• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.195-195
• /
• 2010

In recent years, Anodic aluminum oxide(AAO) has become popular and attractive materials. It can be easily fabricated and self-organized pore structures. It has been widely used as a biosensor membrane, photonic crystal for optical circuit and template for nanotube growth etc. In previous papers, the theory was developed that AAO shows anisotropic optical properties, since it has anisotropic structure with numerous cylindrical pores. It gives rise to the anisotropy of the refractive index called as birefringence. It can be used as conventional polarizing elements with high efficiency and low cost. Therefore, we would like to compare the theory and experimental results in this study. One method which can measure effective refractive index of thin film is the prism coupling technique. It can give accurate results fast and simply. Furthermore, we can also measure separately the refractive index with different polarization using polarization of the laser (TE mode and TM mode). We calculated the effective refractive index with effective medium approximations (EMAs) by pore size in the SEM image. EMAs are physical models that describe the macroscopic system as the homogeneous and typical method of all mean field theories.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2007.05a
• /
• pp.368-370
• /
• 2007

AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

• Proceedings of the KIEE Conference
• /
• 2011.07a
• /
• pp.1493-1494
• /
• 2011

CdS nanostructure materials have been fabricated in porous anodic aluminum oxide (AAO) template by using chemical bath deposition (CBD). These nanostructure materials had uniform diameters of about 15e200 nm, which correspond to the pore sizes of the templates used, and the length was up to 40 mm. X-ray diffraction (XRD) investigation demonstrates that CdS nanostructure materials were hexagonal polycrystalline in nature. As the pore diameter of AAO templates was enlarged, the preferential orientation of c-axis was improved. From PL analysis, the sulfur-deficient defects at the surfaces of CdS nanostructure materials were increasedwhen the samplewas synthesized in the template with larger pore diameter.

• Bulletin of the Korean Chemical Society
• /
• v.30 no.5
• /
• pp.1131-1134
• /
• 2009

Preparation of graded materials displaying gradients of desired properties is one of the important issues and less-developed areas in materials chemistry. For the first time we demonstrate facile control of porosity and length in the pores of AAO template in lateral directions by controlled dipping method. To demonstrate the versatility of the proposed method, laterally graded silica nanotubes are also prepared by using the laterally graded AAO templates. The method demonstrated here will open numerous possibilities for obtaining a variety of graded materials with lateral gradients of catalytic, electrochemical, mechanical and optical properties on the nanoscale.

• Journal of the Semiconductor & Display Technology
• /
• v.20 no.1
• /
• pp.37-41
• /
• 2021

We report on the formation of anodic aluminum oxide (AAO) film using sulfuric acid containing cerium salt. When the temperature of the sulfuric acid containing cerium salt changes from 5 ℃ to 20 ℃, the current density and the thickness growth rate increase. The surface morphology of the AAO film change according to the temperature of the electrolytes. And that affected the breakdown voltage and the plasma etch rate. The breakdown voltage per unit thickness was the highest at 15 ℃, and the plasma etch rate was the lowest at 10 ℃ at 2.80 ㎛/h.

• Journal of the Korean Society for Precision Engineering
• /
• v.32 no.1
• /
• pp.63-68
• /
• 2015

Micro/nano patterns for optical concentration and diffusion have been studied in the various fields such as displays, optics, and sensors. Conventional micro patterns were continuous and linear shapes due to using linear-type light sources, however, recently non-continuous patterns have been applied as point sources are used for dot-type light sources such as LEDs and OLEDs. In this study, a hybrid machining technology combining an indentation machining method and an AAO process was developed for manufacturing the non-continuous micro patterns having nano patterns. First, mirror-like surfaces ($R_a<20nm$) of pure Aluminum substrates were obtained by optimizing cutting conditions. Then, The letter of 'K' consisting of the arrays of the micro patterns was manufactured by the indentation machining method which has a similar principle to indentation hardness testing. Finally, nano patterns were machined by AAO process on the micro patterns. Conclusively, a specific letter having nano-micro hybrid patterns was manufactured in this study.

• Journal of the Korean Electrochemical Society
• /
• v.8 no.3
• /
• pp.125-129
• /
• 2005

We have investigated the electrochemical factors affecting the magnetic properties of hard magnetic CoP nanowires and soft magnetic CoFe nanowires fabricated by ac electrodeposition into self-made AAO(anodic aluminum oxide) nano-templates. AAO template having nano scale pores of high aspect ratio has been prepared through 2-step anodizing of aluminum foil in sulfuric acid. Hard Magnetic properties of CoP nanowires were highly conditional on the applied ac potential which could be a decisive factor to make CoP nanowires made up of either pure hcp crystals or a mixture of hop crystals and fcc crystals. On the contrary to CoFe films, there was no anomalous codeposition in the electrodeposition of soft magnetic CoFe nanowires which exhibited their best saturation magnetization of 238 emu/g at the composition of $Co_{30}Fe_{70}$.

• Journal of the Korean Vacuum Society
• /
• v.15 no.4
• /
• pp.427-433
• /
• 2006

We have fabricated nanodot arrays by using phase separated (PS- b- PMMA) diblock copolymer film and anodic aluminum oxide (AAO) membrane as templates with hexagonal arrays of cylindrical microdomains perpendicular to the substrate. Pulsed laser deposition technique was used to deposit various kinds of materials including Ag, Ni, ZnO, Si:Er, and Co/Pt onto Si substrates. The size and separation of nanodots correspond to those of the templates used, The density of nanodots was estimated to be $6{\times}10^{11}/cm^2$ and $1{\times}10^{10}/cm^2$ when the diblock copolymer and AAO were used, respectively. In particular, the optical properties of ZnO and Si: Er nanodot arrays were investigated and the strong photoluminescence at 380 nm and $1.54{\mu}m$ was observed from ZnO and Si:Er nanodot arrays, respectively.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2009.05a
• /
• pp.240-243
• /
• 2009

Recently, many researches on the development of super-hydrophobic and anti-reflective surfaces have been concentrated on the fabrication of nano-patterned products. The nano-patterned mold is a key to replicate nano-patterned products by mass production techniques such as injection molding and UV molding. The present paper proposes fabricating nano-patterned mold with cost-effective method. The nano-pattern molded was fabricated by electroforming the anodic aluminum oxide template without E-beam lithography. The final mold with nano-patterns showed the pores with the diameter of $100{\sim}120$ nm and the height of 150 nm was fabricated.

• Transactions of Materials Processing
• /
• v.19 no.2
• /
• pp.73-78
• /
• 2010

Recently, many researches on the development of super-hydrophobic surface have been concentrated on the fabrication of nano-patterned products. Nano-patterned mold is a key to replicate nano-patterned products by mass production process such as injection molding and UV molding. The present paper proposes the new fabricating method of nano-patterned mold at low cost. The nano-patterned mold was fabricated by electroforming the anodic aluminum oxide membrane filled with UV curable resin in nano-hole by capillary phenomenon. As a result, the final mold with nano-patterns which have the holes with the diameter of 100~200 nm was fabricated. Furthermore, the UV-molded products with clear nano- patterns which have the pillars with the diameter of 100~200nm were achieved.