• Title/Summary/Keyword: Oxidation-film

Search Result 778, Processing Time 0.025 seconds

Physical and Electrical Characteristics of Wet Oxidized LPCVD Silicon Nitride Films (습식 산화한 LPCVD Silicon Nitride층의 물리적, 전기적 특성)

  • Lee, Eun-Gu;Park, Jin-Seong
    • Korean Journal of Materials Research
    • /
    • v.4 no.6
    • /
    • pp.662-668
    • /
    • 1994
  • The physical and electrical characteristics of sub-l0nm thick capacitor dielectrics formed by wet oxidation of silicon nitride(oxide/nitride composite) and by removing the top oxide of oxidized silicon nitride(0xynitride) are described. For the capacitors with an oxide/nitride composite layer, the capacitance decreases sharply, but the breakdown field increases with an increase in the wet oxidation time at $900^{\circ}C$. For the capacitors with oxynitride layers, the values of both the capacitance and the breakdown field increase with increasing wet oxidation time. The reduction of effective thickness and the improved quality of oxynitride film are responsible for the improved capacitance and increased breakdown fields, respectively. In addition, intrinsic TDDB characteristics and early breakdown failure rate of oxynitride film are improved with increasing oxidation time. Consequently, the oxynitride film is suitable for dynamic memories as a thin dielectric film.

  • PDF

Effect of Packaging on the Quality Stability and Shelf-life of Dried Anchovy (마른멸치 저장중의 품질저하에 미치는 포장의 영향)

  • Lee, Kang-Ho;Kim, Chang-Yang;You, Byeong-Jin;Jea, Yoi-Guan
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.14 no.3
    • /
    • pp.229-234
    • /
    • 1985
  • The effect of packaging on the quality of dried anchovy was investigated, when packed with various materials and stored at different conditions. In cases of nitrogen gas substitution or addition of antioxidant, the reaction rates of lipid oxidation, the loss of available lysine and browning of the samples sealed in aluminum laminated film bag were lower than those packed in kraft paper or polyethylene film bag while the samples without gas substitution did not reveal any great differences in the rate of the reactions. The shelf-lives of the samples computed as a function of lipid oxidation were 90, 98 and 137 days at the storage of $35^{\circ}C$ for the packages of kraft paper, polyethylene and aluminum film respectively. And those at $55^{\circ}C$ storage for the same samples were 47, 51 and 77 days. The half-lives of available lysine loss were 227, 209 and 312 days at $35^{\circ}C$: 83, 83 and 147 days at $55^{\circ}C$ for the samples respectively. And the shelf-lives determined as a function of browning reaction were 26, 27 and 49 days at $55^{\circ}C$. The predicted shelf-lives at $25^{\circ}C$ as a function of lipid oxidation were 130, 140, and 189 days for kraft paper, polyethylene and aluminum laminated film packaging: 207, 229 and 246 days for the browning reaction, and 363, 339 and 415 days for the loss of available lysine. The results suggest that the protective effect of packaging on the reactions of lipid oxidation and browning could not be aided unless the air was expelled or replaced to inert gas.

  • PDF

The Research on Aluminum and Silcon Nanoparticles as Anode Materials for Lithium Ion Batteries (알루미늄 실리콘 나노분말을 이용한 리튬이온전지 음극재료에 관한 연구)

  • Kim, Hyeong-Jo;Tulugan, Kelimu;Kim, Hyung-Jin;Park, Won-Jo
    • Journal of Power System Engineering
    • /
    • v.17 no.1
    • /
    • pp.110-115
    • /
    • 2013
  • The electrochemical performance and microstructure of Al-Si, Al-Si/C was investigated as anode for lithium ion battery. The Al-Si nano composite with 5 : 1 at% ratio was prepared by arc-discharge nano powder process. However, some of problem is occurred, when Al nano composite was synthesized by this manufacturing. The oxidation film is generated around Al-Si particles for passivating processing in the manufacture. The oxidation film interrupts electrical chemistry reaction during lithium ion insertion/extraction for charge and discharge. Because of the existence the oxidation film, Al-Si first cycle capacity is very lower than other examples. Therefore, carbon synthsized by glucose ($C_6H_{12}O_6$) was conducted to remove the oxidation film covered on the composite. The results showed that the first discharge cycle capacity of Al-Si/C is improved to 113mAh/g comparing with Al-Si (18.6mAh/g). Furthermore, XRD data and TEM images indicate that $Al_4C_3$ crystalline exist in Al-Si/C composite. In addition the Si-Al anode material, in which silicon is more contained was tested by same method as above, it was investigated to check the anode capacity and morphology properties in accordance with changing content of silicon, Si-Al anode has much higher initial discharge capacity(about 500mAh/g) than anode materials based on Aluminum as well as the morphology properties is also very different with the anode based Aluminum.

