• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.04a
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• pp.56-57
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• 2006

In this paper, the inorganic multi-layer thin film encapsulation was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, Sputter, inorganic multi-layer thin-film encapsulation was deposited onto the Ethylene Terephthalate(PET) and their interface properties between inorganic and organic layer were investigated. In this investigation, the SiON SiO2 and parylene layer showed the most suitable properties. Under these conditions, the WVTR for PET can be reduced from a level of $0.57\;g/m^2/day$ (bare subtrate) to 1*10-5 g/$m^2$/day after application of a SiON and SiO2 layer. These results indicates that the PET/SiO2/SiON/Parylene barrier coatings have high potential for flexible organic light-emitting diode(OLED) applications.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.3
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• pp.51-58
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• 2018

In this paper, the organic material Poly(methyl methacrylate) PMMA is used with inorganic $Al_2O_3$ to fabricate organic-inorganic multilayer barrier thin films. The organic thin films are developed using a roll-to-roll electrohydrodynamic atomization system, whereas the inorganic are grown using a roll-to-roll low-temperature atmospheric pressure atomic layer deposition system. For the first time, these two technologies are used together to develop organic-inorganic multilayer barrier thin films in atmospheric condition. The films are grown under optimized parameters and classified into three classes based on the layer structures, when the total thickness of the barrier is maintained at ~ 160 nm. All classes of barriers show good morphological, optical and chemical properties. The $Al_2O_3$ films with a low average arithmetic roughness of 1.58 nm conceal the non-uniformity and irregularities in PMMA thin films with a roughness of 5.20 nm. All classes of barriers show a notably good optical transmission of ~ 85 %. The hybrid organic-inorganic barriers show water vapor and oxygen permeation in the range of ${\sim}3.2{\times}10^{-2}g/m^2/day$ and $0.015cc/m^2/day$ at $23^{\circ}C$ and 100% relative humidity. It has been confirmed that it can be mass-produced and used as a low-cost barrier thin film in various printing electronic devices.

• Membrane and Water Treatment
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• v.7 no.5
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• pp.417-431
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• 2016

Poly(vinylidene fluoride) (PVDF) powder was treated with aqueous sodium hydroxide to obtain partially defluorinated fluoropolymers with expected properties such as improving hydrophilicity and fouling resistance. Raman spectrum and FT-IR results confirmed the existence of conjugated carbon double bonds after alkaline treatment. As the concentration increased, the degree of defluorination increased. The morphology and structure of membranes were examined. The permeation performance was investigated. The results showed that membrane's hydrophilicity increased with increase of the percentage of alkaline treated PVDF powder. Moreover, in terms of the water contact angle, it decreased from $92^{\circ}$ to a minimum of $68^{\circ}$; while water up take increased from 128 to 138%. Fluxof pure water and the cleaning efficiency increased with the increase of alkaline treated PVDF powder. The fouling potential also decreased with the increase of the percentage of alkaline treated PVDF powder. The reason that makes blending PVDF show different characteristics because of partial defluorination, which led the formation of conjugated C = C bonds and the inclusion of oxygen functionalities. The polyene structure followed by hydroxide attack to yield hydroxyl and carbonyl groups. Therefore, the hydrophilicity of blending membrane was improved. The SEM and porosity measurements showed that no obvious variations of the pore dimensions and structures for blend membranes were observed. Mechanical tests suggest that the high content of the alkaline treated PVDF result in membranes with less tolerance of tensile stress and higher brittleness. TGA results exhibited that the blend of alkaline treated PVDF did not change membrane thermal stability.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.95-95
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• 2014

An OLED(Organic Light-Emitting Diode) device based on the emissive electroluminescent layer a film of organic materials. OLED is used for many electronic devices such as TV, mobile phones, handheld games consoles. ULVAC's mass production systems are indispensable to the manufacturing of OLED device. ULVAC is a manufacturer and worldwide supplier of equipment and vacuum systems for the OLED, LCD, Semiconductor, Electronics, Optical device and related high technology industries. The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and TCO (Transparent Conductive Oxide) films. ULVAC has delivered a large number of these systems not only Organic Evaporating systems but also LTPS CVD systems. The most important technology of thin-film encapsulation (TFE) is preventing moisture($H_2O$) and oxygen permeation into flexible OLED devices. As a polymer substrate does not offer the same barrier performance as glass substrate, the TFE should be developed on both the bottom and top side of the device layers for sufficient lifetimes. This report provides a review of promising thin-film barrier technologies as well as the WVTR(Water Vapor Transmission Rate) properties. Multilayer thin-film deposition technology of organic and inorganic layer is very effective method for increasing barrier performance of OLED device. Gases and water in the organic evaporating system is having a strong influence as impurities to OLED device. CRYO pump is one of the very useful vacuum components to reduce above impurities. There for CRYO pump is faster than conventional TMP exhaust velocity of gases and water. So, we suggest new method to make a good vacuum condition which is CRYO Trap addition on OLED evaporator. Alignment accuracy is one of the key technologies to perform high resolution OLED device. In order to reduce vibration characteristic of CRYO pump, ULVAC has developed low vibration CRYO pumps to achieve high resolution alignment performance between Metal mask and substrate. This report also includes ULVAC's approach for these issues.

