• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.10
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• pp.1841-1846
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• 2008

In this paper, we present the fabrication of microlens by electrohydrodynamic atomization(EHDA) of PDMS prepolymer. The diameter and contact angle of PDMS microlens can be altered by changing the applied voltage and substrate temperature at the experimental setup. It is considered that PDMS microlens can be integrated into the Lab-on-a-chip directly without any photolithographic process by EHDA. The property of PDMS microlens is confirmed by transmitting and measuring the Gaussian beam through microlens.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.46 no.4
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• pp.15-20
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• 2009

In a detection system based on laser light scattering, focusing an excitation laser beam into a focal point of a channel in a microfluidic chip is important for obtaining the highest excitation intensity, and consequently for obtaining a laser light scattering signal using a photodetector with a high efficiency. In this paper, we present a polydimethylsiloxane (PDMS) microfluidic chip consisting of an integrated PDMS microlens for cell detection based on laser light scattering. We fabricated PDMS microlens for optical detection system by simply putting down on PDMS chips. The PDMS microlens was fabricated by photoresist reflow and replica molding. This fabrication technique is simple and has an excellent property in terms of the microlens and a high-dimensional accuracy. The PDMS microlens integrated on the PDMS microfluidic chip has been verified to improve the laser intensity, and accordingly, the signal-to-noise ratio and sensitivity of laser light scattering detection for red blood cells(RBCs)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.599-600
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.572-575
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• 2005

A microlens connected to microfluidic channel is fabricated. The microlens is sealed with an elastomeric membrane which deforms by pressure of fluid driven by a syringe pump resulting in the shape change of the microlens. The optical properties of the microlens could be controlled by changing the microlens shape. The microlens system were made of an elastomer, PDMS, using molding from a photoplastic master patterned by UV photolithography. The test results show the optical property of the lens could be made into convex and concave type by applying the fluidic pressure positive and negative.

• Journal of IKEEE
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• v.26 no.2
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• pp.205-210
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• 2022

We demonstrated roll-to-roll microcontact printed (mCP) microlens array (MLA) to enhance the light extraction of organic light emitting diodes (OLEDs). The commercially provided microlens array is used as a template for polydimethylsiloxane (PDMS) roll stamp. The fluorinated film is formed on the PDMS roll stamp from fluorinated ink with low boiling point and printed onto the bottom side of the organic light emitting diode without high pressure and high thermal treatment. With optimized concentration of ink, the pattern which is almost identical to that of the template MLA was successfully printed. Due to the structure and low optical absorbance of microcontact printed MLA, the external quantum efficiency of OLED was improved by about 18%.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1495_1496
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• 2009

A cylindrical post dipping (CPD) method to fabricate the PDMS microlens arrays is presented in this paper. The proposed CPD method is based on the surface tension effect. 2 mm gap and gapless lenses with 2 mm diameter are fabricated and characterized geometically. Both profiles of the fabricated microlens are well-fitted with ideal lens profile. The surface roughness average of the fabricated lens is measured to be 1.953 nm. The focal length of 2mm gap lenses and the gapless lenses is calculated to be 17.00 mm with 0.65 mm standard deviation and 29.88 mm with 2.58 mm standard deviation, respectively. The proposed CPD method can be applied to wafer level lens fabrication due to its simplicity and versatility.

• Proceedings of the KIEE Conference
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• 2000.11c
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• pp.578-580
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• 2000

Micromolding process에 의한 refractive microlens array를 제작한다. PDMS, UV curable acryl adhesive 등 여러 가지 polymer 재료를 시도한다. 기존의 공장에서 주로 사용되던 etched bulk silicon, electroplated metal 등의 구조물이 아닌, polymer 구조물을 mold로 사용한다. Micromolding process에 의해 제작되는 microlens의 특성은 mold의 험상에 의해 결정된다. Reflow 공정에 의해 제작된 photoresist microlens는 매우 우수한 표면 특성과 형상 대칭성을 보여주므로, microlens의 mold로서 사용하기에 적합하다.

• Journal of Sensor Science and Technology
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• v.17 no.5
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• pp.375-379
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• 2008

This paper reports a new fabrication method of polydimethylsiloxane (PDMS) microlenses with various curvatures by using a water-based mold. The hydrophobic surface of Polypropylene (PP) substrate was modified by corona discharge using tesla coil to have hydrophilic surface. Then hydrophilic surface of PP substrate takes hydrophobic recovery to have various contact angles from less than $25^{\circ}$ to about $84^{\circ}$. By using the water droplets with various contact angles as replica molds for PDMS process, we could obtain PDMS microlenses with various curvatures.

• Journal of Sensor Science and Technology
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• v.22 no.5
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• pp.352-356
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• 2013

We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1478-1479
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• 2008

본 논문에서는 PDMS 프레폴리머의 전기유체분사를 이용하여 마이크로렌즈를 제작했다. 전기유체분사 시스템에서 인가전압과 기판 온도의 두 가지 변수를 변화시키면서 제작한 PDMS 마이크로렌즈의 특징을 파악하였으며, 인가전압이 증가함에 따라 마이크로렌즈의 직경이 작아지고, 기판 온도가 증가함에 따라 마이크로렌즈의 직경이 작아지고 접촉각이 커지는 것을 확인하였다. 제작된 PDMS 마이크로렌즈의 특성을 평가하기 위하여 가우시안 빔 투과 실험을 하였다. 측정된 초점거리는 계산된 초점거리와 5 mm 차이가 났으며, 렌즈를 투과된 가우시안 빔은 초점에서 최대의 파워밀도와 최소의 유효반경을 가지는 것으로 측정되었다.