PZT Patterning using Ion Milling Process for Micro Piezoelectric Actuator Fabrication (마이크로 압전 엑츄에이터 제조를 위한 PZT 박막의 이온 밀링 식각 공정 연구)

• 박준식;김대식;박광범;박효덕;장연태;강성군
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2001.05a
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  • pp.61-61
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  • 2001
• PDF

A study on the property of PZT Thin Film by RF magnetron sputtering (RF Magnetron Sputtering 으로 형성시킨 PZT 박막 특성 연구)

• 하용해;백수현;백상훈;최진석;이주현;조현춘;마재평
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1992.05b
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  • pp.138-139
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  • 1992
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Epitaxial PZT Thin Films with Coexisting Tetragonal and Rhombohedral Phases (정방정상과 능면체정상이 공존하는 에피형 PZT 박막)

• Jang, Hyeon-Myeong;O, Seong-Hun
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.04a
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  • pp.153.2-153.2
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  • 2000
• PDF

A Study on Electrical properties and stress of PZT Film capacitors (PZT박막캐패시터의 전기적성질과 응력에 관한 연구)

• Im, Wang-Gyu;An, Jeong-Ryeol;Lee, Jae-Chan
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.04a
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  • pp.53.2-53.2
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  • 2000
• PDF

Growth Characteristics of PZT thin films by MOCVD using Ultrasonic Nebulization (초음파분무 MOCVD법에 의한 PZT 박막의 성장특성)

• Sin, Ho-Sik;Lee, Chun-Ho
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.65.1-65
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  • 2000
• PDF

Dependence of electric and Piezoelectric properties on film thickness in sol-gel derived PZT thin films (Sol-Gel법으로 제조한 PZT 박막의 두께에 따른 특성변화)

• Park, Geun-Tae;Kim, Hyeon-Lee
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.177.2-177
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  • 2000
• PDF

Characteristic of Self-Aligned Single Grain PZT Thin Films utilizing Contact Plug Structure (Contact Plug 구조를 이용한 자기정렬 단결정립 PZT 박막의 특성)

• 김광호;이병일;주승기
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1997.10a
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  • pp.128-128
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  • 1997
• PDF

Quantitative analysis of the grain boundary effects on the electrical properties of PZT thin films (결정립계가 PZT 박막의 전기적 특성에 미치는 영향에 대한 정량적 분석)

• 이장식;주승기
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2000.11a
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  • pp.44-44
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  • 2000
• PDF

The Effects of Ion Damage on the Crystallized PZT Thin Films (결정화된 PZT 박막에 행해진 이온손상처리가 강유전 특성에 미치는 영향)

• 윤종인;이장식;박정호;주승기
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2000.11a
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  • pp.45-45
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  • 2000
• PDF

A Study on electrical properties and stress of PZT film capacitors (PZT 박막 캐패시터의 전기적성질과 응력에 관한 연구)

• 임왕규;김주호;김용성;이재찬
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2000.11a
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  • pp.105-105
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  • 2000
• PDF

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