Microstructure and CO Gas Sensing Properties of Ag-CuO-SnO2 Thin Films Prepared by Co-Evaporation and Thermal Oxidation (공증발과 열산화로 제조한 Ag-CuO-SnO2 박막에서 미세조직과 CO 가스 감지특성)

  • Ji, In-Geol;Han, Kyu-Suk;Oh, Jae-Hee;Ko, Tae-Gyung
    • Journal of the Korean Ceramic Society
    • /
    • v.46 no.4
    • /
    • pp.429-435
    • /
    • 2009
  • In this study, we investigated microstructure and the CO gas sensing properties of Ag-CuO-$SnO_2$ thin films prepared by co-evaporation and subsequently thermal oxidation at air atmosphere. The sensitivity of a Cu-Sn films, thermally oxidized at $600^{\circ}C$, is strongly affected by the amount of Cu. At Cu:7 wt%-Sn:93 wt%, the film exhibited a maximum sensitivity of ${\sim}2.3$ to CO gas of 1000 ppm at $300^{\circ}C$. In contrast, the sensitivity of a Sn-Ag film did not change significantly with the amount of Ag. An enhanced sensitivity of ${\sim}3.7$ was observed in the film with a composition of Ag:3 wt%-Cu:4 wt%-Sn:93 wt%, when thermally oxidized at $600^{\circ}C$. In addition, this thin film shows a response time of ${\sim}80$ sec and a recovery time of ${\sim}450$ sec to 1000 ppm CO gas. The results demonstrate that the CO sensitivity of the Ag-CuO-$SnO_2$ thin films may be closely associated with coexistence of $SnO_2$ and SnO phase, decrease in average particle size, and a porous microstructure. We also suggest that co-evaporation and followed by thermal oxidation is a very simple and effective method to prepare oxide gas sensor thin films.

Electric-field Assisted Photochemical Metal Organic Deposition for Forming-less Resistive Switching Device (전기장 광화학 증착법에 의한 직접패턴 비정질 FeOx 박막의 제조 및 저항변화 특성)

  • Kim, Su-Min;Lee, Hong-Sub
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.27 no.4
    • /
    • pp.77-81
    • /
    • 2020
  • Resistive RAM (ReRAM) is a strong candidate for the next-generation nonvolatile memories which use the resistive switching characteristic of transition metal oxides. The resistive switching behaviors originate from the redistribution of oxygen vacancies inside of the oxide film by applied programming voltage. Therefore, controlling the oxygen vacancy inside transition metal oxide film is most important to obtain and control the resistive switching characteristic. In this study, we introduced an applying electric field into photochemical metal-organic deposition (PMOD) process to control the oxidation state of metal oxide thin film during the photochemical reaction by UV exposure. As a result, the surface oxidation state of FeOx film could be successfully controlled by the electric field-assisted PMOD (EFAPMOD), and the controlled oxidation states were confirmed by x-ray photoelectron spectroscopy (XPS) I-V characteristic. And the resistive switching characteristics with the oxidation-state of the surface region could be controlled effectively by adjusting an electric field during EFAPMOD process.

A Study on the Improvement of Oxidation and Corrosion Resistance of Stainless Steel by Sol-Gel Ceramic Coating (II); Effect on Oxidation and Corrosion REsistance of $CeO_2$ Stabilized Zirconia Thin Film (졸-겔 세라믹 코팅에 의한 스테인레스강의 내산화 및 내식성 향상에 관한 연구 (II);$CeO_2$ 안정화 지르코니아 박막의 내산화 및 내식성 효과)

  • 이재호;우일기;김병호
    • Journal of the Korean Ceramic Society
    • /
    • v.32 no.1
    • /
    • pp.95-105
    • /
    • 1995
  • Ceria(CeO2) stabilized zirconia(CeSZ) sol was synthesized with zirconium n-butoxide Zr(OC4H9)4 and cerium nitrate hexahydrate Ce(NO3)3.6H2O as precursors and ethylacetoacetate(EAcAc) as a chelating agent under atmosphere. CeSZ films were deposited on AISI 304 stainless steel using the prepared polymeric sol by dipcoating and the coating characteristics were investigated by XRD, ellipsometry, scratch test and SEM. The CeSZ film began to crystallize from amorphous to tetragonal phase at 40$0^{\circ}C$ and it was not converted into monoclinic phase up to 100$0^{\circ}C$ by the addition of 16mol% CeO2 as a stabilizer which could suppress phase transformation of zirconia. The CeSZ films were prepared by varying the EAcAc contents and the cncentration of CeSZ sol and measured the thickness and refractive index. From these results, it was found that the EAcAc contents and concentration of CeSZ coating sol evidently affect the densification of CeSZ film. The CeSZ film coated with 0.4M CeSZ sol and heat-treated at $600^{\circ}C$ for 10min had thickness of 50nm and 17% porosity. The CeSZ film on 304 stainless steel effectively acted as a protective layer against oxidation up to 80$0^{\circ}C$ and had superior corrosion resistance in 25% H2SO4 solution for 4.5 hrs.