• Electronic Materials Letters
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• v.14 no.6
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• pp.669-677
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• 2018

In this work, the high ${\kappa}$ $Zr_xAl_{1-x}O_y$ films with a different Zr concentration have been deposited by atomic layer deposition, and the effect of Zr concentrations on the structure, chemical composition, surface morphology and dielectric properties of $Zr_xAl_{1-x}O_y$ films is analyzed by Atomic force microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and capacitance-frequency measurement. The effect of Zr concentrations of $Zr_xAl_{1-x}O_y$ gate insulator on the electrical property and stability under negative bias illumination stress (NBIS) or temperature stress (TS) of ZnSnO (ZTO) TFTs is firstly investigated. Under NBIS and TS, the much better stability of ZTO TFTs with $Zr_xAl_{1-x}O_y$ film as a gate insulator is due to the suppression of oxygen vacancy in ZTO channel layer and the decreased trap states originating from the Zr atom permeation at the $ZTO/Zr_xAl_{1-x}O_y$ interface. It provides a new strategy to fabricate the low consumption and high stability ZTO TFTs for application.

• Membrane Journal
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• v.29 no.1
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• pp.51-60
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• 2019

In order to improve gas separation properties of polymeric membranes which have been widely applied in the industry field, aluminosilicate hollow nanoparticles named as allophanes were synthesized by sol-gel method and formulated in Poly(dimethylsiloxane) (PDMS) matrix to investigate the gas separation properties of PDMS membrane. Transmission electron microscope (TEM), Energy dispersive X-ray analysis (EDX), X-ray diffractometer (XRD), Surface area and pore size analyzer (BET) and Fourier transform infrared spectrophotometer (FTIR) were carried out to characterize the synthetic allophanes. Then the PDMS mixed matrix membranes were prepared by adding different volume fraction of allophanes. To examine the effect of allophanes addition in PDMS matrix using unmodified allophane and modified ones, the gas permeation experiments were performed using oxygen, nitrogen, methane and carbon dioxide. As the volume fraction of modified allophane increased up to 4.05 Vol% the permeability of four test gases through PDMS mixed matrix membranes increased. Also, the selectivity of $O_2/N_2$ and $CO_2/CH_4$ increased with the contents of the modified allophane. Further improvement of gas separation properties of PDMS mixed matrix membranes containing higher volume percent of allophanes can be expected as long as well dispersion of allophanes in PDMS matrix can be achieved for better PDMS membranes.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.44 no.5
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• pp.72-79
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• 2012

In this study, to understand the aging factor and mechanism in different partitions of the beeswax-treated volumes, the duplicated beeswax-treated volume was artificially aged at $80^{\circ}C$ of temperature and 65% of relative humidity and then a physical and optical properties of an aged volumes was analyzed. Also, the degraded components of the beeswax samples isolated from different partitions of aged volumes was measured using a gas chromatography/mass spectroscopy (GC/MS). In results, the surface of beeswax-treated volume which is primarily affected by a main aging factors such as light, oxygen, moisture was more deteriorated than the inside of that volume. However, unlike inside of the book volume which was made from paper, the inside of beeswax-treated volume wax was also considerably deteriorated. The inside of the beeswax-treated volume is largely unaffected by the oxygen and humidity during aging due to the water repellency and the air permeation resistance of beeswax. Therefore, it is confirmed that aging factors and mechanisms in the inside of the volume are different from thats of the outside of the volume. This fact was also verified by the results of GC/MS analysis of an beeswax samples which was sampled from different partitions of aged volumes. As result as GC/MS analysis of the beeswax extracted from the outside of the aged volume, the low molecular compounds with a carbon length of $C_9-C_{20}$ (fatty acid, etc) were increased and the compounds with a carbon length of above $C_{34}$ (ester, etc) were also increased. But the compounds with a chain length of $C_{21}-C_{36}$ (hydrocarbon, alcohol, etc) were decreased. In case of the aged beeswax of inside, the low molecular compounds with a carbon length of $C_9-C_{20}$ (fatty acid, etc) and the compounds with a chain length of $C_{21}-C_{36}$ (hydrocarbon, alcohol, etc) were increased. While, the compounds with a carbon length of above $C_{34}$ (ester, etc) were decreased.

