• 센서학회지
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• 제8권1호
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• pp.89-94
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• 1999

In this study, a new technology to bond the PZT with connection board, which is a core technology for the fabrication of medical micro high frequency sensors, was developed. Two technologies were adopted. One is bonding of In using thermal heating, he other is bonding of Pb using a high frequency heating machine. In case of thermal eating, bonding was failed because of the contaminations of In surface. But, when using high frequency healing machine, we developed good bonding characteristics at various experimental conditions and thickness of the electrode material.

• Smart Structures and Systems
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• 제9권1호
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• pp.21-33
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• 2012

In this study, a Lamb-wave based damage detection approach is proposed for damage localization in plate. A sensor network consisting of three PZT wafer type actuators/sensors is used to generate and detect Lamb waves. To minimize the complication resulted from the multimode and dispersive characteristics of Lamb waves, the fundamental symmetric Lamb mode, $S_0$ is selectively generated through designing the excitation frequency of the narrowband input signal. A damage localization algorithm based upon the configuration of the PZT sensor network is developed. Time-frequency analysis method is applied to purify the raw signal and extract damage features. Experimental result obtained from aluminum plate verified the proposed damage localization approach.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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• pp.407-412
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• 1997

There has been a recent surge of research interest on the smart structure. This paper presents active vibration control scheme of multi-mode forced vibration using piezoceramic sensors/actuators. The control scheme adopted is the Positive Position Feedback control. Among various vibration control techniques, PPF control technique makes use of generalized displacement measurements to accomplish vibration suppression. Two independent controllers are implemented to control the first and the second modes of the beam under external excitation. Experimental results for various damping ratio and feedback gains of the PPF controllers are compared with respect to the control efficiency. The results indicate that steady state vibration under wideband excitation can be controlled effectively when multiple sets of PZT sensors/actuators were used with PPF control technique.

• Composites Research
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• 제17권4호
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• pp.61-67
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• 2004

Micromechanical 시험법과 음향방출을 이용하여 단일 basalt 섬유 강화 에폭시 복합재료의 비파괴 손상감지능을 평가하였다. 음향방출 센서로는 PZT 및 고분자 PVDF와 P(VDF-TrFE)를 사용하였고 단섬유 강화 시험법에서 각 센서 종류에 따른 손상감지능을 상호 비교하였다. 고분자 센서는 시편 표면에 부착시키거나 내부에 함침시켜 사용하였지만 PZT 센서는 표면에 부착하여 사용하였다. 고분자 센서를 시편 표면에 부착시킨 경우와 함침시킨 경우 감지능은 비슷하였지만 부착의 경우 debonding 신호가 많아 함침 시키는 방법이 손상감지에 더 효과적이었다. 손상 감지능은 PZT센서가 가장 높았고, 함침 및 부착 모두에서 PVDF와 P(VDF-TrFE) 센서의 손상감지능은 거의 비슷하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• International Journal of Concrete Structures and Materials
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• 제9권3호
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• pp.307-321
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• 2015

The primary objective of this study is to investigate the feasibility of an innovative surface-mount sensor, made of a piezoelectric disc (PZT sensor), as a consistent source for surface wave velocity and transmission measurements in concrete structures. To this end, one concrete slab with lateral dimensions of 1500 by 1500 mm and a thickness of 200 mm was prepared in the laboratory. The concrete slab had a notch-type, surface-breaking crack at its center, with depths increasing from 0 to 100 mm at stepwise intervals of 10 mm. A PZT sensor was attached to the concrete surface and used to generate incident surface waves for surface wave measurements. Two accelerometers were used to measure the surface waves. Signals generated by the PZT sensors show a broad bandwidth with a center frequency around 40 kHz, and very good signal consistency in the frequency range from 0 to 100 kHz. Furthermore, repeatability of the surface wave velocity and transmission measurements is significantly improved compared to that obtained using manual impact sources. In addition, the PZT sensors are demonstrated to be effective for monitoring an actual surface-breaking crack in a concrete beam specimen subjected to various external loadings (compressive and flexural loading with stepwise increases). The findings in this study demonstrate that the surface mount sensor has great potential as a consistent source for surface wave velocity and transmission measurements for automated health monitoring of concrete structures.

• 한국전기전자재료학회논문지
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• 제24권5호
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1326-1331
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• 2003

Thick PZT films are required for the cases of micro actuators and sensors with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Total 8 types of samples using thick PZT films with thicknesses, about $1{\mu}m$ and $2{\mu}m$, and Pt top electrodes shapes for measuring transverse piezoelectric coefficient ($e_{31,f}$) were fabricated using MEMS processes. They were characterized by fabricated e31,f measurement system before and after poling. $e_{31,f}$ values of samples after poling were higher than before poling. Those of $2{\mu}m$ thick PZT films were also higher than $1{\mu}m$ thick PZT films. And those with long electrodes as top electrodes were also higher than shorter.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2006년도 정기 학술대회 논문집
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• pp.15-20
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• 2006

Real time health monitoring system was studied to detect the . generation of defects in the composite structures during service life. The PZT sensors were embedded into the woven-glass/phenol composite plate during the fabrication. VARTM (Vacuum Assisted Resin Transfer Molding) process were used to fabricate the composite plate. A Teflon tape was embedded between glass fiber layers to mimic delamination induced during service. Normalized maximum amplitude and energy analyses were used for the acquired signals. Both amplitude and energy of acquired signals were extremely sensitive to the delamination. Therefore, it was successful to detect and to locate the defects in composite plate by monitoring signals from sensors and using the proposed method.

• 센서학회지
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• 제32권2호
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• pp.88-94
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• 2023

Recently, piezoelectric tactile sensors have garnered considerable attention in the field of texture recognition owing to their high sensitivity and high-frequency detection capability. Despite their remarkable potential, improving their mechanical flexibility to attach to complex surfaces remains challenging. In this study, we present a flexible piezoelectric sensor that can be bent to an extremely small radius of up to 2.5 mm and still maintain good electrical performance. The proposed sensor was fabricated by controlling the thickness that induces internal stress under external deformation. The fabricated piezoelectric sensor exhibited a high sensitivity of 9.3 nA/kPa ranging from 0 to 10 kPa and a wide frequency range of up to 1 kHz. To demonstrate real-time texture recognition by rubbing the surface of an object with our sensor, nine sets of fabric plates were prepared to reflect their material properties and surface roughness. To extract features of the objects from the detected sensing data, we converted the analog dataset to short-term Fourier transform images. Subsequently, texture recognition was performed using a convolutional neural network with a classification accuracy of 97%.