• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1056-1061
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• 2007

A sublimation epitaxial method, referred to as the Closed Space Technique (CST) was adopted to produce thick SiC epitaxial layers for power device applications. In this study, we aimed to systematically investigate surface morphologies and electrical properties of SiC epitaxial layers grown with varying a SiC/Al ratio in a SiC source powder during the sublimation growth using the CST method. The surface morphology was dramatically changed with varying the SiC/Al ratio. When the SiC/Al ratio of 90/1 was used, the step bunching was not observed in this magnification and the ratio of SiC/Al is an optimized range to grow of p-type SiC epitaxial layer. It was confirmed that the acceptor concentration of epitaxial layer was continuously decreased with increasing the SiC/Al ratio. 4H-SiC MESFETs haying a micron-gate length were fabricated using a lithography process and their current-voltage performances were characterized. It was confirmed that the increase of the negative voltage applied on the gate reduced the drain current, showing normal operation of FET device.

• Journal of the Korean Ceramic Society
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• v.29 no.9
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• pp.729-738
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• 1992

The glass formation and structural change with the glass compositions were investigated in the CaO-P2O5-SiO2 system with less than 40 wt% of P2O5. The glass formation range was determined by XRD, SEM and EDS techniques for water quenched specimens. The structural analyses were made for binary CaO-SiO2 glasses and ternary CaO-P2O5-SiO2 glasses by using FT-IR and Raman spectroscopy. The glass formation was affected by CaO/SiO2 mole ratio, P2O5 content and primary crystalline phase. The stable glass formation range was found when the transformed CaO/SiO2 mole ratio (new factor derived from structural changes) was in the range of 0.72~1.15 with less than 10 mol% of P2O5. The structural analyses of CaO-SiO2 glasses indicated that as the CaO/SiO2 ratio was increased, the nonbridging oxygens in the structural unit of the glasses were increased. With addition of P2O5 to CaO-SiO2 glasses, the P2O5 enhanced the polymerization of [SiO4] tetrahedra unit in CaO-SiO2 glasses, which contained a large portion of nonbridging oxygen. The phosphate eliminated nonbridging oxygens from silicate species, forcing polymerization of silicate structures and produced in [PO4] monomer in glasses. When added P2O5 was kept constant, the structural change with various CaO/SiO2 ratio was very similar to that of CaO-SiO2 glasses.

• Journal of Korea Foundry Society
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• v.22 no.1
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• pp.42-48
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• 2002

Effects of coating treatment of metallic Cu, Ni-P film on $SiC_p$, for $SiC_p$/iron aluminide composites were studied. Porous hybrid preforms were fabricated by reactive sintering after mixing the coated $SiC_p$, Fe and Al powders. Then the final composites were manufactured by squeeze casting after pouring AC4C Al alloy melts in preforms. The change of reactive temperature, density, microstructure of the preforms and microstructure of the composites were investigated. The exprimental results were summarized as follows. The thickness of Cu and Ni-P metallic layer formed on $SiC_p$ by electroless plating method were about $0.5{\mu}m$ and coated uniformly. There was no remakable change in the ignition temperature with variation of the mixing ratio of Fe and Al powder while in the case of coated $SiC_p$ it was lower about $20^{\circ}C$ than in the non-coated $SiC_p$. The maximum reaction temperature increased with increasing Al contents, but decreased with increasing $SiC_p$ contents. Expansion ratio of preform after reactive sintering increased with amount of Cu coated $SiC_p$. In the case of Fe-70at.%Al, the expansion ratio was about 7% up to 8wt.% of $SiC_p$, addition but further addition of $SiC_p$, increased the ratio significantly. And in the case of Fe-50 and 60at.%Al, it was about 20% up to 16wt.% of $SiC_p$ addition and about 28% in 24wt.% of $SiC_p$, addition. The microstructures of compounds showed that the grains became finer as amount of $SiC_p$, and mixing ratio of iron powder increased and the shape of compounds was changed gradually from irregular to spheroidal.

