• Title/Summary/Keyword: Oxygen-plasma treatment

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Luminescence Properties of the OLED with Oxygen Plasma Treated ITO (산소 플라즈마 표면 처리에 의한 OLED 소자의 발광특성)

  • Lim, J.S.;Lim, K.B.;Kim, Y.W.;Hwang, M.H.;Kang, D.H.;Kim, H.G.;Shin, P.K.
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.1878-1880
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    • 2005
  • In this research, We investigated the effect of $O_2/O_3$ Plasma treatment of indium-tin oxide (ITO) surface on the performance of organic light emitting devices (OLEDs). The OLED had a structure of ITO/N,N'-diphenyl-N,N' -(3-methylphenyl)-1, 1'-biphenyl-4-4'-diamine (TPD)/Tris (8-hydroxyquinolinato) Aluminum $(Alq_3)/Al$. The ITO surface was treated by $O_2/O_3$ plasma with different RF power chamber pressure and exposure time. As a result, the emission efficiency of the OLEDs could be improved obviously.

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A study on the improvement of TiN diffusion barrier properties using Cu(Mg) alloy (Cu(Mg) alloy 금속배선에 의한 TiN 확산방지막의 특성개선)

  • 박상기;조범석;조흥렬;양희정;이원희;이재갑
    • Journal of the Korean Vacuum Society
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    • v.10 no.2
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    • pp.234-240
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    • 2001
  • The diffusion barrier properties of TiN by using Cu(Mg) alloy film have been investigated. Cu(Mg) alloy film was deposited on air-exposed TiN film. Upon annealing, interfacial MgO of 100 $\AA$ has been formed due to the reaction of Mg with oxygen existed on the surface of TiN. Combined MgO/TiN structure prevented the interdiffusion of Cu and Si up to $800^{\circ}C$. To improve the adhesion of Cu(Mg) alloy film to the TiN, TiN layer was treated by $O_2$ plasma, followed by vacuum annealing at $300^{\circ}C$. It was found that increased oxygen on the surface of TiN film by plasma treatment enhanced segregation of Mg toward the interface, resulting in the formation of dense MgO layer. Improved adhesion characteristics have been formed through this treatment. However, increased power of $O_2$ plasma led to the formation of TiO$_2$ and decreased the Mg content to be segregated to the interface, resulting in the decrease in adhesion property. In addition, the deposition of 50 ${\AA}$ Si on the TiN enhanced the adhesion of Cu(Mg) alloy to TiN without deteriorating the TiN diffusion barrier characteristics.

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Gradual modification of Nanoimprint Patterns by Oxygen Plasma Treatment

  • Kim, Soohyun;Kim, Da Sol;Park, Dae Keun;Yun, Kum-Hee;Jeong, Mira;Lee, Jae Jong;Yun, Wan Soo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.233-233
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    • 2015
  • We report on a simple method for inducing physical and chemical property-gradient on nanoimprinted patterns by intensity-regulated plasma treatment under caved sample stage. As for the size gradient, a line pattern having a linewidth of 294.9 nm was etched to have gradually varying width from 277.4 nm to 147.9 nm. Modified pattern was proven to be adaptable to replica stamp for reversal patterning. To investigate the wettability gradient, imprinted nanopatterns were coated with fluoroalkylsilane to increase the hydrophobicity, and the surface was modified to have gradually varying wettability from hydrophobic to hydrophilic (contact angle was ${\sim}160^{\circ}$ to ${\sim}5^{\circ}$ on a single chip). This method is expected to be applicable to the selective adsorption of biological entities and hydrodynamic manipulation of liquid droplets for the pumpless microfluidics.

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Effect of Hydrocarbons on the Promotion of NO-$NO_2$ Conversion in NonThermal Plasma DeNOx Treatment (비열 플라즈마에 의한 NO의 산화에 탄화수소 첨가제가 미치는 영향)

  • Shin, Hyun-Ho;Yoon, Woong-Sup
    • 한국연소학회:학술대회논문집
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    • 2000.12a
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    • pp.33-46
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    • 2000
  • In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of NO-$NO_2$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $NO_2$ etc.) successively produced by hydrocarbon decomposition form the primary path of NO-$NO_2$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propene to have higher affinity with 0 radical under all conditions, thereby both of these hydrocarbons show very fast and efficient NO-$NO_2$ oxidation. It was also shown that propene is superior to ethylene in the aspect of NOx removal.

