• 제목/요약/키워드: Oxidation-film

검색결과 778건 처리시간 0.02초

SnO2 Hollow Hemisphere Array for Methane Gas Sensing

  • Hieu, Nguyen Minh;Vuong, Nguyen Minh;Kim, Dojin;Choi, Byung Il;Kim, Myungbae
    • 한국재료학회지
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    • 제24권9호
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    • pp.451-457
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    • 2014
  • We developed a high-performance methane gas sensor based on a $SnO_2$ hollow hemisphere array structure of nano-thickness. The sensor structures were fabricated by sputter deposition of Sn metal over an array of polystyrene spheres distributed on a planar substrate, followed by an oxidation process to oxidize the Sn to $SnO_2$ while removing the polystyrene template cores. The surface morphology and structural properties were examined by scanning electron microscopy. An optimization of the structure for methane sensing was also carried out. The effects of oxidation temperature, film thickness, gold doping, and morphology were examined. An impressive response of ~220% was observed for a 200 ppm concentration of $CH_4$ gas at an operating temperature of $400^{\circ}C$ for a sample fabricated by 30 sec sputtering of Sn, and oxidation at $800^{\circ}C$ for 2 hr in air. This high response was enabled by the open structure of the hemisphere array thin films.

유기초박막의 산화-환원 반응에 관한 연구 (A Study on the Oxidation-reduction Reaction of Organic Thin Films)

  • 박근호;송주영
    • 한국전기전자재료학회논문지
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    • 제19권8호
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    • pp.724-731
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    • 2006
  • We investigated the electrochemical properties for Langmuir-Blodgett (LB) films mixed with 4-octyl-4'-(5-carboxylpentamethyleneoxy)azobenzene (denoted as 8A5H) and phospholipid(L-a-dimyristoylphosphatidylcholine, denoted as DMPC and L-a-dilauroylphosphayidylcholine, denoted as DLPC). The LB films of 8A5H, 8A5H-DMPC and 8A5H-DLPC mixture monolayers were deposited by using the LB method on the indium tin oxide(ITO) glass. The electrochemical properties measured by using cyclic voltammetry with a three-electrode system, an Ag/AgCl reference electrode, a platinum wire counter electrode and LB film-coated ITO working electrode at various concentrations(0.1, 0.5, and 1.0 mol/L) of $NaClO_4$ solution. A measuring range was reduced from initial potential to -1350 mV, continuously oxidized to 1650 mV and measured to the initial point. The scan rates were 50, 100, 150 and 200 mV/s, respectively. As a result, LB films of 8A5H and 8A5H-DLPC mixture monolayers appeared irreversible process caused by only the oxidation current from the cyclic voltammogram and LB films of 8A5H-DMPC monolayer mixture was found to be caused by a reversible oxidation-reduction process.

Corrosion Behavior and Oxide Film Formation of T91 Steel under Different Water Chemistry Operation Conditions

  • Zhang, D.Q.;Shi, C.;Li, J.;Gao, L.X.;Lee, K.Y.
    • Corrosion Science and Technology
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    • 제16권1호
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    • pp.8-14
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    • 2017
  • The corrosion behavior of a ferritic/martensitic steel T91 exposed to an aqueous solution containing chloride and sulfate ions is investigated depending on the stimulated all-volatile treatment (AVT) and under oxygenated treatment (OT) conditions. The corrosion of T91 steel under OT condition is severe, while the corrosion under AVT condition is not. The co-existence of chloride and sulfate ions has antagonistic effect on the corrosion of T91 steel in both AVT and OT conditions. Unlike to corrosion resistance in the aqueous solution, OT pretreatment provides T91 steel lower oxidation-resistance than VAT pretreatment. From scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM/EDS) and X-ray diffraction (XRD) analysis, the lower corrosion resistance in the aqueous solution by VAT conditions possibly is due to the formation of pits. In addition, the lower oxidation resistance of T91 steel pretreated by OT conditions is explained as follows: the cracks formed during the immersion under OT conditions accelerated peeling-off rate of the oxide film.

급속 건식 열산화 방법에 의한 초박막 SiO2의 성장과 특성 (Growth and Properties of Ultra-thin SiO2 Films by Rapid Thermal Dry Oxidation Technique)

  • 정상현;김광호;김용성;이수홍
    • 한국전기전자재료학회논문지
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    • 제17권1호
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    • pp.21-26
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    • 2004
  • Ultra-thin silicon dioxides were grown on p-type(100) oriented silicon employing rapid thermal dry oxidation technique at the temperature range of 850∼1050 $^{\circ}C$. The growth rate of the ultra-thin film was fitted well with tile model which was proposed recently by da Silva & Stosic. The capacitance-voltage, current-voltage, characteristics were used to study the electrical properties of these thin oxides. The minimum interface state density around the midgap of the MOS capacitor having oxide thickness of 111.6 $\AA$ derived from the C-V curve was ranged from 6 to 10${\times}$10$^{10}$ /$\textrm{cm}^2$eV.