• Korean Journal of Materials Research
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• v.14 no.1
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• pp.67-72
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• 2004

The glass-forming conditions are investigated in the $K_2$O-CaO-$SiO_2$ $-P_2$$O_{5}$ system with 10~65 mole% of$ P_2$$O_{5}$. Thermal properties and dissolution properties were investigated according to variation of the SiO and KO contents in selected compositions. The glass formation condition was determined when $K_2$O/$P_2$$O_{5}$ mole ratio 0~0.24, $SiO_2$/($SiO_2$+$P_2$$O_{5}$ ) mole ratio 0～0.29, and CaO/$P_2$$O_{5}$ mole ratio 0~1.00. In the result of the thermal properties, the glass transition temperature($T_{g}$) and softening temperature($T_{s}$ ) were gradually shifted to the lower temperature range with increase of $K_2$O contents. The maximum value of the chemical durability was shown in $K_2$$PO_2$$O_{5}$ mole ratio 0.17 when the $SiO_2$ contents were changed, and $K_2$O was fixed at 10 mole%. Hence the change of the $K_2$O/$P_2$$O_{5}$ mole ratio was found that a new main factor of the chemical durability.

• Journal of the Korean Ceramic Society
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• v.30 no.2
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• pp.85-92
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• 1993

Oxynitride glasses in Na-Ca-Si-O-N system were prepared by melting at 135$0^{\circ}C$ for 2 hours in N2 gas. The effects of Si/Na mole ratio and the various Si3N4 contents were investigated. Stable oxynitride glasses can be obtained up to 9wt.% Si3N4 content in case the Si/Na mole ratio was 2.12 and 1.62, but $\beta$-Si3N4 was precipitated at 9wt.% Si3N4 content in case the Si/Na mole rtio was 1.12. Density (p), chemical durability, hardness (Hv), and fracture toughness (KIC) increased with increasing Si3N4 content. In cae the Si/Na mole ratio was 1.12, the increment of properties was remarkable but hardness and fracture toughness did not increase no longer owing to precipitation of $\beta$-Si3N4.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.338.2-338.2
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• 2016

Al doped ZnO (AZO) thin films were deposited on Si substrates with rod-shaped-surface by pulsed laser deposition method (PLD). Si-rods were prepared through chemical etching. To analyze the influence on the formation of the rod structure, samples with various chemical etching conditions such as AgNO3/HF ratio, etching time, and solution temperature were prepared. The morphology of Si-rod structures were examined by FE-SEM. Fig. 1 shows a typical structure of n-AZO/p-Si-rod juncions. The fabricated n-AZO/p-Si-rod devices exhibited p-n diode current-voltage characteristics. We compared the I-V characteristics of n-AZO/p-Si-rod devices with the samples without Si-rod structure.

• Korean Journal of Soil Science and Fertilizer
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• v.32 no.1
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• pp.39-46
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• 1999

This study was performed to examine the effect of initial composition ratio and various reaction conditions on CEC and crystallinity of the product in hydrothermal synthesis of zeolitic materials from fly ash. Na-P1 zeolite was formed from the mixture with $SiO_2/Al_2O_3$ ratio above 2.55, however from the mixture with $SiO_2/Al_2O_3$ ratio below 2.25 hydroxy sodalite was formed. The CEC of reaction product(Na-P1 zeolite) treated with 3N-NaOH, $Na_2O/Al_2O_3$ ratio 2.55 and $SiO_2/Al_2O_3$ ratio 2.0 for 12 hours at $103^{\circ}C$ was about $285cmol^+kg^{-1}$, which was higher than those of the products of other reaction condition. The crystallinity of Na-P1 zeolite as high as 45.1% was attained at the optimum reaction condition of 2N-NaOH, $SiO_2/Al_2O_3$ ratio 2.55, $Na_2O/Al_2O_3$ ratio 1.5 for 12 hours at $103^{\circ}C$. The XRD peak of the reaction product could be measured at 7.16, 5.04, 4.12, 3.18, $2.69{\AA}$ and tetragonal pillar shape observed by SEM image be characteristic for Na-P1 zeolite. Judging from the result, it should be considered the optimum synthesis condition for Na-P1 zeolite from fly ash was 2~3N NaOH, $SiO_2/Al_2O_3$ ratio 2.55 and $Na_2O/Al_2O_3$ ratio 1.5~2.0 for 12 hours at $80{\sim}103^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.250-250
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• 2010

