• 제목/요약/키워드: PLASMA SURFACE TREATMENT

검색결과 990건 처리시간 0.027초

알루미늄/CFRP 복합재의 플라즈마 표면처리의 효과 (The effect of plasma treatment of aluminum/CFRP composites)

  • 신명근;김만태;한운용;이지훈;이경엽
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.401-404
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    • 2003
  • This paper investigates the effect of plasma treatment of aluminum on the fracture toughness of aluminum/CFRP composites, The surface of the aluminum panel was treated by a DC plasma. The plasma treatment was carried out at volume ratio of acetylene gas to nitrogen gas of 5:5 and the treatment times used was 30 sec. The fracture toughness of plasma-treated aluminum/CFRP' composites was compared with that of untreated aluminum/CFRP composites and The fracture surface of aluminum/CFRP composites was compared with SEM. The results showed that fracture toughness of plasm-treated aluminum/CFRP composites was about 50% higher than that of untreated aluminum/CFRP composites.

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대기압 플라즈마 제트를 이용한 실버페이스트 전극의 표면처리 (Surface treatment of silver-paste electrode by atmospheric-pressure plasma-jet)

  • Sheik Abdur Rahman;Shenawar Ali Khan;Yunsook Yang;Woo Young Kim
    • 한국응용과학기술학회지
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    • 제40권1호
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    • pp.71-80
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    • 2023
  • 실버 페이스트는 상대적으로 낮은 열처리로 공정이 가능하기 때문에 전자 소자 응용분야에서 유용한 전극 재료이다. 본 연구에서는 은 페이스트 전극에 대기압 플라즈마 제트를 이용하여 전극 표면을 처리 했다. 이 플라즈마 제트는 11.5 kHz 작동 주파수에서 5.5 ~ 6.5 kV의 고전압을 사용하여 아르곤 분위기에서 생성되었다. 플라즈마 제트는 대기압에서 수행함으로써 인쇄 공정에 더 유용할 수 있다. 플라즈마 처리시간, 인가된 전압, 가스유량에 따라 전극의 표면은 빠르게 친수성화 되었으며 접촉각의 변화가 관찰되었다. 또한, 대면적 샘플에서 플라즈마 처리 후 접촉각의 편차가 없었는데, 이는 기판의 크기에 관계없이 균일한 결과를 얻을 수 있었다는 것을 의미한다. 본 연구의 결과는 대면적 전자소자의 제조 및 향후 응용 분야에서 적층 구조를 형성하는데 매우 유용할 것으로 기대된다.

스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구 (A Study on the Pd-Ni Alloy Hydrogen Membrane Using the Sputter Deposition)

  • 김동원;박정원;김상호;박종수
    • 한국표면공학회지
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    • 제37권5호
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    • pp.243-248
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    • 2004
  • A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$\textrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.

탄소계 박막의 표면 처리에 의한 전계전자방출 특성의 개선 (Improvement of field emission character by surface treatment of carbon thin film)

  • 류정탁;;;;김연보
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.147-150
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    • 2002
  • The electron field emission properties of amorphous carbon (a-C) films deposited using a RF magnetron sputtering system have been improved by introducing a simple method of argon plasma treatment at room temperature. Surface morphologies and structural properties of the a-C films were investigated by scanning electron microscopy and Raman spectroscope, respectively. Structural properties and surface morphologies of the a-C films were changed by argon plasma treatment. The emission properties improved with the plasma treatment.

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유도결합플라즈마 표면 처리 및 SnO2 증착에 따른 폴리카보네이트 특성 연구 (Influence of Inductive Coupled Plasma Treatment and SnO2 Deposition on the Properties of Polycarbonate)

  • 엄태영;최동혁;손동일;엄태용;김대일
    • 한국전기전자재료학회논문지
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    • 제31권3호
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    • pp.156-159
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    • 2018
  • Inductively coupled plasma (ICP) treatment with argon and a mixture of argon and oxygen gases has been used to modify the surface of polycarbonate (PC) substrates. The results showed that the surface contact angle was inversely proportional to the plasma discharge power and that the mixed-gas plasma (gas flow 10:10 sccm, discharge power 60 W) decreased the surface contact angle as low as $18.3^{\circ}$, indicating a large increase in the surface hydrophilicity. In addition, $SnO_2$ thin films deposited on the PC substrate effectively enhanced the ICP plasma treatment, and could also enhance the usefulness of PC in the inner parts of automobiles.

단백질 칩 기판의 플라즈마 효과 (Effects of Plasma on the Surface of Protein Chip Plates)

  • 현준원;김나연
    • 한국진공학회지
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    • 제17권6호
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    • pp.549-554
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    • 2008
  • 수소 플라즈마 처리된 유리 기판에 스핀 코팅 시스템을 이용하여 nickel chloride를 코팅하여 단백질칩 플레이트를 제조하였다. 다양한 플라즈마 처리 시간대에서 histidine tagged 단백질의 부착 능력 특성을 연구하였다. 유리 기판 표면에서 nickel chloride와 단백질 특성을 particle size analysis를 이용하여 관찰하였고, 단백질의 부착 능력 정도를 bio imaging analyzer system으로 측정하였다. 실험 결과에 따르면, 플라즈마 처리 시간이 증가할수록 단백질 부착 능력은 감소하는 것으로 나타났다. 기판 표면에서의 단백질 부착능력 특성에 관한 mechanism은 본문의 결과 및 토의에서 논의되었다. 플라즈마 처리된 단백질칩 기판에 대한 표면 안정화는 바이오센서 시장에서 큰 관심을 끌 것으로 기대된다.

