Atomic Layer Deposition Of Lanthanum Oxide ($La_{2}O_{3}$) Thin Film on Si(100) Substrate and Electrical Characterization

• Jo, Sang-Jin;Park, Nam-Gyun;Gang, Dong-Gyun;Ha, Jeong-Suk;Kim, Byeong-Ho
• • Proceedings of the Korean Vacuum Society Conference
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  • 2005.02a
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  • pp.125-125
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  • 2005
• PDF

Surface passivation of $BaMgAl_{10}O_{17}:Eu^{2+}$ coated with Silicon oxide by catalyzed atomic layer deposition

• Jeong, Yeong-Gyu;Kim, Hyeok-Jong;Kim, Hui-Gyu;Choe, Byeong-Ho
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2007.11a
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  • pp.78.2-78.2
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  • 2007
• PDF

Atomic layer deposition of $Ti_2O$ thin films using $NH_3$ gas as a non-oxidizing reactant gas.

• Gwon, Se-Hun;Kim, Seong-Uk;Gang, Sang-Won
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2007.11a
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  • pp.15.1-15.1
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  • 2007
• PDF

Tin Oxide Thin Film Deposition for Gas S두낵 by Reactive Ionized Cluster Beam(R-ICB)

• Choi, Won-Kook;Song, Seok-Kyun;Jung, Hyung-Jin;Koh, Seok-Keun
• • Proceedings of the Korean Vacuum Society Conference
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  • 1995.02a
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  • pp.76-76
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  • 1995
• PDF

Electrophorctic Deposition of $LaFeO_3-YSZ-NiO$ powders for Solid Oxide Fuel Cell(SOFC) (SOFC용 $LaFeO_3-YSZ-NiO$계 분말의 전기영동 침적)

• Lee, Hyeong-Jik;Yun, Sang-Ok;O, In-Taek;Song, Du-Gyu;Jung, Hae-Kyung
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.04a
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  • pp.41.2-41.2
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  • 2000
• PDF

The Growth of $PbZrO_3/PbTiO_3$ Oxide Artificial Lattice Deposited by Pulsed Laser Deposition and Characterization of Ferroelectric Domain by Scanning Force Microscope (펄스레이져 증착법을 이용한 $PbZrO_3/PbTiO_3$ 산화물 인공격자의 성장과 Scanning Force Microscope를 이용한 전기분극 특성 연구)

• 최택집;김진수;박배호;이재찬
• • Proceedings of the Korean Ceranic Society Conference
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  • 2004.04b
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  • pp.37.1-37.1
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  • 2004
• PDF

Change of Crystallinity and Surface Roughness of Tin Oxide Film in Hybrid Ion Beam Deposition(HIBD)

• Cho, Jun-Sik;Choi, Won-Koo-K;Yoon, Ki-Hyun;Jung, Hyung-Jin;Koh, Seok-Keun
• • Proceedings of the Korean Vacuum Society Conference
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  • 1995.06a
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  • pp.78-78
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  • 1995
• PDF

Electrical properties of lanthanum oxide films deposited by Plasma Enhenced Atomic Layer Deposition (PEALD 방법으로 중착된 $La_2O_3$ 게이트 산화물 박막의 전기적 특성)

• Lee, Eun-Ju;Kim, Beom-Yong;Go, Myeong-Gyun;Park, Jong-Wan
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2005.05a
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  • pp.256-256
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  • 2005
• PDF

Preparation and Characterization of Thin Oxide Film Deposited by Ion-Assist-Deposition(IAD)

• Cho, Jun-Sik;Choi, Won-Kook;Yoon, Ki-Hyun;Jung, Hyung-Jin
• • Proceedings of the Korean Vacuum Society Conference
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  • 1996.02a
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  • pp.59-59
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  • 1996
• PDF

Fabrication of a regular array of nano-dots on Si substrate via pulsed laser deposition using anodic aluminum oxide nano-template

• Nam, U-Seong;Seo, Hye-Jin;Ha, Jeong-Suk;Bae, Chang-Hyeon;Nam, Sang-Hwan;Park, Seung-Min
• • Proceedings of the Korean Vacuum Society Conference
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  • 2003.08a
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  • pp.177-177
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  • 2003
• PDF

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