• Journal of the Semiconductor & Display Technology
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• v.5 no.2 s.15
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• pp.33-36
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• 2006

Many issues arose to use the Pb-free solder as adhesive materials in MEMS ICs and packaging. Then this study for easy and simple sealing method using adhesive materials was carried out to maintain hermetic characteristic in MEMS Package. In this study, Hermetic characteristic using negative PR (XP SU-8 3050 NO-2) as adhesive at the interface of Si test coupon/glass substrate and Si test coupon/LTCC substrate was examined. For experiment, the dispenser pressure was 4 MPa and the $200\;{\mu}m{\Phi}$ syringe nozzle was used. 3.0 mm/sec as speed of dispensing and 0.13 mm as the gap between Si test coupon and nozzle was selected to machine condition. 1 min at $65^{\circ}C$ and 15 min at $95^{\circ}C$ as Soft bake, $200\;mj/cm^2$ expose in 365 nm wavelength as UV expose, 1 min at $65^{\circ}C$ and 6 min at $95^{\circ}C$ as Post expose bake, 60 min at $150^{\circ}C$ as hard bake were selected to activation condition of negative PR. Hermetic sealing was achieved at the Si test coupon/ glass substrate and Si test coupon/LTCC substrate. The leak rate of Si test coupon/glass substrate was $5.9{\times}10^{-8}mbar-l/sec$, and there was no effect by adhesive method. The leak rate of Si test coupon/LTCC substrate was $4.9{\times}10^{-8}mbar-l/sec$, and there was no effect by dispensing cycle. Better leak rate value could be achieved to use modified substrate which prevent PR flow, to increase UV expose energy and to use system that controls gap automatically with vision.

• Asian-Australasian Journal of Animal Sciences
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• v.14 no.2
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• pp.280-287
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• 2001

These studies aimed to determine how lighting might be used to improve feed intake and reduce aggressive behavior in newly weaned pigs. To examine whether this objective could be achieved an experiment was conducted to compare performance, behavior and body condition of weaners over 17-45 days, provided similar lighting quality (i.e. color temperature, color rendering index and lighting distribution) after weaning that piglets experienced prior to weaning. Triphosphor (TP) lighting to simulate daylight was provided during the day while at night, Pascal red (PR) lighting was provided to simulate the night-light piglets previously had received from infrared heating lamps. This treatment was compared to weaners provided conventional cool-white fluorescent light during the day only. Weaners on treatment lighting from 17-45 days of age showed no improvement in body weight or feed conversion at 24, 31, 38 and 45 days compared to the controls. There was, however, a significant improvement (p<0.05) in feed intake in the first week of weaning for weaners provided TP/PR lighting. Over the first 3 days of weaning, pigs on TP/PR lighting showed an increase (p<0.05) in the incidence of ear chewing but reduced (p<0.05) levels of nosing the abdomen of other pigs and reduced (p<0.05) occurrences of being stood on by other pigs. Females exhibited more (p<0.05) mounting and nosing behaviors and rubbing the heads of other pigs than males. On the other hand, males engaged in more (p<0.05) fighting, nipping, ear chewing and standing on other pigs compared to females. Pigs provided PR lighting on the first night of weaning engaged in higher (p<0.05) incidences of nosing and tail sucking behaviors, more (p<0.05) head thrusting, fighting and ear chewing compared to control pigs. The body condition of weaners provided the TP/PR lighting treatment was significantly poorer (p<0.05) compared to weaners on control lighting. In conclusion there was no improvement in production performance of weaners provided new technology lighting apart from the improvement in feed intake in the first week weaners were exposed to the TP/PR lighting.

• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.113-116
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• 2008

As the integration in semiconductor display develops, semiconductor process becomes multilayer. In order to form several layer patterns, etching process which uses photoresistor (PR) must be performed in multilayer process. Repeated etching processes which take long time and PR residue cause mortal problems in semiconductor. To overcome such problems, we studied about the solution which eliminates PR effectively by using normal dry and wet etching method using plasma activated PR strip solvent in liquid condition. At first, we simulate the device which activates the plasma and make sure whether gas flow in device is uniform or not. Under activated plasma, etching effect is elevated. This improvement reduces etching time as well as display production time of semiconductor process. Generally, increasing etching process increases environmental hazards. Reducing etching process can save the etchant and protect environment as well.

• Transactions on Electrical and Electronic Materials
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• v.15 no.3
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• pp.159-163
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• 2014

More accurate CD (Critical Dimension) control is required for the nanometer-scaled devices. However, since the reflectivity between substrate and PR (Photoresist) becomes higher, the CD (Critical Dimension) swing curve was intensified. The higher reflectivity also causes PR notching due to the pattern of sub-layer. For this device requirement, it was optimized for the thickness, refractive index(n) and absorption coefficient(k) in the bottom anti-reflective coating(BARC; SiON) and photoresist with the minimum reflectivity. The computational simulated conditions, which were determined with the thickness of 33 nm, n of 1.89 and k of 0.369 as the optimum condition, were successfully applied to the experiments with no standing wave for the 0.13um-device. At this condition, the lowest reflectivity was 0.44%. This optimum condition for BARC SiON film was applied to the process for 0.13um-device. The optimum SiON film as BARC to PR and sub-layer could be formed with the accurate CD control and no standing waver for the nanometer-scaled semiconductor manufacturing process.

