• Title/Summary/Keyword: PAD 변화

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The Pad Recovery as a function of Diamond Shape on Diamond Disk for Metal CMP (Metal CMP 용 컨디셔너 디스크 표면에 존재하는 다이아몬드의 형상이 미치는 패드 회복력 변화)

  • Kim, Kyu-Chae;Kang, Young-Jae;Yu, Young-Sam;Park, Jin-Goo;Won, Young-Man;Oh, Kwang-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.3 s.40
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    • pp.47-51
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    • 2006
  • Recently, CMP (Chemical Mechanical Polishing) is one of very important processing in semiconductor technology because of large integration and application of design role. CMP is a planarization process of wafer surface using the chemical and mechanical reactions. One of the most important components of the CMP system is the polishing pad. During the CMP process, the pad itself becomes smoother and glazing. Therefore it is necessary to have a pad conditioning process to refresh the pad surface, to remove slurry debris and to supply the fresh slurry on the surface. A conditioning disk is used during the pad conditioning. There are diamonds on the surface of diamond disk to remove slurry debris and to polish pad surface slightly, so density, shape and size of diamond are very important factors. In this study, we characterized diamond disk with 9 kinds of sample.

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Evaluation on Fatigue Behavior of Resilience pad for Sleeper Floating Track System in Urban Transit (도시철도 침목플로팅궤도(STEDEF)의 침목방진패드 피로거동 분석)

  • Choi, Jung-Youl;Lee, Jeong-Sug;Bong, Jae-Geun;Kim, Su-Jin;Chung, Jee-Seung
    • The Journal of the Convergence on Culture Technology
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    • v.6 no.3
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    • pp.347-352
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    • 2020
  • In this study, the variation of track impact factor according to the spring stiffness change rate of sleeper resilience pad was analyzed based on field measurements. In addition, the correlation between field measurement results and 7 million fatigue test results was verified. The fatigue effect diagram of the sleeper resilience pads was presented considering the nonlinear deterioration characteristics of the sleeper resilience pads used for the STEDEF track. Based on the field measurement results, the nonlinear characteristics of the track impact factor for the spring stiffness change rate over 30% of sleeper resilience pad on the track impact factor-track support stiffness diagram were analyzed to be consistent with the fatigue test results.

Bearing Pad Temperature Change Depending on the Preload of Vertical Journal Guide Bearing (수직형 저널 베어링에서 preload 변화에 따른 베어링 패드 온도 변화)

  • Kim, Jun-Sung;Kim, Du-Young;Kim, Dong-Kwan;Park, Sang-Ho
    • The KSFM Journal of Fluid Machinery
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    • v.12 no.6
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    • pp.33-40
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    • 2009
  • The temperature of vertical pump bearing metal in the pumped storage power plant has been high enough to shutdown the unit. Attempts such as decreasing the oil supply temperature, increasing the bearing oil gap etc. were performed to resolve the problem, but the issue was not resolved. Finally, the high bearing metal temperature was corrected by adjusting the bearing preload. The preload is formed by the oil wedge between the journal surface and bearing pad surface and the degree of preload is determined by the machined radial clearance, assembled radial clearance, rotor journal diameter etc. This paper focuses on the analysis of the preload depending on the bearing parameters and the result of the modification of the bearing following the analysis. The bearing metal temperature dropped as much as $20^{\circ}C$ which was similar as expected by software calculation. But the shaft vibration could increase when the assembled radial clearance is excessive. So, the adjustment of the bearing preload for the tilting pad type journal bearing should be carefully performed.

A Study on the Variations of the Body Trunk Temperature by the Drug-Pad Moxibustion Method (약패드 뜸 방식을 이용한 체간온도변화에 대한 연구)