플라즈마 전해 산화 표면처리 된 Al6061 소재의 광학적 특성연구 (A Study of Optical properties of Al6061 By plasma electrolytic oxidation surface treatment)

  • 유재인;윤주식;윤재곤;최순돈;유재용;장호경;김기홍
    • 한국레이저가공학회지
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    • 제17권2호
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    • pp.1-4
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    • 2014
  • With the PEO(Plasma electrolytic oxidation) surface treatment, the oxide film of aluminum alloy is growing in a short time. The reflectance measurement to find the oxygen atoms in the oxide could be investigated. In order to form a thicker oxide film, the PEO surface treatment should be uniformly controlled in processing time.

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ISFET용 SiO2 감응박막에 관한 연구 (A Study on the SiO2Sensing Layer Used in ISFET)

  • 최두진;임공진;정형진;김창은
    • 한국세라믹학회지
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    • 제27권1호
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    • pp.79-85
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    • 1990
  • A study on the oxidation of SiO2 sensing layer was done at 950, 1000, 105$0^{\circ}C$ under dry O2 atmosphere. The rate determining step around the oxide layer thickness, 1000$\AA$ was different with the oxidation temperature, as follows ; ⅰ) linear growth at 95$0^{\circ}C$ and ⅱ) parabolic growth at 100$0^{\circ}C$ and 105$0^{\circ}C$. The flatness of SiO2 film was observed within $\pm$1% and surface state charge density was reduced by annealing in N2 atmosphere. Finally, pH sensitivity of SiO2 film, in the range of pH 3-9, was 20mV/pH.

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Electrochemical Study of Poly(aniline N-alkylsulfonate)s

  • Kim, Eunkyoung;Rhee, Suh Bong
    • 분석과학
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    • 제8권4호
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    • pp.631-636
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    • 1995
  • Electrochemical properties of self-dopable poly(aniline N-butylsulfonate)s in various acidic medium were investigated by spectroelectrochemical techniques. Cyclic voltammetric study showed more than two reversible process of one electron transfer, the potential and peak intensity of which were dependent on the acid concentration and dopant ion. Spectroscopic study at different oxidation level indicated that the electrochromic switching of the poly(aniline N-alkylsulfonate)s film involves structural changes from benzenoid ring to quinoid ring. Spectrocyclic voltammetry together with impedance spectra of the PANBUS film in 0.1 M $LiClO_4$ solution of acetonitrile containing 0.46 M of perchloric acid showed two types of highly conductive states at the intermediate oxidation levels, which can be related to the metallic polaron states doped by two different process.

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알루미늄 7075 합금의 PEO 처리 기술 및 첨가제 영향 분석 (Study of PEO Process for Al 7075 and Effect of additives)

  • 진연호;양재교
    • 한국표면공학회지
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    • 제53권2호
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    • pp.53-58
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    • 2020
  • In this study, we developed plasma electrolytic oxidation (PEO) process for aluminum 7075 alloy to improve the corrosion and mechanical properties. The electrolyte consists of potassium hydroxide and sodium silicate. Additionally, sodium stannate was added into the electrolyte to investigate its effect on PEO film formation. Titanium was used as the counter electrode. Plasma generation voltage reduced from 300V to 150 V by adding 4 g/L of sodium stannate. The thin oxide films were observed by SEM(Scanning Electron Microscopy)/EDS (Energy Dispersive Spectroscopy) for quantitative and qualitative analyses. XRD (X-ray diffraction) and XRF (X-ray Fluorescences) analyses were also carried out to identify oxide layer on aluminum 7075 surface. Vicker's hardness test was performed on the PEO-treated aluminum 7075 surface.

알루미늄 합금의 플라즈마전해산화 처리 기술 (Plasma Electrolytic Oxidation Treatment of Al Alloys)

  • 문성모;김주석
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.115.2-115.2
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    • 2016
  • Al alloys are being used widely for automobile, aerospace and mechanical components because of their high strength ratio to weight. However, still they suffer from abrasion or corrosion owing to insufficient resistances to friction or mechanical impact and chemical attack. Plasma electrolytic oxidation (PEO) method is one of the promising surface treatment methods for Al alloys which can render better hardness than aluminum anodic oxide (AAO) films prepared by conventional anodizing method in acidic solutions. In this presentation, some basic nature of PEO film formation and growth process on Al alloys will be presented based on the experimental results obtained and discussed in view of dielectric breakdown and reformation and the role of various anions in film breakdown and reformation of PEO films.

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Improved Stability of Atomic Layer Deposited ZnO Thin Film Transistor by Intercycle Oxidation

  • Oh, Him-Chan;KoPark, Sang-Hee;Ryu, Min-Ki;Hwang, Chi-Sun;Yang, Shin-Hyuk;Kwon, Oh-Sang
    • ETRI Journal
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    • 제34권2호
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    • pp.280-283
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    • 2012
  • By inserting $H_2O$ treatment steps during atomic layer deposition of a ZnO layer, the turn-on voltage shift from negative bias stress (NBS) under illumination was reduced considerably compared to that of a device that has a continuously grown ZnO layer without any treatment steps. Meanwhile, treatment steps without introducing reactive gases, and simply staying under a low working pressure, aggravated the instability under illuminated NBS due to an increase of oxygen vacancy concentration in the ZnO layer. From the experiment results, additional oxidation of the ZnO channel layer is proven to be effective in improving the stability against illuminated NBS.