• Title/Summary/Keyword: PSG

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Fabrication of Micro-structure using SOG as a Sacrificial Layer (SOG 희생층을 이용한 마이크로 구조의 형성)

  • Shin, Kyeong-Sik;Lee, Sung-Jun;Kim, Jeong-Goo;Choi, Yeon-Hwa;Kim, Chul-Ju
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.2001-2003
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    • 1996
  • In this study, Allied Signal 211 SOG was used as a sacrificial material. After researching its etching properties, we adapted it to bottom-drive micrometers. SOG was superior etch rate and roughness to them of PSG or CVD-oxide and possible to low-temperature processing. Etching properties of SOG depended on the temperature and duration of its bake and cure. SOG used in the fabrication of bottom-drive micrometers showed us usefulness as a sacrificial layer and haying a least influence on machines on it in comparison with conventional sacrificial materials.

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An Estimation on Characteristics of SOG Film for MEMS Application (MEMS 응용을 위한 SOG 막의 특성 평가)

  • Kim, Hyoung-Dong;Lee, Seong-Jun;Pack, Seung-Ho;Kim, Chul-Ju
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.609-611
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    • 1995
  • In this study, we experimented the properties of SOG film as sacrificials layers in surface micromachining and made $SiO_2$ films through spin, bake, cure process. When we culled SOG films once, SOG film thickness is 1000 $\sim$ 3000 ${\AA}$. Then we coaled 200-${\AA}$ SOG film on 9000 ${\AA}$-CVD oxide and then we fabricated test structure, cantilever and ring/beam structure. We estimated deformed structure by SEM. As the results, The deformation of the structure layer in the SOG-coated sacrificial layers is small compared with that or the structure layer on CVD oxide or PSG. In the future, we use multi coated SOG films, SOG film become adequate material as sacrificial layer.

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Investigation of Inter Fiber Cohesion in Yarns. I. Influence of Certain Spinning Parameters on the Cohesion in Cotton Yarns

  • Gokarneshan N.;Ghosh Anindya;Anbumani N.;Subramaniam V.
    • Fibers and Polymers
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    • v.6 no.4
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    • pp.336-338
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    • 2005
  • This paper investigates the influence of raw material and process parameters in spinning that affect the inter fiber cohesion in yams. An instrument has been developed for measuring the minimum twist of cohesion. With regard to the raw material parameters, the influence of different cotton fiber mixings for a given count of yarn is investigated. Also the effect of spinning to varying counts for a given cotton variety is studied. With regard to the process parameters, studies have been carried out to investigate the influence of noil extraction in comber, number of draw frame passages, draft pressure in ring frame and direction of twist. Cohesion improved with increase in the noil extraction percentage in the comber. Increase in the number of draw frame passages also improved the cohesion. Draft pressure in ring frame improved the fiber cohesion in yarn up to a pressure of $2.1kg/cm^2$. Direction of twist had no effect on the cohesion.

Flail arm syndrome with several issues related to the diagnostic process

  • Kim, Jae-Youn;Park, Yun Kyung;Yoon, Bora;Lee, Kee Ook;Kim, Yong-Duk;Na, Sang-Jun
    • Annals of Clinical Neurophysiology
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    • v.19 no.1
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    • pp.68-70
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    • 2017
  • Flail arm syndrome (FAS), known as one of the atypical amyotrophic lateral sclerosis (ALS) variants, has a similar clinical course and pathologic findings as ALS. Therefore it is difficult to differentiate between ALS and FAS at a glance. There are few reports involving individual analysis of FAS patients to date. The findings of polysomnography (PSG) in patient with FAS are not well known. We report a male FAS patient with review of literatures and several issues related to the diagnostic process.

Comparison of Sleep Parameter according to Apnea-Hypopnea Index

  • Jin, Bok-Hee
    • Korean Journal of Clinical Laboratory Science
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    • v.44 no.4
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    • pp.205-209
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    • 2012
  • Obstructive sleep apnea (OSA) is the most common type of sleep apnea and is caused by obstruction of the upper airway. It is characterized by repetitive pauses in breathing during sleep despite the effort to breathe. Apnea is closely related to clinical findings and respiratory disturbance index (RDI). The total subjects were 42 (male 26, female 16) and examined by polysomography (PSG) in terms of RDI above 5 and below 5 at Mok-Dong Hospital in Ewha Womans University from January to June, 2012. The study revealed the followings: The comparison of clinical findings and RDI above 5 showed significant increase in age, BMI, and snoring sound although lowest $SpO_2$ level decreased. The correlation coefficient analysis between clinical findings and RDI showed statistically significant correlation in age, BMI, lowest $SpO_2$ although snoring sound and average $SpO_2$ showed statistically insignificant correlation.

