rate=0.5 1/min, Ar gas flow rate=2.0 1/min, Feed flow rate=2.33 ml /sec was less than five minutes, so it could synthesize PZT powder for such a few moments. And the synthesized PZT powder was 0.17${\mu}{\textrm}{m}$ in diameter on an average.

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