• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.11-15
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• 2006

Expose equipment system that is used for manufacturing process of Flat Panel Display, is most important equipment in whole process. Expose equipment that is for making pattern of mask on substrate, consists of optical part, stage part and transport part. The stage is an important part that aligns mask and substrate for delivering pattern of mask to substrate exactly. In this paper, control system of expose stage that is able to use mask and substrate of diverse size, with PC controller using GUI interface instead of PLC control system. The existing PLC control system does not have the suitable structure for using mask of diverse size. GUI interface integration control system is based on PC. So it has the advantage of convenient use and active operation. We embodied PLC control system in integration control system based on PC, and verified utility possibility through the standard test course.

• Proceedings of the KIPE Conference
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• 2007.07a
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• pp.111-113
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• 2007

본 논문에서는 FPGA를 사용하여 진행파형 초음파 모 터의 2상 입력 전원 전압의 주파수, 위상차, 진폭 및 2 상간의 전압차 조절이 가능하고, 8대의 초음파 모터를 동 시에 제어할 수 있는 8채널 USB통신 PC기반 초음파 모터 디지털 제어기를 제안한다. 제안한 제어기는 FPGA를 이용 한 디지털 논리에 의해 출력을 발생하기 때문에 PC로부 터 직접 제어 명령을 입력 받아 각각의 파라미터를 실시 간으로 조절할 수 있을 뿐만 아니라, 둘 이상의 파라미터 를 동시에 조절이 가능하다. 또한, PC와의 인터페이스는 USB통신 방식을 채택하여 제어 명령의 전달속도 향상 및 플러그 앤 플러그 방식을 통해 데스크 탑 컴퓨터는 물론 휴대용 컴퓨터나 PDA와 같은 다양한 플랫폼에서 사용할 수 있도록 설계하였다. 또한, 초음파 모터의 속도 및 위치를 계측하기 위해 사용된 로터리 엔코더 카운터 회로를 FPGA회로에 내장시켜 카운터를 위한 별도의 회로 구성이나 장비 구입의 필요성을 배제하였다. 따라서, 생산 단가 및 부피를 현저히 감소시켰다.

• Proceedings of the KIEE Conference
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• 2008.04a
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• pp.217-218
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• 2008

In this paper proposed the solar tracking system to use a fuzzy based on PC in order to increase an output of the PV array. The solar tracking system operated two DC motors driving by signal of photo sensor. The control of dual axes is not an easy task due to nonlinear dynamics and unavailability of the parameters. The fuzzy control made a nonlinear dynamics to well perform and had a robust and highly efficient characteristic about a parameter variable as well as a nonlinear characteristic. Hence the fuzzy control was used to perform the tracking system after comparing with error values of setting-up, nonlinear altitude and azimuth. In this paper designed a fuzzy controller for improving output of PV array and evaluated comparison with efficient of conventional PI controller. The data which were obtained by experiment were able to show a validity of the proposed controller.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1295-1299
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• 2003

The Mass Flow Controller(MFC) has become crucial in semiconductor manufacturing equipments. It is an important element because the quality and the yield of a semiconductor process are decided by the accurate flow control of gas. Therefore, the demand for the high speed and the highly accurate control of MFCs has been requested. It is hard to find an article of the control algorithm applied to MFCs. But, it is known that commercially available MFCs have PID control algorithms. Particularly, when the system detects the flow by way of heat transfer, MFC control problem contains the time delay and the nonlinearity. In this presentation, MFC control algorithm with the superior performance to the conventional PID algorithm is discussed and the superiority is demonstrated through the experiment. Fuzzy controller was utilized in order to compensate the nonlinearity and the time delay, and the performance is compared with that of a product currently available in the market. The control system, in this presentation, consists of a personal computer, the data acquisition board and the control algorithm carried out by LabWindows/CVI program on the PC. In addition, the method of estimating an actual flow from sensor output containing the time delay and the nonlinearity is presented. In conclusion, according to the result of the experiment, the proposed algorithm shows better accuracy and is faster than the conventional controller.

