• 한국전기전자재료학회논문지
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• 제20권12호
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• pp.1056-1061
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• 2007

A sublimation epitaxial method, referred to as the Closed Space Technique (CST) was adopted to produce thick SiC epitaxial layers for power device applications. In this study, we aimed to systematically investigate surface morphologies and electrical properties of SiC epitaxial layers grown with varying a SiC/Al ratio in a SiC source powder during the sublimation growth using the CST method. The surface morphology was dramatically changed with varying the SiC/Al ratio. When the SiC/Al ratio of 90/1 was used, the step bunching was not observed in this magnification and the ratio of SiC/Al is an optimized range to grow of p-type SiC epitaxial layer. It was confirmed that the acceptor concentration of epitaxial layer was continuously decreased with increasing the SiC/Al ratio. 4H-SiC MESFETs haying a micron-gate length were fabricated using a lithography process and their current-voltage performances were characterized. It was confirmed that the increase of the negative voltage applied on the gate reduced the drain current, showing normal operation of FET device.

• 한국세라믹학회지
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• 제29권9호
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• pp.729-738
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• 1992

The glass formation and structural change with the glass compositions were investigated in the CaO-P2O5-SiO2 system with less than 40 wt% of P2O5. The glass formation range was determined by XRD, SEM and EDS techniques for water quenched specimens. The structural analyses were made for binary CaO-SiO2 glasses and ternary CaO-P2O5-SiO2 glasses by using FT-IR and Raman spectroscopy. The glass formation was affected by CaO/SiO2 mole ratio, P2O5 content and primary crystalline phase. The stable glass formation range was found when the transformed CaO/SiO2 mole ratio (new factor derived from structural changes) was in the range of 0.72~1.15 with less than 10 mol% of P2O5. The structural analyses of CaO-SiO2 glasses indicated that as the CaO/SiO2 ratio was increased, the nonbridging oxygens in the structural unit of the glasses were increased. With addition of P2O5 to CaO-SiO2 glasses, the P2O5 enhanced the polymerization of [SiO4] tetrahedra unit in CaO-SiO2 glasses, which contained a large portion of nonbridging oxygen. The phosphate eliminated nonbridging oxygens from silicate species, forcing polymerization of silicate structures and produced in [PO4] monomer in glasses. When added P2O5 was kept constant, the structural change with various CaO/SiO2 ratio was very similar to that of CaO-SiO2 glasses.

• 한국주조공학회지
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• 제22권1호
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• pp.42-48
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• 2002

Effects of coating treatment of metallic Cu, Ni-P film on $SiC_p$, for $SiC_p$/iron aluminide composites were studied. Porous hybrid preforms were fabricated by reactive sintering after mixing the coated $SiC_p$, Fe and Al powders. Then the final composites were manufactured by squeeze casting after pouring AC4C Al alloy melts in preforms. The change of reactive temperature, density, microstructure of the preforms and microstructure of the composites were investigated. The exprimental results were summarized as follows. The thickness of Cu and Ni-P metallic layer formed on $SiC_p$ by electroless plating method were about $0.5{\mu}m$ and coated uniformly. There was no remakable change in the ignition temperature with variation of the mixing ratio of Fe and Al powder while in the case of coated $SiC_p$ it was lower about $20^{\circ}C$ than in the non-coated $SiC_p$. The maximum reaction temperature increased with increasing Al contents, but decreased with increasing $SiC_p$ contents. Expansion ratio of preform after reactive sintering increased with amount of Cu coated $SiC_p$. In the case of Fe-70at.%Al, the expansion ratio was about 7% up to 8wt.% of $SiC_p$, addition but further addition of $SiC_p$, increased the ratio significantly. And in the case of Fe-50 and 60at.%Al, it was about 20% up to 16wt.% of $SiC_p$ addition and about 28% in 24wt.% of $SiC_p$, addition. The microstructures of compounds showed that the grains became finer as amount of $SiC_p$, and mixing ratio of iron powder increased and the shape of compounds was changed gradually from irregular to spheroidal.