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Effect of Hydrocarbons on the Promotion of $NO-NO_{2}$ Conversion in NonThermal Plasma DeNOx Treatment (비열 플라즈마에 의한 NO의 산화에 탄화수소 첨가제가 미치는 영향)

  • Shin, Hyun-Ho;Yoon, Woong-Sup
    • 한국연소학회:학술대회논문집
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    • 2000.05a
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    • pp.178-188
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    • 2000
  • In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of $NO-NO_{2}$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $HO_{2}$ etc.) successively produced by hydrocarbon decomposition form the primary path of $NO-NO_{2}$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propene to have higher affinity with 0 radical under all conditions, thereby both of these hydrocarbons show very fast and efficient $NO-NO_{2}$ oxidation. It was also shown that propene is superior to ethylene in the aspect of NOx removal.

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Numerical Study of the Effects of Hydrocarbon Addition and Corresponding Chemical Kinetics on the Promotion of NO Oxidation in Nonthermal Plasma DeNOx Treatment (비열 플라즈마에 의한 NO의 산화에서의 탄화수소 첨가 효과와 그 반응역학에 대한 수치적 연구)

  • Shin, Hyun-Ho;Yoon, Woong-Sup
    • Journal of the Korean Society of Combustion
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    • v.5 no.2
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    • pp.37-50
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    • 2000
  • In the present study, a systematic chemical kinetic calculations were made to investigate the augmentation of $NO-NO_2$ conversion due to the addition of various hydrocarbons (methane, ethylene, ethane, propylene, propane) in the nonthermal plasma treatment. It is included in the present conclusion that the reaction between hydrocarbon and oxygen radicals induced by electron collision, is believed to be a primarily process for triggering the overall NO oxidation and the eventual NOx reduction. Upon the completion of the initiating step, various radicals (OH, $HO_2$ etc.) successively are produced by hydrocarbon decomposition form the primary path of $NO-NO_2$ conversion. When the initiating step is not activated, hydrocarbon consumption rate appeared to be very low, thereby the targeted level of NO conversion can only be achieved by the addition of more input energy. Present study showed ethylene and propylene to have higher affinity with O radical under all conditions, thereby both of these hydrocarbons show very fast and efficient $NO-NO_2$ oxidation. It was also shown that propylene is superior to ethylene in the aspect of NOx removal.

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Improvement of Surface Properties of Ti-6A1-4V Alloy by Low Pressure Carburizing (저압 침탄에 의한 Ti-6Al-4V 합금의 표면 특성 개선)

  • Kim, J.H.;Park, J.D.;Kim, S.W.
    • Journal of the Korean Society for Heat Treatment
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    • v.16 no.4
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    • pp.191-196
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    • 2003
  • For improvement of the wear performance of Ti alloy, vacuum-carburizing technique was tried for the first time using propane atmosphere. During the low pressure carburizing carbide was formed at the surface and carbon transfer was occurred from the carbide to the matrix. It was found that: (i) surface hardness increased with the reduction of operating pressure and time; (ii) optimum hardness distribution could be obtained with the proper choice of temperature and carbon flux control; and, (iii) case depth was largely influenced not by time but by temperature. The two steps process was recommended for obtaining thick case depth and high surface hardness of Ti alloy. For the low oxygen partial pressure, it was necessary to introduce additional CO gas to the atmosphere.Grain boundary oxidation and non-uniformity could be prevented.

Effects of Operating Parameters on Ozone Production by Plasma Gun for Ballast Water Treatment (밸러스트 수 처리를 위한 Plasma Gun의 오존생성에 미치는 운전변수의 영향)

  • Lee, Hyeon-Don;Kim, Jong-Oh;Chung, Jae-Woo
    • Journal of Navigation and Port Research
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    • v.34 no.3
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    • pp.205-211
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    • 2010
  • Effects of operating parameters on electrical properties and ozone generation of Plasma Gun for ballast water treatment were investigated in a laboratory scale experiment. Electrical discharges and ozone generation initiated with applying voltages higher than discharge onset value. Ozone concentration was almost linearly increased with the increase of applied voltage. The optimum electrode gap distance which gave the optimum energy efficiency of ozone generation was 1.95 mm in the experimented apparatus. The effect of inner electrode material on the electrical energy transfer was negligible, however, the difference of electrical and thermal conductivities between electrode materials significantly influenced the ozone generation. In a constant geometrical structure, the electrical energy density played an important role in the ozone generation. The increase of oxygen content in the feeding gas enhanced the ozone generation by lowering ionization potential and promoting ozone source.

