• 제목/요약/키워드: PLASMA SURFACE TREATMENT

검색결과 989건 처리시간 0.033초

YBa$_2$Cu$_3$O$_{7-{\delta}}$/SrTiO$_3$/YBa$_2$Cu$_3$O$_{7-{\delta}}$ multilayer structures for ground planes for ramp-edge junction devices

  • Kim, C.H.;Kim, Y.H.;Jung, K.R.;Hahn, T.S.;Park, J.H.;Choi, S.S.
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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    • pp.179-183
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    • 2000
  • For a ground plane in high-temperature superconducting ramp-edge junction devices, YBa$_2$Cu$_3$O$_{7-{\delta}}$/SrTiO$_3$/YBa$_2$Cu$_3$O$_{7-{\delta}}$ multilayer structures were fabricated using pulsed laser deposition and ECR ion milling. Various process parameters were adjusted to enhance the device characteristics. By etching the STO layer to form a tapered edge of about 15$^{\circ}$ and in-situ RF plasma treatment of bottom YBCO surface prior to deposition of top YBCO, the top-to-bottom YBCO showed T$_c$ of 75${\sim}$80 K and I$_c$ of about 40 mA through holes. It was found that the deposition of bottom YBCO at a reduced laser repetition rate of 1Hz increased the T$_c$ of top YBCO to 79.9 K. The resistivity of 570 layer was about 10$^6$ ${\Omega}$cm at 60 K, which ensures good electrical isolation between successive YBCO layers.

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The Annealing Effect of Diamond-like Carbon Films for RF MEMS Switch

  • 황현석;최원석;차재상
    • 한국통신학회논문지
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    • 제35권11A호
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    • pp.1091-1096
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    • 2010
  • Stiction in microelectromechanical systems (MEMS) has been a major failure mechanism. Especially, in RF MEMS switches, moving parts often suffered in-use and release related stiction problems. Some materials and methods have been used to prevent this problem. Diamond-like carbon (DLC) has not only been used as a protective material owing to its good mechanical properties but also has been used as a hydrophobic material. Its properties could be controlled by post annealing treatment in various conditions. We synthesized DLC films using a radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. Then, the change of the hydrophobic property of the films was investigated undervarious annealing temperatures in nitrogen and in oxygen ambient. The films, that were annealed above $700^{\circ}C$ in nitrogen ambient, showed a high contact angle of water (> $90^{\circ}$) even though their mechanical property was sacrificed to some degree. The structural variation and the changes of the hydrophobic and mechanical properties of the DLC films were analyzed by Raman spectrum, contact angle measurement, surface profiler, and a nanoindentation test.

The Proliferative and Apoptotic Properties of Nile Tilapia (Oreochromis niloticus) sIg+ Lymphocytes by Cortisol Treatment

  • Park, Kwan-Ha;Choi, Sang-Hoon
    • Journal of Animal Science and Technology
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    • 제53권6호
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    • pp.563-569
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    • 2011
  • The effects of cortisol on proliferation and apoptosis of tilapia surface immunoglobulin positive ($sIg^+$) lymphocytes isolated from different tissues were investigated. $sIg^+$ lymphocytes from the tilapia head kidney (HK) and spleen showed a higher proliferation and lower intracellular calcium ($Ca^{2+}{_i}$) level to Ig-crosslinking compared with peripheral blood $sIg^+$ lymphocytes. Peripheral blood $sIg^+$ lymphocytes stimulated with lipopolysaccharide (LPS) showed high levels of apoptosis in the presence of cortisol. HK and to a lesser extent spleen $sIg^+$ lymphocytes, although less sensitive than their equivalent in peripheral blood, showed cortisol-induced apoptosis irrespective of LPS stimulation of control levels. Compared to plasma values measured during stress conditions, proliferation regardless of LPS stimulation was apparently suppressed by cortisol that is effective in inducing a significant increase in apoptosis in all three different cell populations of $sIg^+$ cells, suggesting the immunoregulatory effect of cortisol in both LPS stimulated and non-stimulated conditions. Different sensitivity of $sIg^+$ cells to the cortisol, in regard to developmental stage and activity, could be related in inhibiting excessive and continuing depletion of $sIg^+$ lymphocytes.

