• Transactions on Electrical and Electronic Materials
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• 제5권3호
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• pp.104-108
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• 2004

Problems of overlap errors and side-lobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks(attPSM) have been serious. Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 학술대회지
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• pp.784-786
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• 2004

Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.159-162
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• 2004

Problems of overlap errors and sidelobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks(attPSM) have been serious. Overlap errors and sidelobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the sidelobes and to get additional pattern fidelity at the same time.

• 드라이브 ㆍ 컨트롤
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• 제13권1호
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• pp.34-42
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• 2016

This study studied how the clearance, overlap and mismatch errors of spool-sleeve affect the static pressure characteristics of a servo valve. A computer simulation model was established as a direct acting servo valve and a series of simulations was conducted for various values of clearance, overlap and mismatch errors. Pressure gain decreased as the clearance increased. The overlap also affects the pressure gain and was similar to the effect of clearance. Asymmetry of the pressure plot got worse and worse as the mismatch error increased.

• 한국대기환경학회지
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• 제25권5호
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• pp.450-458
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• 2009

The range-dependent overlap factor of a lidar system can be determined experimentally if a Raman backscatter signal by molecule is measured in addition to the usually observed elastic backscatter signal, which consists of a molecular component and a particle component. The direct determination of the overlap profile is presented and applied to a lidar measurement according to variation of telescope field-of-view and distance between telescope and transmitting laser. The retrieval of extinction coefficient by Raman method can generate high errors for heights below planetary boundary layer if the overlap effect is ignored. The overlap correction method presented here has been successfully applied to experimental data obtained in Gwangju, Korea.

• 자원환경지질
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• 제41권2호
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• pp.219-223
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• 2008

해양에서 관측되는 해양지구물리 탐사자료에는 위치오차, 기기오차, 관측오차, 해상 상태 등 다양한 원인에 기인하는 오차가 포함되어 있다. 이에 의해 한 기관에서 해양지구물리 탐사 자료를 취득할 때나 여러 기관에서 취득된 해양지구물리 탐사자료를 취합할 때 많은 교차점오차가 발생하고, 이러한 교차점오차는 부적절한 해석을 야기하는 인위적인 이 상대를 만든다. 교차점오차를 줄이기 위한 다양한 방법들이 제시되었지만, 이들 대부분의 방법들은 교차점을 찾기 위해 각각의 점자료(point data) 혹은 선분자료(segment data)를 모두 비교함으로써, 불필요하게 많은 계산시간을 요구하게 된다. 따라서 본 연구에서는 중복구역나눔 방법을 도입하여 빠르게 교차점을 찾고, 가중치선형내삽 방법을 이용하여 교차점오차를 보정하는 포트란(FORTRAN) 프로그램 (FastXcorr)을 개발하였다.

• 한국생물정보학회:학술대회논문집
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• 한국생물정보시스템생물학회 2001년도 제2회 생물정보학 국제심포지엄
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• pp.11-35
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• 2001

For the last twenty years fragment assembly in DNA sequencing followed the "overlap - layout - consensus"paradigm that is used in all currently available assembly tools. Although this approach proved to be useful in assembling clones, it faces difficulties in genomic shotgun assembly: the existing algorithms make assembly errors and are often unable to resolve repeats even in prokaryotic genomes. Biologists are well-aware of these errors and are forced to carry additional experiments to verify the assembled contigs. We abandon the classical “overlap - layout - consensus”approach in favor of a new Eulerian Superpath approach that, for the first time, resolves the problem of repeats in fragment assembly. Our main result is the reduction of the fragment assembly to a variation of the classical Eulerian path problem. This reduction opens new possibilities for repeat resolution and allows one to generate error-free solutions of the large-scale fragment assemble problems. The major improvement of EULER over other algorithms is that it resolves all repeats except long perfect repeats that are theoretically impossible to resolve without additional experiments.

• 한국산학기술학회논문지
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• 제4권1호
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• pp.22-26
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• 2003

Attenuated PSM lithography 공정에서 overlay margin 확보 및 side-lobe 제거를 위해 기존의 Cr shield 방식의 단점인 복잡한 mask 제작공정과 구조를 단순화하기 위한 방법으로 scattering bar 방식을 제안하였다. Scattering bar는 Cr 보조패턴처럼 완전히 빛을 차단하는 것이 아니라 약간의 빛을 투과시켜 보강된 intensity를 상쇄하므로 side-lobe를 억제하는 방법으로 metal pattern을 생성할 때 scattering bar도 동시에 만들어 mask제작에 필요한 공정횟수를 줄이고 mask구조 역시 단순하게 한다 그리고 동시에 DOF(depth of focus)를 향상시킨다. Background clear pattern의 경우에 발생하는 side-lobe도 scattering bar를 이용하여 효율적으로 제거되었다.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2004년도 한국우주과학회보 제13권2호
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• pp.278-280
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• 2004

GPS Navigation Solutions are used for operational orbit determination for the KOMPSAT-1 spacecraft. GPS point position data are definitely affected by systematic errors as well as noise. Indeed, the systematic error effects tend to be longer term since the GPS spacecrafts have periods of 12 hours. And then, the overlap method of determining orbit accuracy is always optimistic because of the presence of systematic errors with longer term effects. In this paper, we investigated the measurement noise and the system error for the KOMPSAT-l GPS Navigation Solutions. To assess orbit accuracy with this type of data, we use longer data arcs such as 5-7 days instead of 30 hour data arc. For this assessment, we should require much more attention to drag and solar radiation drag parameters or even general acceleration parameters in order to assess orbit accuracy with longer data arcs. Thus, the effects of the consideration of the drag, solar radiation drag, and general acceleration parameters were also investigated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.400-407
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• 1995

The straightness property is one of fundamental geometric tolerances to be strictly controlled for guideways of machine tools and measuring machines. The staightness measurement for long guideways was usually difficult to perform, and it needed additional equipments or special treatment with limited application. In this paper, a new approach is proposed using the profile matching technique for the long guideways, which can be applicable to most of straghtness measurements. An edge of relativelly sthort length is located along a divided section of a long guideway, and the local straightness measurement is performed. The edge is then moved to the next section with several positions overlap. After thelocal straightness profile is measured for every section along the long guideway with overlap, the global straightness profile is constructed using the profile matching technique based on theleast squares method. The proposed techinique is numerically tested for two cases of known global straightness profile arc profile and irregular profile and those profiles with and without random error intervention, respectively. When norandom errors are involved, the constructed golval profile is identical to the original profile. When the random errors are involved, the effect of the number of overlap points are investigated, and it is also found that the difference between the difference between the constructed and original profiles is very close to the limit of random uncertainty with juist few overlap points. The developed technique has been practically applied to a vertical milling machine of moving table type, and showed good performance. Thus the accuracy and efficiency of the proposed method are demonstrated, and shows great potential for variety of application for most of straightness measuirement cases using straight edges, laser optics, and angular measurement equipments.