• Korean Chemical Engineering Research
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• 제59권1호
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• pp.100-105
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• 2021

본 연구는 적은 비용으로 분석 장치 없이 질병 진단 및 경과를 모니터링할 수 있는 종이-기반 분석 장치(paper-based analytical device, PAD)를 제작하기 위해 polydimethylsiloxane (PDMS) 블레이드 코팅 방법을 제안하였다. PAD 디자인은 레이저 커팅 기술로 쉽게 몰드에 적용할 수 있으며, 제작된 몰드로 블레이드 코팅을 수행하여 완전한 소수성 장벽 형성에 필요한 조건을 확립하였다. 코팅 조건인 잉크의 두께와 종이와의 접촉시간에 따라 PDMS 소수성 장벽의 구조와 친수성 채널의 크기 변화를 분석하여 안정적으로 소수성 장벽을 형성할 수 있는 조건을 최적화하였다. 최적화된 방법을 바탕으로 PAD를 제작하여 특별한 분석기기 없이 단백질, 당, 메탈이온을 검출하여 바이오센서에 응용가능함을 증명하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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• pp.116-118
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• 2005

열공압 방식으로 동작하는 마이크로 펌프와 밸브가 집적된 (polydimethylsiloxane)PDMS 미 세 유체 시스템을 제작하였다. 본 실험에서 제안한 미세 유체 시스템은 PDMS 마이크로 채널, PDMS membrane, 열공압 챔버, indium tin oxide(ITO) 히터로 구성되어 있다. 마이크로 펌프의 경우 가해주는 펄스 전압의 변화를 통해 유속을 최적화 하였고 마이크로 밸브의 경우 가해주는 직류 전압을 변화시켜 유체의 흐름을 제어할 수 있었다. 미세 유체 시스템의 최적화된 조건은 마이크로 펌프의 경우 duty 4%와 주파수 4Hz에서 최대 pumping rate을 나타냈고 그때의 pumping rate 68nl/min이었다. 마이크로 밸브의 유체를 closing 전력은 450mW이었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1480-1481
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• 2008

In this paper, we present surface treatments for achieving bonds between PMMA and PDMS substrates. Silane primer is used for the formation of hydroxyl group on PMMA surfaces. The formed hydroxyl groups enhance the bonding strength of PDMS-PMMA substrates without channel clogging and structure deformation. The bonding strength on the different surface treatments (include oxygen plasma, 3-APTES, and corona discharge) is evaluated to find optimal bonding condition. The maximum bonding strength at the optimal surface treatment is over 300 kPa. The surface treatment using silane primer can be used to the bonding process of Micro-TAS and Lab-on-a-Chip.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.671-674
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• 2008

We investigate the slippage effect in a micro-channel depending on the surface characteristics; hydrophilic, hydrophobic, and super-hydrophobic wettabilities. The micro-scale grooves are fabricated on the vertical wall to make the super-hydrophobic surfaces, which enable us visualize the flow fields near walls and directly measure the slip length. Velocity profiles are measured using micro-particle image velocimetry (Micro-PIV) and compared those in the hydrophilic glass, hydrophobic PDMS, and super-hydrophobic PDMS micro-channels. To directly measure the velocity in the super-hydrophobic micro-channel, the transverse groove structures are fabricated on the vertical wall in the micro-channel. The velocity profile near the wall shows larger slip length and, if the groove structure is high and wide, the liquid meniscus forms curves into the valley so that the wavy flow is created after the grooves.

• 센서학회지
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• 제15권1호
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• pp.53-57
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar. Optimum pyrolysis and annealing conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excellent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition. These fabricated SiCN ceramic microstructures have greater electric and physical characteristics than bulk Si wafer. The fabricated SiCN microstructures would be applied for supertemperature MEMS applications such as heat exchanger and combustion chamber.

• 한국정밀공학회지
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• 제27권9호
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• pp.20-25
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• 2010

The effect of micro surface structure on printing for printed electronics has been studied experimentally. The photolithography MEMS fabricationwass used to make a SU-8 molder which has micro structures on the surface, and the PDMS micro structure was fabricated by the PDMS molding method. In the aspect of printed electronics, we used silver paste conductive ink. We measured the surface energy variation on pillar microstructure. The microstructure was used to real printing experiment by a screen printing. We printed 1cm micro lines which have $30{\sim}250{\mu}m$ width, and checked the conductivity to sort out opened line pattern. Printability was defined by success probability of printed patterns and we found that the present microstructures improve the printability significantly.