Flexible display의 발전에 따라 점차 고온 공정에서 plastic 기판에 영향을 주지 않는 저온 공정으로 변화해 가고 있다. 이러한 발전에 따라 공정온도에 따른 SiNx의 특성 분석을 위해 우선 150C~300C에서 SiNx의 박막을 증착하였다. gas ratio (SiH4:NH3=4:60)와 Power (50W), 공정시간(25min)을 고정하고 온도만을 가변하여 박막의 특성을 분석하였다. 이후에 150C로 온도를 고정 후 gas ratio를 가변하고 Power (40W)와 온도(150C)는 고정 후 실험을 진행하여, 150C에서 최적화된 gas ratio를 알아내도록 하였다. 위의 실험은 p-type 실리콘 웨이퍼 위에 SiNx 박막 증착 후 굴절률과 증착률을 측정하였고, Al 전극을 증착하여 MIS구조를 구현하여, gate voltage에 따른 capacitance를 측정하였다. 이번 논문에서는 SiNx의 Substrate temperature와 gas ratio의 변화에 따른 다양한 특성을 확인하고 이를 체계적으로 분석하였다.

• Journal of the Korean Ceramic Society
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• v.36 no.9
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• pp.937-945
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• 1999

In an effort to protect a RBSC(reaction -bonded SiC) tube SiC films from methyltrichlorosilane(MTS) by low pressure chemical vapor deposition were deposited in hydrogen atmosphere on the RBSC(reaction-bonded SiC) substrates over a range of input gas ratio(${\alpha}=P_{H2}/P_{MTS}=Q_{H2}/Q_{MTS}$=1 to 10) and deposition temperatures(T=1050~1300$^{\circ}C$). At the temper-ature of 1250$^{\circ}C$ the growth rate of SiC films increased and then decreased with decreasing the input gas ratio. The microstructure of SiC films was changed from granular type structure exhibiting (111) preferred orientation in the high input gas ratios to faceted columnar grain structure showing (220) in the low input gas ratios. The similar microstructure change was obtained by increasing the deposition temperature. These results were closely related to a change of deposition mechanism. Double layer structure having granular type and faceted ciolumnar grain structure from the manipulation of mechanism. Double layer structure having granular type and faceted columnar grain structure from the manipulation of the input gas ratio without changing the deposition temperatue was successfully fabricated through in -site process.

• Journal of the Korean Chemical Society
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• v.43 no.2
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• pp.172-181
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• 1999

To develop the manufacturing technique for the powder builder of amorphous solid types, the water glass mixed with caustic soda dispersed into the methanol. Thus soluble sodium silicate was made a form of amorphous solid powder. In order to examine characteristics of water soluble sodium silicate $SiO_2/Na_2O$ mol ratio, we investigated solubility, thermogram, SEM, and BET analysis. pH buffering capacity, calcium-ion binding capacity as temperature change, and surfactant loading capacity were examined for characteristics as laundry detergent builder. $SiO_2/Na_2O$ molar ratio of soluble sodium silicate was 1.0, 2.4, 2.8, and zeolite was used in order to investigate basic characteristics of laundry detergent builder. Silicate used with laundry detergent was good for pH buffering capacity and solubility. But calcium-ion binding capacity and surfactant adsorption ability were lower. $SiO_2/Na_2O$ mol ratio became higher, pH buffering capacity and ion exchange ability were lower and surfactant adsorption ability was a little higher.