A study on the spin on glass (SOG) from polysilazane resin for the premetal dielectric (PMD) layer of sub-quarter micron devices (초고집적소자의 층간절연막용 polysilazane계 spin on glass (SOG)에 관한 연구)
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- Journal of the Korean Vacuum Society
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- v.9 no.1
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- pp.69-75
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- 2000