Influence of Inductively Coupled Oxygen Plasma on the Surface of Poly(ether sulfone)

  • Lee, Do Kyung;Sohn, Young-Soo
    • 센서학회지
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    • 제31권4호
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    • pp.214-217
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    • 2022
  • The effect of inductively coupled plasma (ICP) treatment with O2 gas on the surface properties of poly(ether sulfone) (PES) was investigated. X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical characteristics of the O2 plasma-treated PES films. The surface roughness of the pristine and O2 plasma-treated PES films for different RF powers of the ICP was determined using an atomic force microscope (AFM). The contact angles of the PES films were also measured, using which the surface free energies were calculated. The O1s XPS spectra of the PES films revealed that the number of polar functional groups increased following the O2 plasma treatment. The AFM analysis showed the average surface roughness increased from 1.01 to 4.48 nm as the RF power of the ICP was increased. The contact angle measurements revealed that the PES films became more hydrophilic as the RF power of the ICP was increased. The total surface energy increased with the RF power of the ICP, resulting from the increased polar energy component.

플라즈마 처리된 실리콘 절연재의 표면 특성화 (Surface Charcterization of plasma-treated silicone insulating materials)

  • 송정용;허창수;연복희;이태호;유형철;서유진;이기택;김남렬;이운하
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.176-178
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    • 2002
  • Surface states of silicone polymer treated by plasma were investigated by the analysis by x-ray photoelectron spectroscopy(XPS) and surface voltage decay after corona charging. Plasma treatment causes the silica -like oxidative layer, which was confirmed with XPS, and lowers surface resistivity with increasing the plasma treatment time. Using the decay time constant of surface voltage, the calculated surface resistivity was compared with the value directly measured by voltage-current method using three electrodes system. A good agreement between two methods was obtained. In addition, we estimated the thermal activation energy for surface conduction, Based on our results, we could understand the relationship between surface chemical states and surface electrical properties.

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Surface Characterization of the Activated Carbon Fibers After Plasma Polymerization of Allylamine

  • Lu, Na;Tang, Shen;Ryu, Seung-Kon;Choi, Ho-Suk
    • Carbon letters
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    • 제6권4호
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    • pp.243-247
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    • 2005
  • Plasma polymerization of allylamine subsequently after plasma pre-treatment was conducted on the activated carbon fibers (ACFs) for the immobilization of amine groups in the surface of ACFs. The change of structural properties of ACFs with respect to different polymerization conditions was investigated through BET method. The change of surface morphologies of ACFs with respect to different plasma polymerization power was also studied through AFM. It was found that the structural properties such as specific surface area and micropore volume could be optimized under certain plasma deposition conditions. It was reckoned that treatment and deposition showed adverse effect on plasma polymerization, in which the former developed the micro-structures of the ACFs and the latter tended to block the micro pores. The Fourier transform infrared spectroscopy (FTIR) revealed that the poly(allylamine) was successfully immobilized on the surface of ACFs and the amount of the deposited polymer layer was related to the plasma polymerization power. SEM results showed that the plasma deposited polymer layer were small and homogenously distributed. The size and the distribution of particles deposited were closely related to the plasma polymerization power, too.

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Radio Frequency Plasma Power변화에 따른 ITO 특성 및 OLED의 광학적 특성 (Optical Properties of Organic Light Emitting Diode and Characteristics of ITO by Variation of Radio Frequency Plasma Power)

  • 기현철;김회종;홍경진;김은미;구할본
    • 한국전기전자재료학회논문지
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    • 제22권1호
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    • pp.81-85
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    • 2009
  • We has been analysed optical properties of OLED(organic light emitting diode) and characteristics of ITO(Indium Tin Oxide) in terms of $O_2$ plasma treatment for manufacturing high efficiency OLED, RF power of $O_2$ plasma was changed 25, 50, 100, 200 W. $O_2$ gas flow, gas pressure and treatment time were fixed. Sheet resistance and surface roughness of ITO were measured by Hall-effect measurement system and AFM, respectively. The ranges of sheet resistance and surface roughness were $5.5{\sim}6,06\;{\Omega}$ and $2.438{\sim}3.506\;nm$ changing of RF power, respectively, PM(Passive Matrix)OLED was fabricated with the structure of ITO(plasm treatment)/TPD($400\;{\AA}$)/$Alq_3(600\;{\AA})$/LiF($5\;{\AA}$)/Al($1200\;{\AA}$). Turn-on voltage of PMOLED was 7 V and luminance was $7,371\;cd/m^2$ at the RF power of 25 W, $O_2$ plasma treatment of ITO surface was result in lowering the operating voltage and improving luminance of PMOLED.