• 센서학회지
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• 제23권4호
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• pp.278-283
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• 2014

In this study, we propose an immunosensor using zinc oxide nanorods (NRs) inside PDMS channel for detecting the influenza A virus subtype H7N9. ZnO with high isoelectric point (IEP, ~9.5) makes it suitable for immobilizing proteins with low IEP. In this proposed H7N9 immunosensor structure ZnO NRs were grown on the PDMS channel inner surface to immobilize H7N9 capture antibody. A sandwich enzyme-linked immunosorbent assay (ELISA) method with was used 3,3',5,5' tetramethylbenzidine (TMB) for detecting H7N9 influenza virus. The immunosensor was evaluated by amperometry at various H7N9 influenza antigen concentrations (1 pg/ml - 1 ng/ml). The redox peak voltage and current were measured by amperometry with ZnO NWs and without ZnO NWs inside PDMS channel. The measurement results of the H7N9 immunosensor showed that oxidation peak current of TMB at 0.25 V logarithmically increased from 2.3 to 3.8 uA as the H7N9 influenza antigen concentration changed from 1 pg/ml to 1 ng/ml. And then we demonstrated that ZnO NRs inside PDMS channel can improve the sensitivity of immunosensor to compare non-ZnO NRs inside PDMS channel.

• Korea-Australia Rheology Journal
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• 제19권2호
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• pp.51-59
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• 2007

A polyelectrolyte chain confined in a slit nanochannel exhibits a structural transition from the one in free space. In this paper, the effect of the long-range electrostatic interactions between the xanthan polyelectrolyte and the slit wall on the confined xanthan conformation is investigated via the Brownian dynamics simulation. A neutral and two negatively charged surfaces of polydimethylsiloxane (PDMS) and glass are combined to make four kinds of slit channels with different charge characteristics: i) neutral-neutral, ii) glass-glass, iii) neutral-PDMS and iv) neutral-glass walls. Their walls are characterized by uniform surface charge densities determined from experimental data of zeta potential. Both the nonmonotonic chain size variation and the loss of long-range bond vector correlation, previously observed under confinement in the PDMS-PDMS slit, are also found in the neutral slit, demonstrating the nonelectrostatic origin of such crossover behaviors. As expected, the effect of wall charges is negligible at sufficiently high medium ionic strength of 100mM but it becomes significant in the opposite limit of 0.01mM. In the latter case, the high charge density of glass walls strengthens the effective confinement of a negatively charged polyelectrolyte and produces a xanthan structure comparable to that confined in a much narrower neutral slit. The obtained structural data suggest the possibility of controlling the structure of confined polyelectrolytes by the modification of surface charge characteristics of micro/nanofluidic devices in combination with the adjustment of the medium ionic strength.

• 센서학회지
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• 제33권1호
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• pp.7-11
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• 2024

Soft-pressure sensors have numerous applications in soft robotics, biomedical devices, and wearable smart devices. Herein, we present a highly sensitive electronic skin device with an isotropic wrinkled pressure sensor. A conductive ink for soft pressure sensors is produced by a solution process using polydimethylsiloxane (PDMS), poly 3-hexylthiophene (P3HT), carbon black, and chloroform as the solvents. P3HT provides high reproducibility and conductivity by improving the ink dispersibility. The conductivity of the ink is optimized by adjusting the composition of the carbon black and PDMS. Soft lithography is used to fabricate a conductive elastic structure with an isotropic wrinkled structure. Two conductive elastic structures with an isotropic wrinkle structure is stacked to develop a pressure sensor, and it is confirmed that the isotropic wrinkle structure is more sensitive to pressure than when two elastic structures with an anisotropic wrinkle structure are overlapped. Specifically, the pressure sensor fabricated with an isotropic wrinkled structure can detect extremely low pressures (1.25 Pa). Additionally, the sensor has a high sensitivity of 15.547 kpa^-1 from 1.25 to 2500 Pa and a linear sensitivity of 5.15 kPa^-1 from 2500 Pa to 25 kPa.

• 마이크로전자및패키징학회지
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• 제24권3호
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• pp.19-26
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• 2017

Polydimethylsiloxane (PDMS) 기판과 금속박막 사이의 중간층으로 parylene F를 사용한 신축패키지 구조에서 Au, Pt, Cu 박막의 신축변형에 따른 저항변화를 분석하였다. Parylene F 중간층을 코팅한 PDMS 기판에 스퍼터링한 150 nm 두께의 Au 박막과 Pt 박막은 각기 $1.56{\Omega}$ 및 $5.53{\Omega}$의 초기저항을 나타내었으며, 30% 인장변형률에서 각 박막의 저항증가비 ${\Delta}R/R_o$은 각기 7 및 18로 측정되었다. Cu 박막은 $18.71{\Omega}$의 높은 초기저항을 나타내었으며 인장변형에 따라 저항이 급격히 증가하다 5% 인장변형률에서 open 되어, Au 박막과 Pt 박막에 비해 매우 열등한 신축 특성을 나타내었다.