• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.585-588
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• 2001

Thin. Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped conducting diamond films were used as anode for generating ozone gas by electrolysis of acidic solution. In this work, we have studied ozone generating system using Boron-doped Diamond electrode. Electrochemical cell and ozone generating system were designed for decreasing the temperature of the system. which was elevated during the reaction. by circulation of electrolyte in the system. In order to determine the ozone generation properties of diamond electrode. experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.585-588
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• 2001

Thin, Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped conducting diamond films were used as anode for generating ozone gas by electrolysis of acidic solution. In this work, we have studied ozone generating system using Boron-doped Diamond electrode. Electrochemical cell and ozone generating system were designed for decreasing the temperature of the system, which was elevated during the reaction. by circulation of electrolyte in the system. In order to determine the ozone generation properties of diamond electrode, experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable while PbO$_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1816-1818
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• 1996

A micro-size nonthermal plasma generator, using a $SiO_2$ film as a dielectric barrier, has been studied experimentally for a high frequency ac voltage in 2LPM oxygen gas fed. The $SiO_2$ film as a micro-size dielectric barrier was made by the wet oxidation of n-type Si wafer($220[{\mu}mt]$). It can be generated ozone, as a nonthermal plasma intensity parameter, at very low level of applied voltage about 1[kV] by using the micro-size dielectric barrier. As a result, in case that have no air gap spacing i.e. surface discharge case shows relatively higher ozone concentration rather than that case of the micro-airgap spacing.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1835-1837
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• 1996

Characteristics of Discharge and nonthermal plasma generation in a micro-air gap spacing between a micro-dielectric barrier and a electrode have been investigated experimentally to chert the potential to be used as a micro-scale nonthermal plasma generator. It is found that the output ozone concentration, as a nonthermal plasma intensity parameter, of the micro-air gnp nonthermal plasma generator depended greatly upon the air gap spacing and thickness of the dielectric barrier. As a result, there is a optimal air gap sparing in the same micro dielectric barrier to generate ozone effectively. And the higher ozone concentration was generated from the thinner micro-barrier.

• Proceedings of the KIEE Conference
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• 2000.07e
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• pp.22-25
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• 2000

Time dependent ozone generation characteristics of some oxide layers grown by ozone on the surface of corona discharge wires have been investigated experimentally in air ambience. Four wires of stainless steel, iron, silver and copper were used for the corona discharge wire of an ozone generator. And the effect of the metal oxide layers on ozone generation was studied and the contamination morphology of each layers was characterized. With the SEM images and the EDS spectra, it was found that all the surface of the corona wire were oxidized by the generated ozone and contaminated by airborne particles through the gradient force. As a result, the morphology and the electrical property of metal oxide layer grown on corona wire surface influenced on ozone generation characteristics i.e. discharge mechanisms.

• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.28 no.5
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• pp.76-81
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• 2014

The ozone generation is commonly made with silent discharge method using quartz glass dielectric. In this paper, using $Al_2O_3$ dielectric to instead of the traditional quartz glass dielectric to improve the system efficiency is presented. The dielectric was manufactured as tube shape (Internal diameter${\times}$ Outside diameter: $11{\times}15mm$) using 99% $Al_2O_3$ ceramic. The characteristics of dielectric discharge and ozone generation were studied of experiments with variation of discharge power, discharge electrode space and rate of flow for supplied gas ($O_2$/Air). As the experimental results, in the same discharge space, the ozone concentration continuously increased with input power increasing, and ozone yield increased until saturation happened. Also, the expended power increased with discharge space extended due to discharge power increased. In additional, the ozone concentration of oxygen ozone was higher than air that was observed when using oxygen ozone in proposed experiments.

• Journal of Environmental Health Sciences
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• v.32 no.2 s.89
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• pp.171-178
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• 2006

The objectives of this study were to investigate the formation of trihalomethanes(THMs) and to compare the concentration level of THMs of swimming pools water by different disinfection methods such as chlorine, ozone-chlorine, and salt brine electrolysis generator (SBEG). The concentration of chloroform was the highest in the chlorine system, and the SBEG was the highest in the production of bromodichloromethane (BDCM), dibromochloromethane (DBCM) and bromoform. The average concentration of total trihalomethanes (TTHMs) in three disinfection systems were $64.5{\pm}27.4mg/l(SBEG),\;43.8{\pm}22.3mg/l(chlorine)$, and $30.6{\pm}16.1mg/l(ozone-chlorine)$, respectively. In chlorine and ozone-chlorine disinfection system, chloroform concentration was highest, followed by BDCN, then DBCM. In the SBEG, TTHMs was composed of 42% of chloroform, 28.9% of bromoform, 15.1% of BDCM and 14% of DBCM, respectively. The strongest correlation was obtained in the levels of chloroform and TTHMs in chlorine, and ozone-chlorine disinfection systems from both indoor and outdoor swimming pools ($r=0.989{\sim}0.999$, p<0.01). In the SBEG, the levels of BDCM and TTHMs showed a good correlation (r=0.913, p<0.01). In chlorine and ozone-chlorine disinfection systems at indoor swimming pools, pH, TOC and $KMnO_4$ consumption showed strong correlation with chloroform and TTHMs concentrations (p<0.01). In the SBEG, pH and TOC were also strongly correlated with chloroform (p<0.01). pH and TTHMs were correlated as well (p<0.05).

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.52 no.5
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• pp.226-226
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.5
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• pp.226-230
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.