• 제목/요약/키워드: Oxygen-plasma treatment

검색결과 332건 처리시간 0.03초

산소-플라즈마 방전을 이용한 수중의 페놀 제거 (Phenol Removal Using Oxygen-Plasma Discharge in the Water)

  • 박영식
    • 한국환경과학회지
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    • 제22권7호
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    • pp.915-923
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    • 2013
  • Decomposition of non-biodegradable contaminants such as phenol contained in water was investigated using a dielectric barrier discharge (DBD) plasma reactor in the aqueous solutions with continuous oxygen bubbling. Effects of various parameters on the removal of phenol in aqueous solution with high-voltage streamer discharge plasma are studied. In order to choose plasma gas, gas of three types (argon, air, oxygen) were investigated. After the selection of gas, effects of 1st voltage (80 ~ 220 V), oxygen flow rate (2 ~ 7 L/min), pH (3 ~ 11), and initial phenol concentration (12.5 ~ 100.0 mg/L) on phenol degradation and change of $UV_{254}$ absorbance were investigated. Absorbance of $UV_{254}$ can be used as an indirect indicator of phenol degradation and the generation and disappearance of the non-biodegradable organic compounds. Removal of phenol and COD were found to follow pseudo first-order kinetics. The removal rate constants for phenol and COD of phenol were $5.204{\times}10^{-1}min^{-1}$ and $3.26{\times}10^{-2}min^{-1}$, respectively.

크롬/폴리이미드의 접착력에 미치는 폴리이미드 표면의 플라즈마 처리의 효과 (The effects of plasma treatment of polyimide surface on the adhesion of chromium/polyimide)

  • 정태경;김영호;유진
    • 한국표면공학회지
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    • 제26권2호
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    • pp.71-81
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    • 1993
  • Thed effects of Ar or Oxygen RF plasma treatment on the adhesion behavior of Cr films to polyimide sub-strates have been investigated by using SEM, XRD, AES, and $90^{\circ}$peel test. By applying RF plasma treatment of the polyimide surface prior to metal deposition, the peel adhesion strength of Cu/Cr films sputtered onto the fully cured BPDA-PDA polyimide was highly increased from about 3g/mm to 90 ~ 100g/mm. Improved peel adhesion strength of Cr/polyimide interfaces due to RF plasma treatment was attributed to the contributions from surface cleaning, Cr-polyimide bonding at the interface, and force required for plastic deformation of the film. While the surface topology change of the polyimide caused by RF plasma treatment makes a little contri-bution to the improved adhesion.

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O2 플라즈마로 처리한 폴리머 기판 위에 성장된 GZOB 박막의 특성 (The Characteristics of GZOB Thin Film on O2 Plasma Treated Polymer Substrate)

  • 유현규;이종환;이태용;허원영;이경천;신현창;송준태
    • 한국전기전자재료학회논문지
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    • 제22권8호
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    • pp.645-649
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    • 2009
  • We investigated the effects of a high density $O_2$ plasma treatment on the structural and electrical properties of Ga-, B- codoped ZnO (GZOB) films. The GZOB films were deposited on polymer substrate without substrate heating by DC magnetron sputtering. Prior to the GZOB film growth, we treated a polymer substrate with highly dense inductively coupled oxygen plasma. The optical transmittance of the GZOB film, about 80 %, was maintained regardless of the plasma pre-treatment. The resistivity of the GZOB film on PC substrate decreased from 9.08 ${\times}$ $10^{-3}$ ${\Omega}-cm$ without an $O_2$ plasma pre-treatment to 2.12 ${\times}$ $10^{-3}$ ${\Omega}-cm$ with an $O_2$ plasma pre-treatment. And PES substrate decreased from 1.14 ${\times}$ $10^{-2}$ ${\Omega}-cm$ without an $O_2$ plasma pre-treatment to 6.13 ${\times}$ $10^{-3}$ ${\Omega}-cm$ with an $O_2$ plasma pre-treatment.