  • Yoon Dong-Eop;Jo Bong-Kwan
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.55 no.8
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    • pp.386-396
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    • 2006
  • We implemented the Drug-Pad Moxibustion Method in order to improve the conventional moxibustion therapy. This method is aimed to eliminate burning wounds and smoke, which are the defects of conventional moxibustion therapy. And we performed to verify the efficiency by comparing the Drug-Pad Moxibustion Method with the conventional Indirect Moxibustion Therapy. We measured the body heat and the lasting time of blood circulation improvement using thermography. The moxibustion therapy has two kinds of effects: The formers are pharmacological effects of the Moxa's vasodilators and antioxidants. The latters are thermal effects which cause improvement of the blood circulation. To remove the demerits without omission of above therapeutic effects, we extracted the vasodilators and antioxidant compounds from the Moxa-$CH_2Cl_2$ fraction Moxa-EtOAc and composed the moxibustion kit with $(Ba_{0.8}\;Sr_{0.2})_{0.996}\;Y_{0.004}\;TiO_2+0.5_{WT}\;SiO_2%$ Positive Temperature Coefficients Thermistor. The experimental demonstrations have been made by the stimulating the spot which is CV4(Kwan-Won), CV8(Shin-Guel), CV12(Jung-Wan) acupuncture points of the conception vessel meridian(CV). And stimulating time was one hour. We divided the subjects into 5 groups such as no stimulation group, conventional Indirect Moxibustion group, only Drug-Pad stimulation group, only heat stimulation group, and Drug-Pad Moxibustion group. In the different cases, we have measured the body heat in pre-stimulation, just after stimulation, 2 hours after, and 4 hours after. The body heats of the group who were stimulated by the Drug-Pad Moxibustion Method were increased by over the $2^{\circ}C$. And the body heats of the group who were stimulated by the Indirect Moxibustion Method were increased by average the $1^{\circ}C$. We have evaluated that the Drug-Pad Moxibustion Method is improvement on the conventional Indirect Moxibustion Method by the heat-increasing rate is 200% and the lasting time is 150% with the body heat of the abdominal region. In the conclusions, We have implemented the Drug-Pad Moxibustion Method and evaluated the efficiency of the Drug-Pad Moxibustion Method comparing with the conventional Indirect Moxibustion Method.

Analytical Study on Fatigue Behavior of Resilient Pad for Rail Fastening System (레일체결장치용 방진패드의 피로거동에 관한 해석적 연구)

  • Choi, Jung-Youl
    • The Journal of the Convergence on Culture Technology
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    • v.7 no.2
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    • pp.405-410
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    • 2021
  • In this study, a finite element analysis was performed applying a nonlinear material model and fatigue load conditions to evaluate the service life and spring stiffness of the resilient pad for rail fastening system. As a result of the fatigue analysis, the rate of change in spring stiffness compared to the initial condition was about 16%, indicating that fatigue hardening occurred. As for the stress generated in the longitudinal direction of the resilient pad, the difference between the stress generated at the center and the edge was about 10 times or more. In addition, it was analyzed that the equivalent stress of the outer boundary was more than twice as large as that of the central part. Therefore, it was analyzed that the damage and deformation of the resilient pad are the corners of the resilient pad under actual service conditions. The fatigue life diagram of the resilient pad (S-N curve) was derived using the equivalent stress of the resilient pad according to the fatigue cycles. Using the fatigue life diagram of the resilient pad derived in this study, it is considered that it can be used to predict the fatigue life under the relevant conditions by calculating the equivalent stress of the resilient pad under various load conditions.

Fabrication of 3D Paper-based Analytical Device Using Double-Sided Imprinting Method for Metal Ion Detection (양면 인쇄법을 이용한 중금속 검출용 3D 종이 기반 분석장치 제작)

  • Jinsol, Choi;Heon-Ho, Jeong
    • Clean Technology
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    • v.28 no.4
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    • pp.323-330
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    • 2022
  • Microfluidic paper-based analytical devices (μPADs) have recently been in the spotlight for their applicability in point-of-care diagnostics and environmental material detection. This study presents a double-sided printing method for fabricating 3D-μPADs, providing simple and cost effective metal ion detection. The design of the 3D-μPAD was made into an acryl stamp by laser cutting and then coating it with a thin layer of PDMS using the spin-coating method. This fabricated stamp was used to form the 3D structure of the hydrophobic barrier through a double-sided contact printing method. The fabrication of the 3D hydrophobic barrier within a single sheet was optimized by controlling the spin-coating rate, reagent ratio and contacting time. The optimal conditions were found by analyzing the area change of the PDMS hydrophobic barrier and hydrophilic channel using ink with chromatography paper. Using the fabricated 3D-μPAD under optimized conditions, Ni2+, Cu2+, Hg2+, and pH were detected at different concentrations and displayed with color intensity in grayscale for quantitative analysis using ImageJ. This study demonstrated that a 3D-μPAD biosensor can be applied to detect metal ions without special analysis equipment. This 3D-μPAD provides a highly portable and rapid on-site monitoring platform for detecting multiple heavy metal ions with extremely high repeatability, which is useful for resource-limited areas and developing countries.

