Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
- /
- Pages.59-59
- /
- 1996
Preparation and Characterization of Thin Oxide Film Deposited by Ion-Assist-Deposition(IAD)
- Cho, Jun-Sik (Division of Ceramics, Korea Institute of Science Technology) ;
- Choi, Won-Kook (Division of Ceramics, Korea Institute of Science Technology) ;
- Yoon, Ki-Hyun (Department of Ceramic Engineering, Yonsei University) ;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science Technology)
- Published : 1996.02.01
Abstract
Keywords