• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• Bulletin of the Korean Chemical Society
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• v.20 no.12
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• pp.1457-1463
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• 1999

Structure and their redox property of the vanadium oxides prepared by decomposing NH₄VO₃ at various temperatures were studied by XRD, SEM, XPS, and temperature programmed reduction/temperature programmed oxidation (TPR/TPO) experiment. All TPR profiles have two sharp peaks in the temperature range 650-750℃, and the area ratio of the two sharp peaks changed from sample to sample. There were three redox steps in TPR/TPO profiles. The oxidation proceeded in the reverse order of the reduction process, and both the reactions proceeded via quite a stable intermediates. The changes of the morphological factor $(I_{(101)}/I_{(010)})$, the ratio of $O_{1S}$ peak area (O$_{1S}$( α)/O$_{1S}$( β)) in the XPS results, and the ratio of hydrogen consumption in TPR profiles with various vanadium oxides showed the distinct relationship between the structural property and their redox property of vanadium oxides. The change of the specific yield of phthalic anhydride with various vanadium oxides showed a very similar trend to those of the peak area ratio in TPR profiles, which meant that the first reduction step related to the partial oxidation of o-xylene on the vanadium oxide catalyst.

• Journal of the Korean Chemical Society
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• v.46 no.4
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• pp.353-363
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• 2002

In this study, characteristics of the problem solving process of the balancing redox equations was ana-lyzed by mental capacity and problem solving methods, and the pertinent teaching and learning guidance for oxidation-reduction unit was suggested. Participants were 79 senior high school students and 57 science high school students. Tests were conducted to measure the mental capacity, the understanding of the oxidation-reduction concepts and the com-pletion of the balancing redox equations. The framework was made to find the patterns of failure and success. As the analysis of the influence on the performance of mental capacity,understanding of the oxidation-reduction concepts, and problem solving methods, students who had lower understanding of oxidation-reduction concepts selected the trial and error method, and their performance were influenced by mental capacity. The students that had higher understanding of the oxidation-reduction concepts had good performance by using oxidation number method regardless of their mental capacity. As the results of analysis for the patterns, the success patterns of solving the problems, those of mostly the sci-ence high school students, were the cases of using oxidation number method well and lessening problem solving steps. The patterns of failure in solving problems by using trial and error method showed that students had mistakes in cal-culating, errors in making unknown equations, no consideration for all variables, or stopped solving the complicated problems. The patterns of failure in solving problems by using oxidation number method showed that many students had wrong oxidation number or no consideration for mass and charge balance.

• Journal of Korean Society for Atmospheric Environment
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• v.15 no.4
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• pp.457-461
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• 1999

Recently, increasing usage of diesel vehicle, many countries try to reduce the pollutant materials by emission regulation standard. Particularly, in our country, the supplement ratio of diesel vehicle is high, and air pollution by particulate matter(PM) is very serious. So, in theoretical study wer analyzed the formation principle of gaseous emission and PM, the characteristics of CVS-75 mode. In experimental study, we tested exhaust gas reduction of emission and PM, the characteristics of CVS-75 mode. In experimental study, we tested exhaust gas reduction of disel oxidation catalyst(DOC) by CVS-75 mode in light duty diesel vehicle. In case of an automobiletest with the 2,956cc diesel engine which DOC was equipped, CVS-75 mode which is similar to driving conditions on the road was chosen as the restrictive mode of light duty diesel automobile in our country. According to the Pt, the reduction rate of exhaust emission was estimated with using 0.1% high sulfur fuel and 0.05% low sulfur fuel.

• Journal of Korean Society for Atmospheric Environment
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• v.18 no.5
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• pp.411-417
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• 2002

The purpose of this study is to evaluate the emission reduction characteristics depending on the formation of the catalyst which influences the development of the diesel oxidation catalyst (DOC) suitable for small-sized diesel engines. We also attempted to suggest the feasibility of it as an after-treatment device. The reduction efficiency of DOC for CO and HC was proportional to the contents of precious metals, and the particulate matter (PM) has been reduced as much as 53∼59%. The reduction rate of soluble organic fraction (SOF) by DOC attachment revealed 100%. The composition of sulfate in PM increased from 3%, 7∼11% by installation of DOC. It is described that increase of sulfate contributed to the production of PM. This result also showed that the SOF and sulfate have trade-off relationship.