• 한국재료학회지
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• 제14권1호
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• pp.67-72
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• 2004

The glass-forming conditions are investigated in the $K_2$O-CaO-$SiO_2$ $-P_2$$O_{5}$ system with 10~65 mole% of$ P_2$$O_{5}$. Thermal properties and dissolution properties were investigated according to variation of the SiO and KO contents in selected compositions. The glass formation condition was determined when $K_2$O/$P_2$$O_{5}$ mole ratio 0~0.24, $SiO_2$/($SiO_2$+$P_2$$O_{5}$ ) mole ratio 0～0.29, and CaO/$P_2$$O_{5}$ mole ratio 0~1.00. In the result of the thermal properties, the glass transition temperature($T_{g}$) and softening temperature($T_{s}$ ) were gradually shifted to the lower temperature range with increase of $K_2$O contents. The maximum value of the chemical durability was shown in $K_2$$PO_2$$O_{5}$ mole ratio 0.17 when the $SiO_2$ contents were changed, and $K_2$O was fixed at 10 mole%. Hence the change of the $K_2$O/$P_2$$O_{5}$ mole ratio was found that a new main factor of the chemical durability.

• 한국세라믹학회지
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• 제30권2호
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• pp.85-92
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• 1993

Oxynitride glasses in Na-Ca-Si-O-N system were prepared by melting at 135$0^{\circ}C$ for 2 hours in N2 gas. The effects of Si/Na mole ratio and the various Si3N4 contents were investigated. Stable oxynitride glasses can be obtained up to 9wt.% Si3N4 content in case the Si/Na mole ratio was 2.12 and 1.62, but $\beta$-Si3N4 was precipitated at 9wt.% Si3N4 content in case the Si/Na mole rtio was 1.12. Density (p), chemical durability, hardness (Hv), and fracture toughness (KIC) increased with increasing Si3N4 content. In cae the Si/Na mole ratio was 1.12, the increment of properties was remarkable but hardness and fracture toughness did not increase no longer owing to precipitation of $\beta$-Si3N4.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.338.2-338.2
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• 2016

Al doped ZnO (AZO) thin films were deposited on Si substrates with rod-shaped-surface by pulsed laser deposition method (PLD). Si-rods were prepared through chemical etching. To analyze the influence on the formation of the rod structure, samples with various chemical etching conditions such as AgNO3/HF ratio, etching time, and solution temperature were prepared. The morphology of Si-rod structures were examined by FE-SEM. Fig. 1 shows a typical structure of n-AZO/p-Si-rod juncions. The fabricated n-AZO/p-Si-rod devices exhibited p-n diode current-voltage characteristics. We compared the I-V characteristics of n-AZO/p-Si-rod devices with the samples without Si-rod structure.

• 한국토양비료학회지
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• 제32권1호
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• pp.39-46
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• 1999

Fly ash를 이용(利用)한 zeolite성(性) 물질(物質)의 열수합성(熱水合成)에 있어서 반응재료(反應材料)의 초기구성성분(初期構成成分) 비율(比率)과 여러가지 반응조건(反應條件)이 반응생성물(反應生成物)의 CEC및 결정화도(結晶化度)에 미치는 영향(影響)과 최적반응조건(最適反應條件)을 조사(調査)하였다. $SiO_2/Al_2O_3$ 비율(比率)이 2.55이상(以上)에서는 Na-P1 zeolite가 생성(生成)되었으나, 2.25이하(以下)에서는 hydroxy sodalite가 생성(生成)되었다. 3N-NaOH, $SiO_2/Al_2O_3$ 비율(比率) 2.55, $Na_2O/Al_2O_3$ 비율(比率) 2.0, $103^{\circ}C$에서 12시간(時間) 처리(處理)한 반응생성물(反應生成物)의 CEC 가 $285cmol^+kg^{-1}$으로 다른 반응조건(反應條件)의 생성물(生成物)보다 높았으며, 결정화도(結晶化度)는 2N-NaOH, $SiO_2/Al_2O_3$ 비율(比率) 2.55 $Na_2O/Al_2O_3$ 비율(比率) 2.0, $103^{\circ}C$에서 12시간(時間) 처리(處理)한 반응생성물(反應生成物)이 45.1%로서 가장 높게 나타났다. 반응생성물(反應生成物)의 $SiO_2/Al_2O_3$ 비율(比率)은 fly ash 보다 낮았으며, ignition loss는 결품격자(結品格子) 내(內)의 흡착수(吸着水)에 의해 4.0%로 증가(增加)하였다. 반응생성물(反應生成物)의 XRD peak와 전자현미경사진(電子顯微鏡寫眞)으로 관찰(觀察)한 결과(結果) Na-P1 zeolite의 특징(特徵)을 나타내었다. Fly ash를 이용(利用)한 Na-P1 zeolite의 최적(最適) 열수합성조건(熱水合成條件)은 NaOH 농도(濃度) 2~3N, $SiO_2/Al_2O_3$, 2.55, $Na_2O/Al_2O_3$ 비율(比率) 1.5~2.0, 반응온도(反應溫度) $80{\sim}103^{\circ}C$, 반응시간(反應時間)은 12시간(時間) 이상(以上)으로 판단(判斷)된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.250-250
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• 2010

