Atomic Layer Deposited ZrxAl1-xOy Film as High κ Gate Insulator for High Performance ZnSnO Thin Film Transistor |
Li, Jun
(School of Material Science and Engineering, Shanghai University)
Zhou, You-Hang (School of Material Science and Engineering, Shanghai University) Zhong, De-Yao (School of Material Science and Engineering, Shanghai University) Huang, Chuan-Xin (School of Material Science and Engineering, Shanghai University) Huang, Jian (School of Material Science and Engineering, Shanghai University) Zhang, Jian-Hua (Key Laboratory of Advanced Display and System Applications, Ministry of Education, Shanghai University) |
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