반도체 산업용 나노기공 함유 유기실리카 박막

  • 차국헌;윤도영;이진규;이희우
    • 한국결정학회:학술대회논문집
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    • 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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    • pp.48-48
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    • 2002
  • It is generally accepted that ultra low dielectric interlayer dielectric materials (k < 2.2) will be necessary for ULSI advanced microelectronic devices after 2003, according to the International Technology Roadmap for Semiconductors (ITRS) 2000. A continuous reduction of dielectric constant is believed to be possible only by incorporating nanopores filled with air (k = 1.0) into electrically insulating matrices such as poly(methyl silsesquioxane) (PMSSQ). The nanopo.ous low dielectric films should have excellent material properties to survive severe mechanical stress conditions imposed during the advanced semiconductor processes such as chemical mechanical planarization process and multilayer fabrication. When air is incorporated into the films for lowering k, their mechanical strength has inevitably to be sacrificed. To minimize this effect, the nanopores are controlled to exist in the film as closed cells. The micromechanical properties of the nanoporous thin films are considered more seriously than ever, particularly for ultra low dielectric applications. In this study, three approaches were made to design and develop nanoporous low dielectric films with improved micromechanical properties: 1) wall density increase of nanoporous organosilicate film by copolymerization of carbon bridged comonomers; 2) incorporation of sacrificial phases with good miscibility; 3) selective surface modification by plasma treatment. Nanoporous low-k films were prepared with copolymerized PMSSQ and star-shaped sacrificial organic molecules, both of which were synthesized to control molecular weight and functionality. The nanoporous structures of the films were observed using field emission scanning electron microscopy, cross-sectional transmission electron microscopy, atomic force microscopy, and positronium annihilation lifetime spectroscopy(PALS). Micromechanical characterization was performed using a nanoindentor to measure hardness and modulus of the films.

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Effect of Thermal Annealing on Nanoscale Thickness and Roughness Control of Gravure Printed Organic Light Emitting for OLED with PVK and $Ir(ppy)_3$

  • Lee, Hye-Mi;Kim, A-Ran;Kim, Dae-Kyoung;Cho, Sung-Min;Chae, Hee-Yeop
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1511-1514
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    • 2009
  • Organic light emitting layer in OLED device was formed by gravure printing process in this work. Organic surface coated by gravure printing typically showed relatively bad uniformity. Thickness and roughness control was characterized by applying various mixed solvents in this work. Poly (N-vinyl carbazole) (PVK) and fact-tris(2-phenylpyridine)iridium($Ir(ppy)_3$) are host dopant system materials. PVK was used as a host and Ir(ppy)3 as green-emitting dopant. To luminance efficiency of the plasma treatment on etched ITO glass and then PEDOT:PSS spin coated. The device layer structure of OLED devices is as follow Glass/ITO/PEDOT:PSS/PVK+Ir(ppy)3-Active layer /LiF/Al. It was printed by gravure printing technology for polymer light emitting diode (PLED). To control the thickness multi-printing technique was applied. As the number of the printing was increased the thickness enhancement was increased. To control the roughness of organic layer film, thermal annealing process was applied. The annealing temperature was varied from room temperature, $40^{\circ}C$, $80^{\circ}C$, to $120^{\circ}C$.

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YBCO Coated Conductor를 위한 Cube texture Ni-W 합금 기판의 제작 및 특성평가 (Development of cube textured Ni-W alloy substrates for YBCO coated conductor)

  • 김규태;임준형;장석헌;김정호;주진호;김호진;지봉기;전병혁;김찬중
    • 한국초전도저온공학회:학술대회논문집
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    • 한국초전도저온공학회 2003년도 추계학술대회 논문집
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    • pp.106-108
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    • 2003
  • We fabricated Ni and Ni-W alloys for use as a substrate in YBCO coated conductor applications and evaluated the effect of W in Ni on texture, microstructure and surface morphology, and hardness of substrate. Pure Ni, Ni-2 at.%W, and Ni-5at.%W alloy substrates were prepared by plasma arc melting, cold rolling, and the recrystallization heat treatment at various temperature (700- 130$0^{\circ}C$). It was observed that Ni-W alloy substrates had stronger cube texture and maintained it at higher annealing temperature, compared to pure Ni substrate : The full-width at half- maximums of in-plane texture was 13.40$^{\circ}$ for Ni substrate and 4.42$^{\circ}$-5.57$^{\circ}$ for Ni-W substrate annealed at 100$0^{\circ}C$. In addition, it was observed that the Ni-W substrate had smaller grain size, shallower boundary depth, and higher hardness, compared to those of pure Ni substrate.

