Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
Proceedings of the Korean Vacuum Society Conference
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2012.02a
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pp.433-433
/
2012
As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.
Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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v.4
no.4
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pp.393-400
/
2006
In design of a deep geological repository for the high level wastes, it is very important that the temperature of the bentonite block should not be over $100^{\circ}C$ to maintain the integrity of the bentonite buffer block from the decay heat. In this study, for the layout of the repository to meet the requirement, the analysis of the disposal tunnel and disposal pit spacing was carried out. To do this, based on the reference repository concept, several cases of cooling times and disposal tunnel and disposal pit spacing were compared. The thermal stabilities of the disposal systems were analyzed in terms of the cooling time and spacing. The results showed that it was more desirable to determine the layout of the repository in terms of disposal pit spacing than the disposal tunnel spacing. The results of these analyses can be used in the deep geological repository design. The detailed analyses with the exact site characteristics data will reduce the uncertainty of the results.
The purpose of this study is to investigate the Expected factors on the quality of life and its degree of elders in urban regions. Survey was conducted among 300 elders age of over 65, who attended four schools for elders at Busan metropolitan city in the month of October 2 to October 25, 2012 and data were collected 245 samples. Data analysed by using correlation analysis and multi-regression analysis to recognize the degree of the quality of life of elders and the result showed the expected factors on the quality of life and its major were as follows: First, average score of the quality of life of urban elders was 3.17 (5 scores of scale) and it indicated the medium result; Second, between sub-areas of the quality of life of subjects, significant positive relation was shown among every area excluding depression area;Third, the factors mostly influencing on the quality of life are mental health, social relation, and physical relation in order and it showed a significant level (p<0.001). The study revealed the symptoms of depression which reltaed to mental health, it indicated as a major factor to the quality of life, this study suggest there is requirement of nursing intervention and the application of health program to reduce the depression.
Park, Han-Earl;Roh, Kyoung Min;Yoo, Sung-Moon;Choi, Byung-Kyu;Chung, Jong-Kyun;Cho, Jungho
Journal of Positioning, Navigation, and Timing
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v.3
no.4
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pp.131-141
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2014
Over the last decade, the Global Navigation Satellite System (GNSS) has been increasingly utilized as a meteorological research tool. The Korea Astronomy and Space Science Institute (KASI) has also been developing a near real-time GNSS precipitable water vapor (PWV) information management system that can produce a precise PWV for the Korean Peninsula region using GNSS data processing and meteorological measurements. The goal of this paper is to evaluate whether the precise point positioning (PPP) strategy will be used as the new data processing strategy of the GNSS-PWV information management system. For this purpose, quality assessment has been performed by means of a comparative analysis of the troposphere zenith total delay (ZTD) estimates from KASI PPP solutions (KPS), KASI network solutions (KNS), and International GNSS Service (IGS) final troposphere products (IFTP) for ten permanent GNSS stations in the Korean Peninsula. The assessment consists largely of two steps: First, the troposphere ZTD of the KNS are compared to those of the IFTP for only DAEJ and SUWN, in which the IFTP are used as the reference. Second, the KPS are compared to the KNS for all ten GNSS stations. In this step, the KNS are used as a new reference rather than the IFTP, because it was proved in the previous step that the KNS can be a suitable reference. As a result, it was found that the ZTD values from both the KPS and the KNS followed the same overall pattern, with an RMS of 5.36 mm. When the average RMS was converted into an error of GNSS-PWV by considering the typical ratio of zenith wet delay and PWV, the GNSS-PWV error met the requirement for PWV accuracy in this application. Therefore, the PPP strategy can be used as a new data processing strategy in the near real-time GNSS-PWV information management system.