Effects of Chlorine Water and Plasma Gas Treatments on the Quality and Microbial Control of Latuca indica L. Baby Leaf Vegetable during MA Storage (염소수와 플라즈마 가스 처리가 왕고들빼기 어린잎채소의 MA저장 중 품질과 미생물 제어에 미치는 영향)

  • Kim, Ju Young;Han, Su Jeong;Whang, Lixia;Lee, Joo Hwan;Choi, In-Lee;Kang, Ho-Min
    • Journal of Bio-Environment Control
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    • v.28 no.3
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    • pp.197-203
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    • 2019
  • This study was carried out to investigate the effect of chlorine water and plasma gas treatment on the quality and microbial control of Latuca indica L. baby Leaf during storage. Latuca indica L. baby leaves were harvested from a plant height of 10cm. They were sterilized with $100{\mu}L{\cdot}L^{-1}$ chlorine water and plasma-gas (1, 3, and 6hours), and packaged with $1,300cc{\cdot}m^{-2}{\cdot}day^{-1}{\cdot}atm^{-1}$ films and then stored at $8{\pm}1^{\circ}C$ and RH $85{\pm}5%$ for 25days. During storage, the fresh weight loss of all treatments were less than 1.0%, and the carbon dioxide and oxygen concentrations in packages were 6-8% and 16-17%, respectively for all treatments in the final storage day. The concentration of ethylene in the packages fluctuated between $1-3{\mu}L{\cdot}L^{-1}$ during the storage and the highest concentration of ethylene was observed at 6 hours plasma treatment in the final storage day. The off-odor of all treatments were almost odorless, the treatments of chlorine water and 1 hour plasma maintained the marketable visual quality until the end of storage. Chlorophyll content and Hue angle value measured at the final storage day were similar to those measured before storage in chlorine water and 1 hour of plasma treatments. E. coli was not detected immediately after sterilization in all sterilization treatments. After 6 hours of plasma treatment, the total bacteria fungus counts were lower than the domestic microbial standard for agricultural product in all sterilization treatments. The total aerobic counts in the end storage day increased compared to before storage, whereas E. coli was not detected in all sterilization treatments. The sterilization effect against bacteria and fungi was the best in chlorine water treatment. Plasma treatment showed sterilization effects, but within a prolonged period of time. In addition, the sterilization effect decreased gradually. These results suggest that chlorine water and plasma treatment were effective in maintaining Latuca indica L. baby Leaf commerciality and controlling microorganisms during postharvest storage.

Low-Pressure Plasma Inactivation of Escherichia coli (감압 플라즈마를 이용한 Escherichia coli 살균)

  • Mok, Chulkyoon;Song, Dong-Myung
    • Food Engineering Progress
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    • v.14 no.3
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    • pp.202-207
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    • 2010
  • Low-pressure plasmas (LPPs) were generated with different gases such as air, oxygen and nitrogen, and their inactivation effects against Escherichia coli were compared in order to evaluate the potential as a non-thermal microbial disinfection technology. Homogeneous plasmas were generated under low pressure below 1 Torr at gas flow rate of 350 mL/min regardless the types of gases. Temperature increases by LPPs were not detrimental showing less than ${10^{\circ}C}$ and ${25^{\circ}C}$ increases after 5 and 10 min treatments, respectively. The smallest temperature increase was observed with air LPP, and followed by oxygen and nitrogen LPPs. More than 5 log reduction in E. coli was achieved by 5 min LPP treatment but the destruction effect was retarded afterward. The LPP inactivation was represented by a iphasic first order reaction kinetics. The highest inactivation rate constant was achieved in air LPP and followed by oxygen and nitrogen LPPs. The small D-values of the LPP also supported its potentialities as a non-thermal food surface disinfection technology in addition to the substantial microbial reduction of more than 5 logs.