Optimization of Extraction and Clarification Condition for Preparation of Liquid Extract Tea from Artificially Cultivated Phellinus linteus (인공재배 상황버섯 액상추출차 제조를 위한 최적추출 및 청징화 조건)

  • Song, Hyo-Nam;Oh, Se-Wook
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.31 no.4
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    • pp.636-641
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    • 2002
  • Optimum extraction condition and clarification process were investigated to manufacture liquid extract tea using Phellinus linteus. Carbohydrates content in the raw Phellinus linteus was 80.9%. Major minerals were K, Ca, Fe and Na, but vitamin B$_1$, B$_2$, and C were not detected. The best extraction condition was 5% raw material at 10$0^{\circ}C$ within 3 hr. To clarify the extract, three methods of filtration with depth filter pad, centrifugation and addition of several filter aids were studied. Filtration with depth filter pad and centrifugation were highly effective on the clarification and the changes in the turbidity for 7 weeks at 4$0^{\circ}C$ were not occurred. The optimum clarification condition was centrifugation above 6,000 rpm or filtration with 8 ${\mu}{\textrm}{m}$ depth filter pad.

The Change in the Properties of Seeding Pad by the Oil Palm EFB Fiber (오일팜 EFB 섬유 적용에 따른 육묘패드 특성변화)

  • Kim, Dong-Seop;Hendrasetiafitri, Citasari;Sung, Yong Joo;Kim, Chul-Hwan;Kim, Se-Bin
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.47 no.5
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    • pp.15-22
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    • 2015
  • The crop production technologies keep in improving and the cultivation becomes more standardization owing to the significant developments of various agricultural materials. The artificial soil and base system for root could be one of the major technologies for the modern cultivation especially for controlled horticulture. Although the perlite, cocopeat, and peat moss are the major components of the artificial soil and are broadly used for various application, there is a great need for the new alternative materials for overcoming the low nutrition and the possible shortage of raw materials. In this study, the application of oil palm EFB fiber as an alternative materials for artificial soil especially for the seeding pad components was evaluated. The changes in the structural properties and the functional properties such as moisture holding properties were compared by laboratory produced seeding pads with different mixture of oil palm EFB fiber. The addition of fibrillated EFB fiber resulted in the significant increase in durability of the seeding pad, which showed the possible application of EFB fiber to the seeding pad instead of the wood fiber (UBKP). The moisture holding properties and the germination condition characteristics of the EFB fiber showed the slight less than those of the cocopeat, which require more sophisticated study for improving the functional properties of seeding pad made of the EFB fiber.

CMP Properties of ITO Thin Film with a Control of Temperature in Pad Conditioning Process (패드 컨디셔닝 온도 변화가 ITO 박막 연마특성에 미치는 영향)

  • Choi, Gwon-Woo;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.70-71
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    • 2005
  • The material that is both conductive in electricity and transparent to the visible ray is called transparent conducting thin film. It is investigated the performance of ITO-CMP process using commercial silica slurry with the various conditioning temperatures by control of de-ionized water (DIW). Removal rate of ITO thin film was improved after CMP process after pad conditioning at the high temperature by improved exclusion of slurry residues in polishing pad..

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Effects of knock-out Pad and Extrusion Ratio on Mechanical Property Changes in Milli-Forward Extrusion of Cylindrical Pin (원형핀의 밀리 전방압출에서 녹아웃패드와 압출비가 기계적 성질 변화에 미치는 영향)

  • 심경섭;김용일;이용신;김종호
    • Transactions of Materials Processing
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    • v.12 no.6
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    • pp.582-587
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    • 2003
  • This paper is concerned with the mechanical property changes of the milli-size products manufactured by forward extrusion processes with square dies. Experiments are carried out with pure aluminum and pure copper billets. Extrusion ratio and knock-out pad are chosen as the important process parameters affecting the changes of mechanical properties such as shear strength and hardness. Shear strength tests with the extruded milli-size pin have shown the strong relation between victors hardness and shear strength in the neck of a stepped pin. As the extrusion ratio increases, the hardness on both the surface and the center line of a pin also increase. It is also noted that the hardness on the surface is a little higher than that on the center. The existence of knock-out pad in extrusion die causes the hardness in the neck of a extruded pin to increase. Finally, the approximated linear relations between shear strength and hardness of a pin are suggested.