• Membrane Journal
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• v.11 no.4
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• pp.143-151
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• 2001

We have fabricated mixed-ionic conducting membranes, L $a_{0.6}$S $r_{0.4}$ $Co_{0.2}$F $e_{0.8}$ $O_{3-}$$\delta$/ and L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ by the solid state method. Ceramic membranes consisted of perovskite-type structures and exhibited high relative density, >95%. Especially, dense L $a_{0.6}$S $r_{0.4}$Co $O_{3-}$$\delta$/ layer was coated on the L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membranes by using screen printing technique in order to improve oxygen ion flux. We measured oxygen ion flux on uncoated L $a_{0.6}$S $r_{0.4}$ $Co_{0.2}$F $e_{0.8}$ $O_{3-}$$\delta$/, uncoated L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/, and coated L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membranes. The L $a_{0.6}$S $r_{0.4}$ $Co_{0.2}$F $e_{0.8}$ $O_{3-}$$\delta$/ membranes showed the highest flux, 0.26 mL/min.$\textrm{cm}^2$ at 90$0^{\circ}C$, after steady state had been reached. The oxygen flux of coated L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membranes showed higher value, 0.19 mL/min.$\textrm{cm}^2$ at 95$0^{\circ}C$. This flux was as much as 2 or 3 times higher than those of uncoated L $a_{0.7}$S $r_{0.3}$G $a_{0.6}$F $e_{0.4}$ $O_{3-}$$\delta$/ membranes. 3-$\delta$/ membranes.X> 3-$\delta$/ membranes.membranes.

• Membrane Journal
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• v.21 no.2
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• pp.177-192
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• 2011

Hollow fiber membrane using CTA polymers were prepared by the phase separation method for the separation and purification of biogas and the hollow fiber gas separation membrane modules with the effective surface area of 0.17 $m^2$ were prepared. The pure gas permeation properties of membrane modules for methane, oxygen and carbon dioxide were measured. The permeance of $CO_2$ and $CH_4$were 0.46 GPU and 18.52 GPU, respectively, therefore, the high $CO_2$/$CH_4$ selectivity of 40.4 was obtained. The separation and purification test for 4 different simulated mixed gases were carried out after the pure gas test and the gas concentration and flux of the permeate at the various stage-cut were measured from the 1 stage, 2 stage, and 3 stage cascade of membrane modules. In the 1 stage test, the concentration of $CH_4$ increased as the increase of the stage-cut, while the $CH_4$ recovery efficiency ratio decreased. In the 2 stage test, the $CH_4$ recovery efficiency ratio increased compared to the 1 stage. The 3 stage test was employed to reduce the loss of $CH_4$ in biogas and the result showed less than 5% of $CH_4$ recovery loss.

• Membrane Journal
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• v.21 no.1
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• pp.62-71
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• 2011

Highly enriched oxygen is used in energy-efficient combustion due to decreased non-flammable nitrogen, while high purity nitrogen is used for explosion proof in the LNG ships and keeping the freshness of green stuffs. Membrane technology can be used in these $O_2$ and $N_2$ generation with low energy consumption. In this study, PES was used as a membrane material and 1-methyl-2-pyrollidone (NMP) and acetone were employed as a good solvent and nonsolvent addictive (swelling agent to PES), respectively. Dope solutions were prepared by changing the content of acetone (0, 6.5, 15, 25, 31.5 wt%) in 37 wt% PES solutions. Hollow fiber spinning was performed at 0~10 cm of air-gap distances for each dope solution. $O_2/N_2$ selectivity and permeability were investigated by comparing of hollow fibers coated or not by silicons. $O_2/N_2$ selectivity increased and permeance of $O_2$ and $N_2$ decreased with increasing air-gap height independently of acetone addictions. Optimized PES hollow fibers were obtained with 37/6.5/56.5 wt% PES/acetone/NMP dope solution and 10 cm air-gap, which showed 7.3 of $O_2/N_2$ selectivity and 4.3 GPU of $O_2$ permeability after silicon coating.