Nitrogen Porosimeter를 이용한 산소 플라즈마 처리 PET의 미세구조 분석 (The Analysis of the Micro-structure of Oxygen Plasma Treated PET Using a Nitrogen Porosimeter)

  • 김병인;김태경;조규민;임용진
    • 한국염색가공학회지
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    • 제11권6호
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    • pp.1-6
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    • 1999
  • The porosities of PET fibers were investigated using a nitrogen porosimeter according to oxygen plasma treatment and dyeing with a disperse dye, and they were discussed in terms of the change of internal micro-structure of the PET fiber. The total pore volume, surface area and average pore size of the plasma treated PET fibers increased expectably compared with the untreated sample. The PET fibers treated with oxygen plasma and then dyed with a disperse dye were increased significantly in the surface area and the total pore volume comparing with those of plasma treated only, but decreased in the average pore size. The increase of the surface area, after dyeing, of the plasma treated PET fibers was due to addition of the surface area of the dye itself to that of the PET fiber. The increase of the total pore volume of the plasma treated PET fibers by dyeing, which is the opposite result to the general idea that the pore volume of fibers would be reduced by occupation of dye molecules in the pores, could be explained by the free-volume model. This is that the amorphous region in the fiber expanded by occupation of dye molecules, and the marginal space surrounding dyes was generated as many smaller pores, and the decrease of the average pore size of the dyed sample also could be explained The decrease of the average pore size was caused by the splitting of a larger pore into smaller pores.

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Effects of Surface Modification of the Membrane in the Ultrafiltration of Waste Water

  • Cho Dong Lyun;Kim Sung-Hyun;Huh Yang Il;Kim Doman;Cho Sung Yong;Kim Byung-Hoon
    • Macromolecular Research
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    • 제12권6호
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    • pp.553-558
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    • 2004
  • An ultrafiltration membrane (polyethersulfone, PM 10) was surface-modified by treating it with low-tem­perature plasmas of oxygen, acrylic acid (AA), acetylene, diaminocyolohexane (DACH), and hexamethyldisiloxane (HMDSO). The effects that these modifications have on the filtration efficiency of a membrane in waste water treat­ment were investigated. The oxygen, AA, and DACH plasma-treated membranes became more hydrophilic. The water contact angles ranged from < $10^{\circ}\;to\;55^{\circ}$ depending on the type of plasma and the treatment conditions. The oxygen plasma-treated membranes displayed a higher initial flux $(312-429\%),$ but lower rejection $(6-91\%),$ than did an untreated membrane. The AA plasma-treated membranes displayed lower or higher initial flux $(42-156\%),$ depending upon the treatment conditions, but higher rejection $(224-295\%)$ in all cases. The DACH plasma-treated membranes displayed lower initial flux. All of them, especially the AA plasma-treated membrane, displayed improved fouling resistance with either a slower or no flux decline. Acetylene and HMDSO plasma-treated membranes became more hydrophobic and displayed both lower initial flux and lower fouling resistance.

활성탄소섬유에 도입된 산소작용기와 초산 분자와의 상호작용에 따른 가스 흡착 특성 (Gas Adsorption Characteristics of by Interaction between Oxygen Functional Groups Introduced on Activated Carbon Fibers and Acetic Acid Molecules)

  • 송은지;김민지;한정인;최예지;이영석
    • 공업화학
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    • 제30권2호
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    • pp.160-166
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    • 2019
  • 본 연구에서는 새집증후군 유발 가스인 초산 가스에 대한 활성탄소섬유의 흡착 성능을 향상시키기 위하여, 산소플라즈마 처리를 통해 활성탄소섬유에 산소작용기를 도입하였다. 산소플라즈마 처리 시 주입되는 산소 가스의 유량이 증가할수록 산소플라즈마 활성종이 더 많이 생성되었다. 이로 인해 물리적 및 화학적인 식각이 더 많이 발생하여 활성탄소섬유의 비표면적이 감소하였다. 특히, 60 sccm의 산소 가스 유량이 주입된 시료(A-O60)의 비표면적의 경우 미처리 시료와 비교하여 약 6.95% 감소된 $1.198m^2/g$까지 감소하였다. 반면, 산소플라즈마 처리 시 주입되는 산소 가스의 유량이 증가할수록 활성탄소섬유 표면에 도입되는 산소 함량이 증가하였으며, 최대 35.87%까지 도입되었음을 확인하였다. 또한, 산소플라즈마 처리된 활성탄소섬유의 초산 가스 흡착 성능은 미처리 활성탄소섬유 대비 최대 43% 향상되었다. 이것은 산소플라즈마 처리에 의해 도입되는 O=C-O와 같은 산소작용기와 초산 분자 사이의 쌍극자 모멘트에 의한 수소결합 형성에 기인한다.