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직접에탄올 연료전지의 운전조건에 관한 연구 (A Study on an Operating Conditions for the Direct Ethanol Fuel Cell)

  • 김영춘;구본국;장문국;지학배;한상보;박재윤
    • 전기학회논문지
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    • 제60권11호
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    • pp.2076-2082
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    • 2011
  • The goal of this paper is to find an operating conditions of the single direct ethanol fuel cell such as the cell temperature, and flow rates of ethanol and oxygen. To investigate the output characteristics, the electrical current increased from 0[A] with interval of 0.001[A] every 2[s], and the cell voltage was increased until the voltage became 0.05[V]. Related to the effect of the cell temperature, the output characteristics both voltage and power were increased upto 80[$^{\circ}C$] according to the increase of the current density, but those were decreased over that temperature. In addition, the optimal flow rate of ethanol in anode was identified as of 2[mL/min] due to the dependence of generation rate such as the hydrogen ion and electron. And the flow rate of oxygen in cathode was desirable to about 300[sccm/min], it might be affected by the chemical reaction rate of the water formation among hydrogen ion, electron, and oxygen. Consequently, the fundamental conditions were identified in this work, and it will be carried out to find the best conditions of membrane by the effect of the plasma surface treatment, and the effect of other catalysts except for a platinum.

Surface Treatment of Vertically Aligned CNTs Using Atmospheric Pressure Plasma Torch System

  • 이병주;정구환
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.293.1-293.1
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    • 2013
  • 탄소나노튜브(carbon nanotubes; CNTs)는 우수한 물성으로 인하여 전자소자, 에너지 저장매체, 투명전도막, 복합재료 등 매우 다양한 분야에 응용이 가능할 것으로 예측되고 있으며, 더욱이 이러한 특성은 구조변형, 화학적 도핑뿐만 아니라 표면처리를 통해서 제어가 가능하다고 알려져 있다. 이를 위해 기존에는 열처리를 통하여 CNTs를 표면처리한 결과들이 보고되었으나, 고온에서 장시간의 공정이 요구되는 열처리 공정의 단점을 보완하기 위하여 플라즈마 처리를 통해 상온에서 단시간의 공정으로 CNTs를 표면처리하는 방법이 제시되었다. 특히 최근에는, 향후 산업적 응용을 목적으로 종래의 진공 환경에서 벗어나 대기압 연속공정 개발을 위한 대기압 플라즈마 기반의 표면처리 공정에 대하여 관심이 집중되고 있는 상황이다. 본 연구에서는 대기압에서 플라즈마를 안정적으로 방전 및 유지 할 수 있는 플라즈마 토치 시스템을 구축하였고, 이를 이용하여 수직배향 CNTs를 표면 처리함으로써 그 영향을 살펴보았다. CNTs는 $SiO_2$ 웨이퍼 위에 증착한 철 촉매를 이용하여 $750^{\circ}C$에서 수직배향 합성하였으며, 원료가스로는 아세틸렌을 사용하였다. 대기압 플라즈마 장치의 경우 고전압 교류 전원장치를 이용하여 토치타입으로 제작하였다. 플라즈마는 아르곤과 질소가스를 시용하여 방전하고, 기판과의 거리 및 처리시간을 변수로 CNTs를 표면처리하였다. 플라즈마 처리 전후 접촉각 측정을 통하여 소수성이었던 CNTs 표면이 친수성으로 변화하는 것을 확인하였다. 또한 Raman 분석을 통하여 대기압 플라즈마의 처리조건에 따른 CNTs 의 구조적 결함 발생 정도를 정량화 시킬 수 있었다. 이를 통하여 대기압 플라즈마를 이용할 경우, CNTs의 구조적 손상을 최소화 하면서 효율적으로 표면특성을 변화시킬 수 있는 처리조건을 도출하였다.