  • PDF

Characteristics of Films Formed on AZ31B Magnesium Alloy by Chemical Oxidation Process in Potassium Permanganate Solution (과망간산칼륨 용액에서 화학적으로 형성된 AZ31B 마그네슘 합금의 피막 특성평가)

  • Kim, Min-Jeong;Kim, Hyoung-Chan;Yoon, Seog-Young;Jung, Uoo-Chang
    • Journal of the Korean institute of surface engineering
    • /
    • v.44 no.2
    • /
    • pp.44-49
    • /
    • 2011
  • The films formed on AZ31B magnesium alloy were prepared from alkaline solution composed of potassium permanganate and sodium hydroxide. The immersion tests were carried out at the different concentration of sodium hydroxide and pre-treatment method in 5 minute. The morphology and the phase composition of the film were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The corrosion behavior of the film in 5.0% NaCl solution was evaluated using potentiodyanmic polarization. Open circuit potential in developing film was examined with time. The thin and transparent film was mainly composed of MgO and $Mg(OH)_2$. The film with the best corrosion resistance was obtained at $70^{\circ}C$ bath temperature, 1.6 M concentration of sodium hydroxide and chemical pre-treatment.

A Study on Oxidation Behavior and Cytotoxicity Test of Ti-10Ta-10Nb Alloy (생체용 타이타늄 합금의 산화거동 및 세포독성에 관한 연구)

  • Cho, Hong-Kyu;Lee, Doh-Jae;Lee, Kwang-Min;Lee, Kyung-Ku
    • Journal of Technologic Dentistry
    • /
    • v.26 no.1
    • /
    • pp.97-104
    • /
    • 2004
  • A new Ti-10Ta-10Nb alloy has designed and examined some possibility of forming more passive oxide film by oxidation treatment which is closely related to corrosion resistance and biocompatibility. Ti-6Al-4V and Ti-10Ta-10Nb alloys were prepared by consumable vacuum arc melting and homogenized at 1050$^{\circ}C$ for 24hours. Alloy specimens were oxidized at the temperature range of 400 to 750$^{\circ}C$ for 30minutes, and the oxide films on Ti alloys were analysed by optical microscope, SEM, XPS and TGA. Cytotoxicity test was performed in MTT assay treated L929 fibroblast cell culture by indirect method. It is found out that the oxide film on Ti-10Ta-10Nb alloy is denser and thinner compared to Ti-6Al-4V alloy. The weight gain during the oxidation was increased rapidly at the temperature above 650$^{\circ}C$ for Ti-6Al-4V alloy and above 700$^{\circ}C$ for Ti-10Ta-10Nb alloy respectively. It was analysed that the passive film of the Ti alloys consisted of TiO2 through X-ray photoelectron spectroscopy (XPS) analysis. It is found out by cytotoxicity test that moderate oxidation treatment lowers cell toxicity, and Ti-10Ta-10Nb alloy showed better result compared to Ti-6Al-4V alloy.

  • PDF

The Process of Anode Oxidation on $Ta_2O_5$ by Electrolyte of Ammonium Tartrate (Ammonium Tartrate를 전해질로 사용한 $Ta_2O_5$의 음극 산화 공정)

  • Hur Chang-Wu
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.10 no.6
    • /
    • pp.1088-1094
    • /
    • 2006
  • In this paper, we establish a mode oxidation process for formation of $Ta_2O_5$ insulator film. The voltage drop in the electrolyte is affected not in voltage change but in current change. If the voltage drop in the electrolyte is same with cathode oxidation voltage, the current changes logarithmically in proportion to the voltage drop in interface of Ta2O5/electrolyte. As a result of the measurement on the electrical property of $Ta_2O_5$ insulator film, when the thickness of the insulator film is $1500\AA$, the breakdown voltage is 350volts Ind dielectric constant is 29.

Low-Temperature Growth of N-doped SiO2 Layer Using Inductively-Coupled Plasma Oxidation and Its Effect on the Characteristics of Thin Film Transistors (플라즈마 산화방법을 이용한 질소가 첨가된 실리콘 산화막의 제조와 산화막 내의 질소가 박막트랜지스터의 특성에 미치는 영향)

  • Kim, Bo-Hyun;Lee, Seung-Ryul;Ahn, Kyung-Min;Kang, Seung-Mo;Yang, Yong-Ho;Ahn, Byung-Tae
    • Korean Journal of Materials Research
    • /
    • v.19 no.1
    • /
    • pp.37-43
    • /
    • 2009
  • Silicon dioxide as gate dielectrics was grown at $400^{\circ}C$ on a polycrystalline Si substrate by inductively coupled plasma oxidation using a mixture of $O_2$ and $N_2O$ to improve the performance of polycrystalline Si thin film transistors. In conventional high-temperature $N_2O$ annealing, nitrogen can be supplied to the $Si/SiO_2$ interface because a NO molecule can diffuse through the oxide. However, it was found that nitrogen cannot be supplied to the Si/$SiO_2$ interface by plasma oxidation as the $N_2O$ molecule is broken in the plasma and because a dense Si-N bond is formed at the $SiO_2$ surface, preventing further diffusion of nitrogen into the oxide. Nitrogen was added to the $Si/SiO_2$ interface by the plasma oxidation of mixtures of $O_2/N_2O$ gas, leading to an enhancement of the field effect mobility of polycrystalline Si TFTs due to the reduction in the number of trap densities at the interface and at the Si grain boundaries due to nitrogen passivation.