반도전성 실리콘 고무의 플라즈마 처리에 따른 표면의 특성변화 (Changes of Surface Properties by Plasma Treatment on the Surface of Semiconductive Silicone Rubber)

  • 이기택;허창수
    • 한국전기전자재료학회논문지
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    • 제18권8호
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    • pp.696-701
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    • 2005
  • This paper was investigated the changes of surface properties of high-temperature-vulcanized (HTV) semiconductive silicone rubber due to oxygen plasma discharge. The modifications produced on the silicone rubber surface by oxygen plasma were accessed using Fourier transform infrared spectroscopy(FTIR), X-ray photoelectron spectroscopy(XPS), contact angle and Surface Roughness Tester. The results of the chemical analysis Showed that C-H bonds were broken due to plasma discharge and Silica-like bonds (SiOx, x=$3\~4$) increased. It is thought that the above changes lead to the increase of surface energy of high-temperature-vulcanized (HTV) semiconductive silicone rubber also, Surface roughness was increased with cleavage of side-chains and oxidation process, it confirmed change as the SEM. The micromorphology of surface and hydrophobicity due to plasma discharge based on our results were discussed.

ZnO ALE를 위한 Si, sapphire기판의 ECR 플라즈마 전처리 (ECR Plasma Pretreatment on Sapphire and Silicon Substrates for ZnO ALE)

  • 임종민;신경철;이종무
    • 한국재료학회지
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    • 제14권5호
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    • pp.363-367
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    • 2004
  • Recently ZnO epitaxial layers have been widely studied as a semiconductor material for optoelectronic devices. Sapphire and silicon are commonly selected as substrate materials for ZnO epitaxial growth. In this communication, we report the effect of the ECR plasma pretreatment of sapphire and silicon substrates on the nucleation in the ZnO ALE (atomic layer epitaxy). It was found that ECR plasma pretreatment reduces the incubation period of the ZnO nucleation. Oxygen ECR plasma enhances ZnO nucleation most effectively since it increases the hydroxyl group density at the substrate surface. The nucleation enhancing effect of the oxygen ECR plasma treatment is stronger on the sapphire substrate than on the silicon substrate since the saturation density of the hydroxyl group is lower at the sapphire surface than that at the silicon surface.

저온플라즈마 및 효소처리한 면의 물성 및 염색성 (Physical Properties and Dyeing Behaviors of Cotton Fabric Treated with Low Temperature Plasma and/or Cellulase)

  • Yoon, Nam Sik;Lim, Yong Jin
    • 한국염색가공학회지
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    • 제8권3호
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    • pp.59-65
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    • 1996
  • Cotton fabrics were treated by low temperature plasma and/or cellulase, and its physical and dyeing properties were investigated. All the pretreatments of the cotton with low temperature plasma of oxygen, nitrogen and argon slowed down the rate of weight loss of cotton in cellulase solution. Plasma pretreatment did not show any strength retention effect on cotton fiber in the subsequent cellulase treatment. Pretreatment of cotton with low temperature oxygen plasma decreased the rate of dyeing in direct dye bath, while cellulase or plasma/cellulase pretreatment increased the rate. Equilibrium dye uptake of cotton was not changed greatly by the pretreatments except the normal untreated cotton showed more or less high uptake. The pretreatment of cellulase with a water-soluble carbodiimide reduced the enzymatic activity, and did not show any strength retention of cotton in enzymatic weight loss.

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토치형 상압 플라즈마의 방전특성과 미생물의 국부 살균효과 (Discharge Properties of Torch-Type Atmospheric Pressure Plasma and Its Local Disinfection of Microorganism)

  • 손향호;이원규
    • Korean Chemical Engineering Research
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    • 제49권6호
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    • pp.835-839
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    • 2011
  • 토치형 상압 플라즈마 반응기를 통한 방전 및 플라즈마 flame에 대한 분석과 발생된 플라즈마 현상을 이용하여 E. coli에 대한 살균효과를 측정하였다. 상압 플라즈마 반응기를 통해 나오는 플라즈마 flame의 길이는 입력전압, 반응기의 유량 그리고 아르곤/산소 혼합기체에서의 산소비율에 영향을 크게 받았다. 플라즈마 flame에 의한 가열효과는 10분 조사 후에도 $43^{\circ}C$ 미만으로 저온처리가 가능했다. E. coli에 대한 살균처리에서 입력전압의 증가, 아르곤/산소 혼합기체에서의 산소비율 증가 그리고 플라즈마 flame에 대한 노출시간의 증가에 따라 전체적인 살균효과를 향상되었다. 플라즈마 처리 시에 오존농도가 높은 공정조건에서 플라즈마 flame의 직접적인 접촉시간을 증가시키면 살균효과를 극대화할 수 있다.