• Journal of Information Display
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• v.6 no.3
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• pp.18-21
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• 2005

A new technology for reducing photolithography process from a four step to a three step process in the fabrication of TFT LCD is introduced. The core technology for 3-mask-TFT processes is the lift-off process [1], by which the PAS and PXL layers can be formed simultaneously. A different method of the lift-off process was developed in order to enhance the performance of efficiency with conventional positive and not negative PR which is the generally used in other lift-off process. In addition, the removal capacity of the ITO/PR in lift-off process was evaluated. The evaluation results showed that the new process can be run in conventional TFT production condition. In order to apply this new process in existing TFT process, several tests were conducted to ensure stability of the TFT process. It was found that the outgases from PR on the substrate in ITO sputtering chamber do not raise any problem, and the deposited ITO film beside the PR has conventional ITO qualities. Furthemore, the particles that were produced due to the ITO chips in PR strip bath could be reduced by the existing filtering system of stripper. With the development of total process and design of the structure for TFT using this technology, 3-mask-panels were achieved in TN and IPS modes, which showed the same display performances as those with the conventional 4mask process. The applicability and usefulness of the 3-mask process has already verified in the mass production line and in fact it currently being used for the production of some products.

• Clean Technology
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• v.17 no.4
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• pp.300-305
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• 2011

A mixture of supercritical carbon dioxide and a co-solvent was employed to strip a high-dose ion-implanted photoresist (HDIPR) from the surface of semiconductor wafers. The stripping efficiency was highly improved by the physical force generated from a ultrasonication tip inside the reactor. In addition, helium gas was injected in the reactor as a barrier gas before the introduction of pure supercritical $CO_2$ ($scCO_2$), which reduced the rinsing time significantly. The effect of co-solvents on the stripping efficiency was investigated. The wafer surfaces were analyzed by scanning electron microscopy and by an energy dispersive X-ray spectrometer.

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.151-156
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• 1995

0.5$\mu$m 이하 급의 device에서 TEOS/O3 BPSG 박막을 층간절연막(Interlayer Dielectric)으로 사용하여, 평탄화를 위해 etchback 공정을 적용할 때 BPSG 박막이 가지는 구조적, 화학적 불안정성으로 인해 B,P 농도의 변화나 crack 발생 현상이 일어날 수 있다. 본 실험에서는 이러한 현상을 억제하기 위해 농도를 달리한 이층막의 증착, PR strip 시에 사용하는 wet chemical의 변경 및 증착후 치밀화(densificaiton)공정추가 등의 방법을 사용하였으며, 이에 따른 박막 특성의 변화를 조사하였다.

• Resources Recycling
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• v.25 no.6
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• pp.50-57
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• 2016

This work was examined the extraction and stripping behavior of rare earths (La, Ce, Pr, Nd, Sm) from the hydrochloric acid solution by Cyanex 572 and compared to the results that of PC88A. Experimental parameters such as equilibrium pH, extractant & strip reagent concentration were observed and extraction percentage, distribution coefficient, stripping percentage and the separation factor of the adjacent element were analyzed. The $pH_{50}$ values was more higher using Cyanex 572 than that of PC88A. As the increase of the extractant concentration, the distribution coefficient of rare earth elements was increased. Stripping percentage of rare earth elementss from the Cyanex 572 was 85% to 95% and PC88A showed 80% to 87%. Separation factor of Ce/La, Ce/Pr, Pr/Nd, Nd/Sm was enhanced about 1.0-5.0 using Cyanex 572 as an extractant in mixture solution.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.35 no.2B
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• pp.197-209
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• 2010

In this paper, We have designed and analyzed a characteristics of backplane channel having 40 inch strip line length of four lanes and Flame Retardant four (PR-4) material, and have designed 40 Gb/s Receive and adaptive equalizer and its high-speed equalization algorithm using the backplane channel characteristics. For 40 Gb/s high-speed data communications pass through the backplane, a 10Gb/s 4 channel receive & equalizer with DFE except for FFE was proposed. This receive and equalizer meets the requirements of the IEEE Std P802.3ba standard-based receive equalizer to implement equalizers on the receive end of a 46 inch length's backplane channel.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2008-2010
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• 2002

Process conditions of a novel negative thick photoresist, JSR THB-$430N^{(R)}$, are established in this paper. Although SU-8 obtains uniform and high-aspect-ratio structures, it is hard to remove the SU-8 mold after electroplating. The JSR THB-$430N^{(R)}$ can be more easily removed than the SU-8 and has a low internal stress. Introducing two step strip processes using acetone and the jSR THB-$S1^{(R)}$, the JSR THB-$430N^{(R)}$ electroplating mold was removed completely and a JSR THB-$430N^{(R)}$ film stress is compressive less than 2 MPa. In this paper, we obatined $200{\mu}m$ thick PR structure and $100{\mu}m$ thick electroplated nickel structure using the JSR THB-$430N^{(R)}$ photoresist.