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The Emphasized Role of the Dentist to Diagnose and Treat Snoring and Obstructive Sleep Apnea (임상가를 위한 특집 1 - 코골이와 폐쇄성 수면무호흡증의 진단 및 치료의 중요성과 치과의사의 역할)

  • Kim, Hyeon-Cheol
    • The Journal of the Korean dental association
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    • v.48 no.3
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    • pp.178-183
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    • 2010
  • Obstructive Sleep Apnea(OSA) is a form of sleep disordered breathing(SDB) characterized by the occurrence of episodes of complete or partial upper airway obstruction during sleep that is often quantified as the apnea-hyponea index(AHI). It is increasingly being recognized that OSA is a public health hazard and there is increasing evidence that it is associated with an increase in morbidity. Early recognition and diagnosis of this condition may lead to earlier treatments (eg, CPAP, Oral appliances) with reduction of the risk of metabolic disease, cardiovascular diseases, such as hypertension, ischemic heart disease, arrhythmias and pulmonary hypertension.

Investigations on state estimation of smart structure systems

  • Arunshankar, J.
    • Smart Structures and Systems
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    • v.25 no.1
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    • pp.37-45
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    • 2020
  • This paper aims at enlightening the properties, computational and implementation issues related to Kalman filter based state estimation algorithms and sliding mode observers, by applying them for estimating the states of a smart structure system. The Kalman based estimators considered in this work are Kalman filter and information filter and, the sliding mode observers considered are Utkin observer and higher order sliding mode observer. A fourth order linear time invariant model of a piezo actuated beam is used in this work. This structure is embedded with four number of piezo patches, of which two act as sensors, one as disturbance actuator and the other as control actuator. The performance of the state estimation algorithms is evaluated through simulation, for the first two vibrating modes of the piezo actuated structure, when the structure is maintained at first mode and second mode resonance.

Optimal laminate sequence of thin-walled composite beams of generic section using evolution strategies

  • Rajasekaran, S.
    • Structural Engineering and Mechanics
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    • v.34 no.5
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    • pp.597-609
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    • 2010
  • A problem formulation and solution methodology for design optimization of laminated thin-walled composite beams of generic section is presented. Objective functions and constraint equations are given in the form of beam stiffness. For two different problems one for open section and the other for closed section, the objective function considered is bending stiffness about x-axis. Depending upon the case, one can consider bending, torsional and axial stiffnesses. The different search and optimization algorithm, known as Evolution Strategies (ES) has been applied to find the optimal fibre orientation of composite laminates. A multi-level optimization approach is also implemented by narrowing down the size of search space for individual design variables in each successive level of optimization process. The numerical results presented demonstrate the computational advantage of the proposed method "Evolution strategies" which become pronounced to solve optimization of thin-walled composite beams of generic section.

Existence and Uniqueness Results for a Coupled System of Nonlinear Fractional Langevin Equations

  • Sushma Basil;Santhi Antony;Muralisankar Subramanian
    • Kyungpook Mathematical Journal
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    • v.63 no.3
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    • pp.437-450
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    • 2023
  • In this paper, we present a sufficient condition for the unique existence of solutions for a coupled system of nonlinear fractional Langevin equations with a new class of multipoint and nonlocal integral boundary conditions. We define a 𝓩*λ-contraction mapping and present the sufficient condition by identifying the problem with an equivalent fixed point problem in the context of b-metric spaces. Finally, some numerical examples are given to validate our main results.

A Case of Child with Obstructive Sleep Apnea Syndrome Recurred after Adenotonsillectomy (편도 및 아데노이드 절제술 후 재발한 폐쇄성 수면 무호흡 증후군 소아 1례)

  • Kim, Cu-Rie;Kim, Dong-Soon;Seo, Hyun-Joo;Shin, Hong-Beom;Kim, Eui-Joong;Shim, Hyun-Joon;Ahn, Young-Min
    • Sleep Medicine and Psychophysiology
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    • v.15 no.2
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    • pp.94-99
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    • 2008
  • The most common cause of obstructive sleep apnea syndrome (OSAS) in childhood is adenotonsillar hypertrophy. Adenotonsillectomy improves the symptoms quite well in most cases. However, some patients could experience the OSAS again after adenotonsillectomy, who might have several risk factors such as incomplete operation, misdiagnosis, combined anatomical malformation, sinusitis or chronic allergic rhinitis, obesity, initial severe OSAS, and early onset OSAS. We report a case of 11-year-old obese boy who presented with snoring for several years. He was obese with body mass index (BMI) of $26.3kg/m^2$ and also found to have fatty liver by ultrasonogram. Initial polysomnography (PSG) showed that he met the criteria of severe OSAS with the apnea-hypopnea index (AHI) of 70.5. He underwent adenotonsillectomy and symptoms improved immediately. Four months later symptoms were relieved with AHI of 0, but 1 year after the adenotonsillectomy he started to complain snoring again and the subsequent PSG results showed that OSAS has relapsed with AHI of 43. Paranasal sinus X-ray and physical examination showed sinusitis and re-growth of adenoid. Obesity was proved not to be a contributing factor because his BMI decreased to normal range ($23.1kg/m^2$) after diet control and regular exercise. Also, liver transaminase was normalized and fatty liver was disappeared on follow-up abdominal ultrasonogram. After treatment of sinusitis, symptoms were relieved with decreased AHI (8.5). This case suggests that simple adenotonsillectomy might not be the end of OSAS treatment in childhood. Patients who had adenotonsillectomy should be followed by subsequent PSG if symptoms recur. It is also important to be aware of risk factors in the recurrent OSAS for the proper intervention according to the cause.

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