Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.78-78
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- 1995
Change of Crystallinity and Surface Roughness of Tin Oxide Film in Hybrid Ion Beam Deposition(HIBD)
- Cho, Jun-Sik (Department of Ceramic Engineering, Yonsei University) ;
- Choi, Won-Koo-K (Division of Ceramics, Korea Institute of Science Technology) ;
- Yoon, Ki-Hyun (Engineering, Yonsei University) ;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science Technology) ;
- Koh, Seok-Keun (Division of Ceramics, Korea Institute of Science Technology)
- Published : 1995.06.01
Abstract
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