• Journal of the Korean Institute of Intelligent Systems
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• v.14 no.3
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• pp.375-382
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• 2004

This paper presents control designs using neural networks (NN) for a XY positioning table. The proposed neuro-controller is composed of an outer PD tracking loop for stabilization of the fast flexible-mode dynamics and an NN inner loop used to compensate for the system nonlinearities. A tuning algorithm is given for the NN weights, so that the NN compensation scheme becomes adaptive, guaranteeing small tracking errors and bounded weight estimates. Formal nonlinear stability proofs are given to show that the tracking error is small. The proposed neuro-controller is implemented and tested on an IBM PC-based XY positioning table, and is applicable to many precision XY tables. The algorithm, simulation, and experimental results are described. The experimental results are shown to be superior to those of conventional control.

• The Transactions of the Korean Institute of Power Electronics
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• v.3 no.1
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• pp.15-22
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• 1998

The goal of this paper is to propose analyzing and evaluating method of power parameters for motor drive system with various experimental graphic screens and numerical results and to develop the proposed system. A developed system is made up 586-PC and DSP board, motor drive system, power parameters analyzing and evaluating software for windows. Power parameters are analyzed using correlation signal processing techniques based on the correlation between voltage and current waveforms. Analysis results are visualized by 3-D current coordinates, and it is compared and evaluated with conventional time/ frequency domain. To verify the validity of the proposed system, capacitor run type single phase induction motor and thyristor speed controller is used for analyzing. Power and harmonic parameters of motor drive system is analyzed and verified, with varying fire angle of thyristor speed controller, and the proposed approach is to confirm validity.

• Publications of The Korean Astronomical Society
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• v.21 no.2
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• pp.67-74
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• 2006

We have developed a control electronics system for an infrared detector array of KASINICS (KASI Near Infrared Camera System), which is a new ground-based instrument of the Korea Astronomy and Space science Institute (KASI). Equipped with a $512{\times}512$ InSb array (ALADDIN III Quadrant, manufactured by Raytheon) sensitive from 1 to $5{\mu}m$, KASINICS will be used at J, H, Ks, and L-bands. The controller consists of DSP(Digital Signal Processor), Bias, Clock, and Video boards which are installed on a single VME-bus backplane. TMS320C6713DSP, FPGA(Field Programmable Gate Array), and 384-MB SDRAM(Synchronous Dynamic Random Access Memory) are included in the DSP board. DSP board manages entire electronics system, generates digital clock patterns and communicates with a PC using USB 2.0 interface. The clock patterns are downloaded from a PC and stored on the FPGA. UART is used for the communication with peripherals. Video board has 4 channel ADC which converts video signal into 16-bit digital numbers. Two video boards are installed on the controller for ALADDIN array. The Bias board provides 16 dc bias voltages and the Clock board has 15 clock channels. We have also coded a DSP firmware and a test version of control software in C-language. The controller is flexible enough to operate a wide range of IR array and CCD. Operational tests of the controller have been successfully finished using a test ROIC (Read-Out Integrated Circuit).

• Transactions on Control, Automation and Systems Engineering
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• v.4 no.3
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• pp.212-216
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• 2002

A practical issue is studied to improve the performance of a new energy based method of achieving stable, high performance haptic interface control. The issue is related to resetting the amount of energy accumulated in the Passivity Observer for faster operation. A heuristic method is derived and experimentally tested for the resetting and it is shown to help the PC to operate sooner when the system gets active. Experimental results are presented for the “Excalibur” haptic device.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1997.10a
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• pp.48-53
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• 1997

The objective of this paper is to present the development and application of interface software between robot and F/T sensor for force control. The interface software for among the robot controller, F/T sensor, and host PC is based on interrupt-driven method. To show the suitability of developed interface software, writing-task is performed in real time using F/T sensor that mounts on the wrist of the robot and Scara type 4-axis robot.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.94.3-94
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• 2002

Modern distributed control systems focus on system openness, network system architecture and PC based controller. This paper discusses the embedded systems with ORB for distributed control systems. Embedded systems have merits such as small size, low cost and user convenience. ORB allows users to program easily by using IDL and provides client/server network for heterogeneous platforms. By using embedded systems and ORB, we implement the system and validate it by using VME system. The developed system has benefits when it is applied to distributed control systems.