• The Korean Journal of Ecology
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• v.7 no.2
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• pp.85-90
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• 1983

There was a decrease in nitrate reductase activity (NRA) measured in vivo in rice roots (Oryza sativa cv. Tongil) grown in anaerobic culture solution. But it was reversed by addition of malonate to the in vivo nitrate reduction assay medium. Malonate increased the in vivo NRA during 2-5 hours incubation and decreased it in longer incubation hours. In vivo NRA was stimulated by addition of NaHCO3 to the assay medium, but not by Na2CO3. The stimulation of NRA by NaHCO3 was not observed in shoot removed rice roots. It is suggested that CO2 from NaHCO3 is carboxylated by phosphoenol pyruvate carboxylase, results in increasing the malate contents in the roots, and stimulates the in vivo NRA. NADH needed in nitrate reduction is supported by malate oxidation. In rice roots, it seems probable that malate oxidation in the mitochondria is more important to nitrate reduction than malae oxidation in cytoplasm.

• Applied Science and Convergence Technology
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• v.27 no.2
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• pp.35-37
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• 2018

The redox reaction on graphene nanoribbon (GNR) field effect transistors(FET) has been studied. In detail, upon employing an electrolyte gating, we verified electron transport performance modulation of GNR FET by monitoring conductance variation under oxidation and reduction processes. The conductance enhancement of GNR via removal of PMMA residue on graphene surface during redox cycles was also observed.

• Resources Recycling
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• v.29 no.5
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• pp.64-72
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• 2020

When the multi-stage combustion process is applied to the cement kiln to reduce nitrogen oxide emissions in the cement industry, oxidation/reduction section that can increase combustion efficiency by reducing NO_x to NO and completely burning unburned materials is essential In this study, when applied the oxidation/reduction system of the cement kiln preheater and calciner, the optimal oxidation/reduction calcination crisis that can secure the quality stability of the final product, cement clinker, was to be observed macroscopically, and the mass change of raw materials according to the burning conditions, decarbonation rate, and calcination rate were investigated. The results showed that the thermal decomposition of raw materials tends to be promoted in the oxidation condition rather than in the reduction condition, and that the thermal decomposition of limestone, which has a relatively high CaO content, is carried out later than that of cement raw meal, which is thought to be caused by the CO₂ fractionation in the kiln. The thermal decomposition properties of raw materials according to oxidation/reducing burning condition showed a relatively large difference in temperature range lower than normal limestone themal decomposition temperature, which is thought to be expected to improve the thermal efficiency of raw materials according to the formation of oxidation condition in the section 750℃ of burning temperature. However, for this study, lab scale. Because there is a difference from the field process as a scale study, it is deemed necessary to verify the actual test results of the pilot scale.

• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.1-12
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• 2006

This work reviews the effects of catalyst formulation and exhaust gas composition on soot oxidation in CDPF (Catalytic Diesel Particulate Filter). DOC's (Diesel Oxidation Catalysts) have been loaded with Pt catalyst (Pt/$Al_{2}O_3$) for reduction of HC and CO. Recent CDPF's are coated with the Pt catalyst as well as additives like Mo, V, Ce, Co, Fe, La, Au, or Zr for the promotion of soot oxidation. Alkali (K, Na, Cs, Li) doping of metal catalyst tends to increase the activity of the catalysts in soot combustion. Effects of coexistence components are very important in the catalytic reaction of the soot. The soot oxidation rate of a few catalysts are improved by water vapor and NOx in the ambient. There are only a few reports available on the mechanism of the PM (particulate matter) oxidation on the catalysts. The mechanism of PM oxidation in the catalytic systems that meet new emission regulations of diesel engines has yet to be investigated. Future research will focus on catalysts that can not only oxidize PM at low temperature, but also reduce NOx, continuously self-cleaning diesel particulate filters, and selective catalysts for NOx reduction.

• Clean Technology
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• v.6 no.1
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• pp.79-84
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• 2000

In this study, to reduce the consumption of chemicals in cleaning processes, Si-wafers contaiminated with metallic impurities were cleaned with electrolyzed water(EW), which was generated by the electrolysis of a diluted electrolyte solution or ultra pure water(UPW). Electrolyzed water could be controlled for obtaining wide ranges of pH and ORP(oxidation-reduction potential). The pH and oxidation-reduction potential of anode water and cathode water were measured to be 4.7 and +1000mV, and 6.3 and -550mV, respectively. To analyze the amount of metallic impurities on Si-wafer surfaces, ICP-MS was introduced. Anode water was effective for Cu removal, while cathode water was more effective for Fe removal.