Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1996.07c
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- Pages.1816-1818
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- 1996
Discharge and Ozone Generation Characteristics of a Micro-Size Nonthermal Plasma Generator Using Silicon Oxide Film
실리콘 산화막을 이용한 초소형 비열플라즈마 발생장치의 방전 및 오존발생특성
- Kang, Jeong-Hoon (Dept. of Electrical Engg., Kyungpook Nat'l Univ.) ;
- Tae, Heung-Sik (Dept. of Electrical Engg., Kyungpook Nat'l Univ.) ;
- Moon, Jae-Duk (Dept. of Electrical Engg., Kyungpook Nat'l Univ.)
- Published : 1996.07.22
Abstract
A micro-size nonthermal plasma generator, using a
Keywords