• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.E4
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• pp.169-175
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• 2003

The effect of gas composition on the discharge characteristics and the ozone production in silent discharge (SD) process was investigated. The major gas components, $N_2$, $O_2$, and $H_2O$ influence the discharge properties according to their relative magnitude of ionization thresholds and electron affinities. The generated amount of ozone increased with the discharge energy by increasing the electron mean energy. The higher oxygen content injected, the higher ozone produced. A small amount of water vapor significantly lowered the discharge onset voltage by the ionization threshold decreasing effect and high electrical conductivity. However, the further increase of water vapor contributes to decrease the electron density by the electron affinity The addition of water greatly reduced the ozone generation through the formation of OH radical and the catalytic ozone destruction process.

• Journal of Korean Society of Water and Wastewater
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• v.14 no.1
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• pp.99-107
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• 2000

In this article, the removal of surfactant by ozone and BAC was studied. Batch and pilot tests were carried out for these studies. In batch tests, efficiency of ozone oxidation process was evaluated for LAS(Linear Alkylbenzen Sulfonate) and SLS(Sodium Lauryl Sulfate) removal. Under oxidant conditions, the removal of LAS was more effective than that of SLS. The removal of surfactant was more enhanced with increasing pH in oxidant systems. Pilot tests are carried out with BAC single process and ozone oxidation/BAC combined process. The removal of LAS was more effective in ozone oxidation/BAC combined process than BAC single process about 10-20%. In the case of SLS, the efficiency of BAC single process was similar to that of ozone oxidation BAC combined process. According to temperature, the removal efficiency of SLS changed from 70% to 95% and initial concentration of surfactant had no effects on removal efficiency of SLC under applied temperature above $15^{\circ}C$.

• Journal of Korean Society of Water and Wastewater
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• v.22 no.5
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• pp.511-516
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• 2008

Since 1989, Advanced drinking water treatment processes began to build in Korea, especially the water treatment plants around the Nak-dong river stream due to sequential pollutant accidents. Moreover, Advanced drinking water treatment processes, ozone and GAC, are again to be built in water treatment plants around Han-river stream to control taste and odor, micro pollutants. However, there are still a lot of discussion to decide the processes to apply for advanced treatment. Thus there are still need to understand clearly on the cost evaluation of each advanced treatment processes. The cost evaluation was accomplished based on the data of six water treatment plants which are currently being either operating or constructing. Exceptionally, PAC(Powdered Activated Carbon) process was evaluated with cost estimation from construction company. The capital cost per unit volume of ozone process was significantly decreased as the treatment capacity increased. The capital cost was in the order of GAC, ozone and GAC. The operation cost decreased in the order of PAC, GAC and ozone. The total cost considering present value shows that ozone process covers 84% of ozone and GAC process for $30,000m^3/d$ capacity while it covers less than 35% for over 140 thousands $m^3/d$ capacity. Comparing GAC only, and ozone/GAC process, ozone/GAC process is more cost effective for high capacity water treatment plant.

• Applied Chemistry for Engineering
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• v.23 no.5
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• pp.490-495
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• 2012

The catalytic effect induced by activated carbon (AC) was evaluated during the phenol treatment using an ozone/AC ($O_{3}/AC$) process. In the case of the addition of AC to the ozone only process, the decomposition efficiency of dissolved ozone and phenol increased with increasing the amount of AC input. It was that the OH radical generated from the decomposition of dissolved ozone by AC had an effect on the removal of phenol. It was shown as the catalytic effect of AC ([$\Delta$phenol]/$[{\Delta}O_{3}]_{AC}$) in this study. The maximum catalytic effect was approximately 2.13 under 10~40 g/L of AC input. It approached to the maximum catalytic effect after 40 min of reaction with 10 and 20 g/L of AC input, while the reaction time reached to the maximum catalytic effect under 30 and 40 g/L of AC input was approximately 20 min. Moreover, the removal ratios of total organic carbon (TOC) for ozone only process and ozone/AC process were 0.23 and 0.63 respectively.

• Journal of Korean Society of Water and Wastewater
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• v.23 no.6
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• pp.763-768
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• 2009

Ozone is a strong oxidant and a powerful disinfectant. In general, it has been used in drinking water treatment during last 100years. Ozone dissolution features are defined by the two categories of ozone contactors, bubble-diffuser and sidestream ozone contactor. Currently, sidestream-injection systems are gaining in popularity but operating cost might be slightly higher. Sidestream ozone system dissolve ozone into a sidestream flow via an injection setup or in the main process flow stream in some sidestream arrangements. The sidestream flow is subsequently mixed with the main process flow stream, which is directed to a reation tank or pipeline for oxidation and disinfection reactions. The purpose of this study is to suggest optimal operating pressure, to figure out the static-mixer effect and to understand the microbubble characteristics of ozone to improve dissolution efficiency.

• The KSFM Journal of Fluid Machinery
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• v.12 no.6
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• pp.47-53
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• 2009

Ozone is a strong oxidant and a powerful disinfectant. In general, it has been used in drinking water treatment during last 100years. Ozone dissolution features are defined by the two categories of ozone contactors, bubble-diffuser and sidestream ozone contactor. Currently, sidestream-injection systems are gaining in popularity but operating cost might be slightly higher. Sidestream ozone system dissolve ozone into a sidestream flow via an injection setup or in the main process flow stream in some sidestream arrangements. The sidestream flow is subsequently mixed with the main process flow stream, which is directed to a reation tank or pipeline for oxidation and disinfection reactions. The purpose of this study is to suggest optimal operating pressure, to figure out the static-mixer effect and to understand the microbubble characteristics of ozone to improve dissolution efficiency.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.1
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• pp.22-27
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• 2007

we have been studied on the realization of the boundary layer controlled ozone process and related facilities in order to apply for the photo-resist strip process in the semiconductor and flat panel display manufacturing. By means of developing the technology for the high concentration ozone production, it was possible to realized the boundary layer control ozone process by vapor. As a result of the silicon wafer PR strip test, we obtained the strip rate of about 400nm/min at the ozone concentration of 16wt% and flow rate of 8[liter/min.].

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.5
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• pp.932-938
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• 2010

This paper proposed the effective treatment method for organic substances using the barrier discharge plasma process and catalytic chemical reaction followed from ozone decomposition. The decomposition by the plasma process of organic substances such as trichloroethylene, methyl alcohol, acetone, and dichloromethane carried out, and ozone is generated effectively at the same time. By passing through catalysts, ozone easily decomposed and further decomposed organic substances. And, 2-dimensional distribution of ozone using the optical measurement method is performed to identify the catalytic surface chemical reaction. In addition, CO is easily oxidized into $CO_2$ by this chemical reaction, which might be induced oxygen atom radicals formed at the surface of catalyst from ozone decomposition.