Flexible display의 발전에 따라 점차 고온 공정에서 plastic 기판에 영향을 주지 않는 저온 공정으로 변화해 가고 있다. 이러한 발전에 따라 공정온도에 따른 SiNx의 특성 분석을 위해 우선 150C~300C에서 SiNx의 박막을 증착하였다. gas ratio (SiH4:NH3=4:60)와 Power (50W), 공정시간(25min)을 고정하고 온도만을 가변하여 박막의 특성을 분석하였다. 이후에 150C로 온도를 고정 후 gas ratio를 가변하고 Power (40W)와 온도(150C)는 고정 후 실험을 진행하여, 150C에서 최적화된 gas ratio를 알아내도록 하였다. 위의 실험은 p-type 실리콘 웨이퍼 위에 SiNx 박막 증착 후 굴절률과 증착률을 측정하였고, Al 전극을 증착하여 MIS구조를 구현하여, gate voltage에 따른 capacitance를 측정하였다. 이번 논문에서는 SiNx의 Substrate temperature와 gas ratio의 변화에 따른 다양한 특성을 확인하고 이를 체계적으로 분석하였다.

• 한국세라믹학회지
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• 제36권9호
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• pp.937-945
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• 1999

반응결합 탄화규소(RBSC) 반응관을 보호하기 위하여, 반응결합 탄화규소 기판 위에 탄화규소를 1~10 범위의 입력기체비(${\alpha}=P_{H2}/P_{MTS}=Q_{H2}/Q_{MTS}$)와 1050~1300$^{\circ}C$범위의 증착온도에서 methyltrichlorosilane(MTS)로부터 수소분위기에서 저압화학기상법으로 증착하였다. 1250$^{\circ}C$의 증착온도에서 입력기체비가 감소함에 따라 증착속도는 증가하다가 감소하였다 입력기체비가 높을 때에는 (111) 우선배향성을 나타내고 과립형의 미세구조를 보이며, 입력기체비가 작을 경우에는 (220) 우선배향성을 가지는 마면주상의 미세구조가 관찰되었다. 증착온도가 증가함에 따라 입력기체비와 비슷하게 미세구조의 변화하는결과를 얻었으며, 이러한 결과는 증착기구의 변화와 밀접한 관련이 있다. 일정한 증착온도에서 입력기체비의 조정를 통하여 얻었으며, 이러한 결과는 증착기구의 변화와 밀접한 관련이 있다. 일정한 증착온도에서 입력기체비의 조절을 통하여 과립형과 미면주상의 미세구조를 함께 가지는 복층구조를 연속공정을 통하여 성공적으로 제조하였다.

• 대한화학회지
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• 제43권2호
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• pp.172-181
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• 1999

수용성 규산나트륨 빌더를 개발하기 위하여 물유리와 수산화나륨을 적정비율로 혼합한 후 메탄올에 분산시켜 $SiO_2/Na_2O$의 몰 비율이 2.4∼2.8인 무정형 규산나트륨 고체분말을 제조하였다. 이때 규산나트륨의 $SiO_2/Na_2O$의 몰비, 용해도, thermogram, SEM, BET 등을 통하여 그 물리적 특성을 조사하였으며 빌더로서의 기본적인 특성을 규명하기 위해 $SiO_2/Na_2O$의 몰비가 1.0, 2.4, 2.8인 규산나트륨 빌더와 제올라이트를 사용하여 pH 유지능력, 온도에 따른 칼슘이온 결합능, 계면활성제 흡착능 등을 조사하였다. 그 결과 수용성 규산나트륨 화합물이 세제용빌더로서 가져야할 특성인 pH 유지능력 및 용해도에 있어서 제올라이트 보다 우수한 성능을 나타냈으나 칼슘이온 결합능 및 계면활성제 흡착능은 낮게 나타났으며, 규산나트륨의 $SiO_2/Na_2O$의 비율이 증가할수록 pH 유지능력과 이온교환능력은 감소하지만 계면활성제 흡착능력은 다소 증가함을 알 수 있었다.