• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.185-191
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• 2014

The width of depletion region in a varactor diode can be modulated by varying a reverse bias voltage. Thus, the preferred characteristics of depletion capacitance can obtained by the change in the width of depletion region so that it can select only the desirable frequencies. In this paper, the TV tuner varactor diode fabricated by hyper-abrupt profile control technique is presented. This diode can be operated within 3.3 V of driving voltage with capability of UHF band tuning. To form the hyperabrupt profile, firstly, p+ high concentration shallow junction with $0.2{\mu}m$ of junction depth and $1E+20ions/cm^3$ of surface concentration was formed using $BF_2$ implantation source. Simulation results optimized important factors such as epitaxial thickness and dose quality, diffusion time of n+ layer. To form steep hyper-abrupt profile, Formed n+ profile implanted the $PH_3$ source at Si(100) n-type epitaxial layer that has resistivity of $1.4{\Omega}cm$ and thickness of $2.4{\mu}m$ using p+ high concentration Shallow junction. Aluminum containing to 1% of Si was used as a electrode metal. Area of electrode was $30,200{\mu}m^2$. The C-V and Q-V electric characteristics were investigated by using impedance Analyzer (HP4291B). By controlling of concentration profile by n+ dosage at p+ high concentration shallow junction, the device with maximum $L_F$ at -1.5 V and 21.5~3.47 pF at 0.3~3.3 V was fabricated. We got the appropriate device in driving voltage 3.3 V having hyper-abrupt junction that profile order (m factor) is about -3/2. The deviation of capacitance by hyper-abrupt junction with C0.3 V of initial capacitance is due to the deviation of thermal process, ion implantation and diffusion. The deviation of initial capacitance at 0.3 V can be reduced by control of thermal process tolerance using RTP on wafer.

• Journal of the korean academy of Pediatric Dentistry
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• v.35 no.1
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• pp.1-10
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• 2008

The purpose of this study was to develop the wireless pH telemetry lasting longer than 24 hours in the mouth to overcome the limits of conventional wire telemetry previously used for salivary and plaque pH measurement, and to assess its effectiveness. We developed a wireless pH telemeter which can measure and store the pH profile data during more than 24 hours. It was composed of intraoral part; pH sensor of antimony electrode, battery and microprocessor for data storage, and extraoral part; control/data receiver and data analyzing software which was newly made for this device. After inspecting wireless electrode for accurate measurement, it was attached to the removable intraoral appliance and delivered to the volunteer who was told to wear except brushing time, retrieved after 24 hours and finally the pH profile data was extracted and analyzed. When compared with conventional wire telemetry, this device showed similar results and induced less discomfort to examinees. The data showed pH changes at same time when examinees ate various scheduled foods and beverages. With this method it became possible to accurately measure pH changes within mouth for long time in accordance with individual's lifestyle, definitely reducing the discomfort inflicted to the examinees' life.