• Electrical & Electronic Materials
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• v.7 no.4
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• pp.300-305
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• 1994

We determined the alloy composition of the liquid-phase epitaxy(LPE) grown $Al_{x}$G $a_{1-x}$ As by the photoreflectance(PR), and observed the variation of PR signal by changing the condition of annealing and thickness of epilayer. As the measuring temperature was decreased, the broadening parameter was decreased, and the amplitude of PR signal was increased. When the temperature of annealing was increased, the surface carrier concentration was decreased and then the shape and amplitude of PR signal were affected by the surface electric field. The structure change was observed when the specimen was annealed for long time at a high temperature. We found that the surface electric field increased when the thickness of epilayer was decreased by etching, because the band bending was increased by the decreased of the width of depletion layer....

• Journal of Electrical Engineering and Technology
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• v.7 no.6
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• pp.918-925
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• 2012

This paper proposes a control method for grid-connected inverter systems under unbalanced and distorted grid voltage. The proposed method can reduce the power ripple caused by the unbalanced condition and compensate for the low-order harmonics of the output currents caused by the distortion of grid voltage. To reduce the power ripple, our method replaces the two conventional PI controllers with one PR controllers in the stationary frame. PR controllers can implement selective harmonic compensation without excessive computational requirements; the use of these controllers simplifies the method. Both the simulated and experimental results agree well with the theoretical analysis.

• Analytical Science and Technology
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• v.8 no.2
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• pp.125-129
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• 1995

The energy transfer is observed in double-activator-doped LaOCl:Pr, Tb and LaOCl:Pr, Eu system. From laser excitation and fluorescence spectra, a peculiar process for energy transfer between the activators is found. The energy absorbed by $Tb^{3+}$ is directly transferred to $Pr^{3+}$ ion. A cascade relaxation of an excited $Pr^{3+}$ level to lower level, $^1D_2$ is induced by $Eu^{3+}$, $Tb^{3+}$, which has $^7F_J$ ground levels like $Eu^{3+}$ ion, does not affect the cascade relaxation. The result represents that the quantum state of ion is not absolute condition for the energy transfer and that the energy transfer is competitive between levels of activator when the activator ions are closely located.

• Journal of Advanced Marine Engineering and Technology
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• v.38 no.6
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• pp.602-608
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• 2014

Hydrogen energy, a field of low-carbon substitute energy, can be produced by fossile fuel reforming and electrolysis of water etc. We developed 1kW class flat type reformer for PEM Fuel Cells. The PEMFC is highly sensitive to carbon monoxide because CO has detrimental effects on the performance of the fuel cell. Thus, reformed gas supplied to Fuel cell system, which maintained CO concentration below 10ppm. After applying optimum drive condition, reformed gas was measured with gas chromatography and could find out about each experimental condition of $H_2$ and CO concentration. As a results, The 1kW class plate type hydrogen generation system's optimum condition is A/F ratio ${\alpha}=1.3$, STR temperature 1023K, S/C ratio 3, and $PrOx1{\cdot}2$ 30cc/min. It turns out that installation of PrOx 2 stage is more efficient for reducing CO concentration.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.5
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• pp.672-678
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• 2009

Acoustic Emission (AE) technique is a non-destructive testing method and widely used for the early detection of faults in rotating machines in these days, because the sensitivity of AE transducers is higher than normal accelerometers. So it can detect low energy vibration signals. The faults in the rotating machines are generally occurred at bearings and gearboxes which are the principal parts of the machines. It was studied to detect the bearing faults by envelop analysis in several decade years. And the researches showed that AE had a possibility of the application in condition monitoring system(CMS) using the envelope analysis for the rolling bearing. And peak ratio (PR) was developed for expression of the bearing condition in condition monitoring system using AE. Noise level is needed to reduce to take exact PR value because the PR is calculated from total root mean square (RMS) and the harmonics peak levels of the defect frequencies of the bearing. Therefore, in this paper, the discrete wavelet transform (DWT) was added in the envelope analysis to reduce the noise level in the AE signals. And then, the PR was calculated and compared with general envelope analysis result and the result of envelope analysis added the DWT. In the experiment result about inner fault of bearing, defect frequency was difficult to find about only envelop analysis. But it's easy to find defect frequency after wavelet transform. Therefore, Envelop analysis added wavelet transform was useful method for early detection of default in signal process.

• Clean Technology
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• v.23 no.4
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• pp.357-363
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• 2017

In this study, the supercritical carbon dioxide ($scCO_2$)/ n-butyl acetate (n-BA) co-solvent system was employed to remove an unexposed negative photoresist (PR) from the surface of a silicon wafer. In addition, the selectivity of the $scCO_2$/n-BA co-solvent system was confirmed for the unexposed and exposed negative PR. Optimum conditions for removal of the unexposed PR were obtained from various conditions such as pressure, temperature and n-BA ratio. The n-BA was highly soluble in $scCO_2$ without cloud point and phase separation in mostly experimental conditions. However, the $scCO_2$/n-BA co-solvent was phase separated at 100 bar, above $80^{\circ}C$. The unexposed and exposed PR was swelled in $scCO_2$ solvent at all experimental conditions. The complete removal of unexposed PR was achieved from the reaction condition of 160 bar, 10 min, $40^{\circ}C$ and 75 wt% n-BA in $scCO_2$, as measured by ellipsometry. The exposed photoresist showed high stability in the $scCO_2$/n-BA co-solvent system, which indicated that the $scCO_2$/n-BA co-solvent system has high selectivity for the PR removal in photo lithograph process. The $scCO_2$/n-BA co-solvent system not only prevent swelling of exposed PR, but also provide efficient and powful performance to removal unexposed PR.