The Journal of The Korea Institute of Intelligent Transport Systems
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v.8
no.5
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pp.57-70
/
2009
According to the change of the traffic conditions, the requirement of controlling the separated left(or right) turn, the median bus lane and bicycle signal is increasing. However, the traffic signal controller standard based on the four-set lights restricts to control the three-set lights which control the separated direction and kind of traffics. This study suggests the method to control the three-set lights signal by improving the hardware and software for the traffic signal controller which is operated currently in the traffic scene. The 6 output ports of Load Signal Unit(LSU) which is consisted of Pedestrian Red, Pedestrian Green, Red, Yellow, Arrow and Green signal reconstitute 2 rows of the Red, Yellow, Green for three-set lights while the Signal Map data's code values which control the signal step of an individual Ring and LSU are established to adjust the LSU's output ports(R1 Y1 G1 R2 Y2 G2) of the three-set lights. The effect of using the separated through/left turn and the median lane bus signal of three-set lights is analyzed from a Mangwoo intersection in Seoul. The results of analysis show that the delay time of the east-west direction where the median bus lane is operated is especially improved with over 70 sec/veh.
We have shown that carboxy-peptidase destroys the biological activity of angiotensin octa-and deca-peptides. Since Proline occurs as the seventh amino acid from the amino end of the chain and since carboxypeptidase does not cleave proline from a peptid chain, it is evident that the heptapeptid H.asp-arg-val-tyr-ileu-his-pro.OH is formed by this hydrolysis. This peptide must then be biologically inactive. In order to determine whether the phenyl group of the C-terminal amino acid was the necessary requirement for biological activity of the octapeptide, $ala^8$ angiotensin octapeptide(amino acids of peptides numbered from amino end) was synthesized. For this synthesis the four dipeptides were prepared: carbobenzoxy-L-prolyl-L-alanine-P-nitrobenzyl-ester, m.p. $134-135^{\circ}C,$ carbobenzoxy-L-isoleucyl-imidazole benzyl-L-histidine methyl ester, m.p. $114-116^{\circ}C,$ carbobenzoxy-L-valyl-L-tyrosine hydrazide and carbobenzoxy B-benzyl-L-aspartyl-nitro-L-arginine. The first three dipeptides were obtained as crystalline compounds. Imidazole-benzyl-L-histidine was used in the hope that it would block the histidine imidazole against side reactions in steps subsequent to the formation of the C-terminal tetrapeptide. Also, it was through that the imidazole benzylated peptides would be easier to crystallize. This, however, was not the case. The tetrapeptide, carbobenzoxy-L-isoleucyl-L-im, benzyl-histidyl, L-prolyl-L-alanine-nitrobenzyl ester was not obtained in a crystalline form. Neither could the mono-or dihydrobromide of the tetrapeptide free base be induced to crystallize. Carbobenzoxy-L-valyl-L-tyrosine azide was condensed with the tetrapeptide free base to yield the protected hexapeptide; carbobenzoxy-L-valyl-L-tyrosyl-L-isoleucyl-L-im, benzyl, histidyl-L-Prolyl-L-alanine-nitrobenzyl ester. Upon removal of the carbobenzoxy group with hydrogen bromide in acetic acid an amorphous free base hexapeptide ester was obtained. This compound gave the correct C, H, N analysis and contained the six amino acids in the correct ratio. The octapeptide was obtained by condensing this hexapeptide with carbobenzoxy-B-benzyl-L-aspartyl-nitro, L-arginine using the mixed anhydride method of condensation. This amorphous product was proven to be homogenous by chromatography in two solvent systems and upon hydrolysis yielded the eight amino acids in correct ratio. The five protecting groups were removed from the octapeptide by hydrogenolysis over palladium black catalyst. Biological assay of the free peptide indicated that it possessed less than 0.1 per cent of both pressor and oxytocic activity of the phenylalanine8 angiotensin. This suggests that the phenyl group is a point of attachment between angiotensin and its biological receptor site.
Journal of the Korean Recycled Construction Resources Institute
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v.4
no.2
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pp.90-96
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2009
The high rising building construction makes increasing the requirement of high strength concrete. Especially, the workability analysis is related with dispersion of admixture such as SF for improving strength and FA, BS for reducing construction cost and improving durability of Ultra High Strength Concrete which has over 100 MPa of compressive strength is very important. Precisely, decreases dispersion because of lumping situation of each admixture and it causes the workability of admixture is decreased. Therefore, the workability of cement paste is tested for analyze effects of pre-mixed cement for solving those problems with it to this research. The summary of the results are like below. First of all, OBS is increasing workability more than OFS. This result causes that the glassy surface of BS in the OBS is increasing workability and the absorption of admixture of FA in the OFS is decreasing workability. In the case of mixing methods, pre-mixing method is increasing workability more than normal one. This result shows that the normal mixing method is bad dispersion of binders. The other side, the pre-mixing method is good. Furthermore, depending on the mixing time, according to the increasing mixing time such as 30, 60, and 120 seconds, the dispersion of binders and workability turns better.
