Surface Properties of the etched Pt thin films by Inductive Coupled plasma (ICP로 식각된 Pt 박막의 표면특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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- pp.285-288
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- 1997