A Study on pricess characteristics of $ZrO_2$ films prepared on poly-ethlene naphthalate by using Facing tagets sputtering system
(대향타겟식 스퍼터링 방법에 의해 PEN 기판위에 성막된 $ZrO_2$ 박막의 공정 특성에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.06a
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- pp.423-424
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- 2008