The Journal of Korean Institute of Communications and Information Sciences
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v.28
no.6A
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pp.341-350
/
2003
In this paper, we evaluate the performance of a moving average (MA) channel estimation filter when space-time block coding transmit diversity (STBC-TD) is applied to the wideband direct sequence code division multiple access (WCDMA) forward link. And we present the infinite impulse response (IIR) filter scheme that can reduce the required memory buffer and the channel estimation delay time. This paper also compares the performance between MA filter scheme and IIR filter scheme in various Rayleigh fading channel environments through the bit error rate (BER) and the frame error rate (FER). Extensive computer simulation results show that transmission with STBC-TD provides a significant gain in performance over no transmit diversity technique, particularly at pedestrian speeds. If STBC-TD technique is employed in the channel estimator based on MA filter, it provides considerable performance gains against Rayleigh fading and reduces the optimum filter tap number. Consequently, the channel estimation delay time and the complexity of the receiver are reduced. In addition, the channel estimator based on IIR filter has the advantages such as little memory requirement and no delay time compared to the MA scheme. However, IIR filter coefficients is very sensitive to the mobile speed change and it exerts a serious influence upon the performance. For that reason, it is important to set uP the optimum IIR filter coefficients.
A data stream is a massive unbounded sequence of data elements continuously generated at a rapid rate. Due to this reason, memory usage for data stream analysis should be confined finitely although new data elements are continuously generated in a data stream. To satisfy this requirement, data stream processing sacrifices the correctness of its analysis result by allowing some errors. The old distribution statistics are diminished by a predefined decay rate as time goes by, so that the effect of the obsolete information on the current result of clustering can be eliminated without maintaining any data element physically. This paper proposes a grid based clustering algorithm for a data stream. Given a set of initial grid cells, the dense range of a grid cell is recursively partitioned into a smaller cell based on the distribution statistics of data elements by a top down manner until the smallest cell, called a unit cell, is identified. Since only the distribution statistics of data elements are maintained by dynamically partitioned grid cells, the clusters of a data stream can be effectively found without maintaining the data elements physically. Furthermore, the memory usage of the proposed algorithm is adjusted adaptively to the size of confined memory space by flexibly resizing the size of a unit cell. As a result, the confined memory space can be fully utilized to generate the result of clustering as accurately as possible. The proposed algorithm is analyzed by a series of experiments to identify its various characteristics
Enzymatic pre-bleaching by modification of pulp fibers with xylanases is an attractive approach to reduce the consumption of toxic bleaching chemicals in the paper industry. In this study, an alkaliphilic endoxylanase gene was isolated from metagenomic DNA of a structurally stable thermophilic lignocellulose-degrading microbial consortium using amplification with conserved glycosyl hydrolase family 10 primers and subsequent genome walking. The full-length xylanase showed 78% sequence identity to an endo-${\beta}$-1,4-xylanase of Clostridium phytofermentans and was expressed in a mature form with an N-terminal His6 tag fusion in Escherichia coli. The recombinant xylanase Xyn3F was thermotolerant and alkaliphilic, working optimally at $65-70^{\circ}C$ with an optimal pH at 9-10 and retaining >80% activity at pH 9, $60^{\circ}C$ for 1 h. Xyn3F showed a $V_{max}$ of 2,327 IU/mg and $K_m$ of 3.5 mg/ml on birchwood xylan. Pre-bleaching of industrial eucalyptus pulp with no prior pH adjustment (pH 9) using Xyn3F at 50 IU/g dried pulp led to 4.5-5.1% increase in final pulp brightness and 90.4-102.4% increase in whiteness after a single-step hypochlorite bleaching over the untreated pulp, which allowed at least 20% decrease in hypochlorite consumption to achieve the same final bleaching indices. The alkaliphilic xylanase is promising for application in an environmentally friendly bleaching step of kraft and soda pulps with no requirement for pH adjustment, leading to improved economic feasibility of the process.
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