• The Korean Journal of Pesticide Science
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• v.15 no.4
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• pp.485-489
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• 2011

In previous reports, the treatment of Bacillus amyloliquefaciens strain EXTN-1 showed a broad diseasecontrolling spectrum to the plant diseases caused by viral, bacterial, and fungal pathogens as well as the promotion of plant growth. In mechanisms of EXTN-1, treatment of EXTN-1 increased oxidative burst in early stage and induced the expression of resistance genes, PR-1a, PDF1.2. Mechanism involved in induced systemic resistance by EXTN-1 was revealed as simultaneous activation of SA and JA or ethylene metabolic pathways. The purpose of this study was to determine whether B. amyloliquefaciens EXTN-1 has a similar effect on rice plant against Rice stripe tenuivirus (RSV) under greenhouse conditions. When rice seeds were soaked in B. amyloliquefaciens strain EXTN-1, rice plants showed significant systemic resistance against RSV as well as promoted growth. In the case of plant growth, in 30-day old plants treated with B. amyloliquefaciens EXTN-1, the heights, weights, and lengths of roots increased by 12.6%, 9.8%, and 16.0%, respectively confirming the effects of PGPR. When the induced systemic resistance to RSV was examined, in 20-day old plants were treated with B. amyloliquefaciens EXTN-1, the heights, weights, and lengths of roots increased by 8.4%, 10.9%, and 4.8%, respectively compared to the control. Induced systemic resistance was more prominent in susceptible cultivars - Chucheong and Ilpum compared to the resistant cultivar, Nakdong.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2000.04a
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• pp.9-10
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• 2000

An important business-field of world-wide steel-industry is the coating of thin metal-sheets with zinc, zinc-aluminum and aluminum based materials. These products mostly go into automotive industry. in particular for the car-body. into building and construction industry as well as household appliances. Due to mass-production, the processing is done in large continuously operating plants where the mostly cold-rolled metal-strip as the substrate is handled in coils up to 40 tons unwind before and rolled up again after passing the processing plant which includes cleaning, annealing, hot-dip galvanizing / aluminizing and chemical treatment. In the liquid Zn, Zn-AI, AI-Zn and AI-Si bathes a combined action of corrosion and wear under high temperature and high stress onto the transfer components (rolls) accounts for major economic losses. Most critical here are the bearing systems of these rolls operating in the liquid system. Rolls in liquid system can not be avoided as they are needed to transfer the steel-strip into and out of the crucible. Since several years, ceramic roller bearings are tested here [1.2], however, in particular due to uncontrollable Slag-impurities within the hot bath [3], slide bearings are still expected to be of a higher potential [4]. The today's state of the art is the application of slide bearings based on Stellite\ulcorneragainst Stellite which is in general a 50-60 wt% Co-matrix with incorporated Cr- and W-carbides and other composites. Indeed Stellite is used as the bearing-material as of it's chemical properties (does not go into solution), the physical properties in particular with poor lubricating properties are not satisfying at all. To increase the Sliding behavior in the bearing system, about 0.15-0.2 wt% of lead has been added into the hot-bath in the past. Due to environmental regulations. this had to be reduced dramatically_ This together with the heavily increasing production rates expressed by increased velocity of the substrate-steel-band up to 200 m/min and increased tractate power up to 10 tons in modern plants. leads to life times of the bearings of a few up to several days only. To improve this situation. the Mechanical Alloying (MA) TeChnique [5.6.7.8] is used to prOduce advanced Stellite-based bearing materials. A lubricating phase is introduced into Stellite-powder-material by MA, the composite-powder-particles are coated by High Energy Milling (HEM) in order to produce bearing-bushes of approximately 12 kg by Sintering, Liquid Phase Sintering (LPS) and Hot Isostatic Pressing (HIP). The chemical and physical behavior of samples as well as the bearing systems in the hot galvanizing / aluminizing plant are discussed. DependenCies like lubricant material and composite, LPS-binder and composite, particle shape and PM-route with respect to achievable density. (temperature--) shock-reSistibility and corrosive-wear behavior will be described. The materials are characterized by particle size analysis (laser diffraction), scanning electron microscopy and X-ray diffraction. corrosive-wear behavior is determined using a special cylinder-in-bush apparatus (CIBA) as well as field-test in real production condition. Part I of this work describes the initial testing phase where different sample materials are produced, characterized, consolidated and tested in the CIBA under a common AI-Zn-system. The results are discussed and the material-system for the large components to be produced for the field test in real production condition is decided. Outlook: Part II of this work will describe the field test in a hot-dip-galvanizing/aluminizing plant of the mechanically alloyed bearing bushes under aluminum-rich liquid metal. Alter testing, the bushes will be characterized and obtained results with respect to wear. expected lifetime, surface roughness and infiltration will be discussed. Part III of this project will describe a second initial testing phase where the won results of part 1+11 will be transferred to the AI-Si system. Part IV of this project will describe the field test in a hot-dip-aluminizing plant of the mechanically alloyed bearing bushes under aluminum liquid metal. After testing. the bushes will be characterized and obtained results with respect to wear. expected lifetime, surface roughness and infiltration will be discussed.