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태양전지용 다결정실리콘 웨이퍼의 표면 처리용 텍스쳐링제 (Texturing Multi-crystalline Silicon for Solar Cell)

  • 임대우;이창준;서상혁
    • 공업화학
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    • 제24권1호
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    • pp.31-37
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    • 2013
  • 텍스쳐링에 의해 실리콘 웨이퍼의 표면반사율을 감소시키는 것은 실리콘 태양전지의 효율향상을 위해 매우 중요한 공정이다. 본 연구에서는 에칭속도 제어를 위해 촉매제를 포함한 산 용액으로 텍스쳐링 처리한 웨이퍼의 표면효과와 그 태양전지 특성을 평가 고찰하였다. 텍스쳐링 전 $HNO_3-H_2O_2-H_2O$ 용액의 전처리는 표면반사율의 초기 저감효과를 가져왔다. 이는 산화특성에 의해 유기 불순물이 제거되고 텍스쳐링을 위한 핵의 생성에 기인한다고 할 수 있다. 이후 공정에서 불산/질산 용액에 인산 및 초산과 같은 완충제를 첨가한 혼합용액을 제조하고, 적정 농도 조합과 그 처리시간의 최적화를 통해 개선된 텍스쳐링 효과를 얻을 수 있었으며 이 효과는 표면반사율 감소를 통해 확인할 수 있었다. 이렇게 제조된 실리콘 웨이퍼에 반사방지막 코팅 후 태양전지를 제작하여 그 변환효율을 측정한 결과 16.4%의 양호한 특성을 나타냈다. 이는 개선된 텍스쳐링 처리에 의해 저감된 표면특성에 의한 단락전류의 증가에 기인한 것으로 추정된다.

짧은 길이의 거친 표면 임프란트에 대한 후향적 연구 (RETROSPECTIVE STUDY OF SHORT ROUGH SURFACE IMPLANTS)

  • 공준하;이백수;김여갑;권용대;윤병욱;최병준
    • Maxillofacial Plastic and Reconstructive Surgery
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    • 제31권1호
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    • pp.41-45
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    • 2009
  • Background: Reduced bone height is one of the major problems faced in restoring tooth loss with implants. By the use of short implants, it is possible to reduce complicated and invasive treatment such as bone graft, allowing more simple surgery. But short implants are generally considered to have lower success rates than that of standard implants. Purpose: To assess the results of short Straumann implants by a retrospective study of short Straumann implants with TPS(titanium plasma-sprayed) and SLA(sandblasted, large grit, acid etched) surfaces. Materials and methods: 173 implants in 106 patients who received short Straumann implant surgery(${\le}8\;mm$) in the department of oral and maxillofacial surgery, Kyunghee Dental Hospital, from February 1996 to October 2006 were selected and studied. All of the implants were followed up after prosthetic rehabilitation. The average follow-up period was 34 months with 119 months as the longest follow up period. The average follow-up period after prosthetic rehabilitation was 31 months. 64 females(60.4%) and 42 males(39.6%) participated in the research with the age range of 19 to 85(mean age 47). 20 patients(18.9%) were under 40, 85 patients(80.2%) were over 40 and under 70, and only one patient(0.9%) was over 70 years old. Results: 27 implants(15.6%) had TPS surface while 146 implants(84.4%) had SLA surface. 9 implants(5.2%) were 3.3, 108 implans(62.4%) were 4.1mm and 56 implants(32.4%) were 4.8mm in diameter. 167 implants(96.5%) were 8mm and 6 implants(3.5%) were 6mm in length. There were 24 implants(13.9%) on the maxillas and 149 implants(68.8%) on the mandibles. 119 implants(68.8%) were rehabilitated with FPD(fixed partial denture), 47 implants(27.2%) with single crowns and 4 implants(2.3%) with overdentures. Among the fixed partial dentures, 30 of them were splinted with short implants only. After over an year of follow-up period, 139 implants(96.5%) out of 144 implants showed marginal bone loss of less than 1mm. 3 out of 173 implants failed showing 98.27% survival rate. Conclusions: The use of short Straumann implants(${\le}8mm$) can be a simple and reliable treatment method in minimal residual bone height.