• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1286-1289
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• 2004

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene(PVDF-TrFE). The large difference of coefficient of thermal expansion(CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS(micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.778-783
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• 2003

The problem considered in this paper is about the collocation of sensor and actuator for the active control of sound and vibration. It is well-known that a point collocated sensor-actuator pair offers an unconditional stability with very high performance when it is used with a direct velocity feedback (DVFB) control, because the pair has strictly positive real (SPR) property. In order to utilize this SPR characteristics, a matched piezoelectric sensor and actuator pair is considered, but this pair suffers from the in-plane motion coupling problem with the out-of$.$plane motion due to the piezo sensor and actuator interaction. This coupling phnomenon limits the stability and performance of the matched pair with DVFB control. As a new alternative, a point sensor and piezoelectric actuator pair is also considered, which provides SPR property in all frequency range except at the first resonance in very low frequency. This non-SPR resonance could be minimized by applying a phase lag compensator.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.3
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• pp.253-263
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• 2004

The problem considered in this paper is about the collocation of sensor and actuator for the active control of sound and vibration. It is well-known that a point collocated sensor-actuator pair offers an unconditional stability with very high performance when it is used with a direct velocity feedback (DVFB) control, because the pair has strictly positive real (SPR) property. In order to utilize this SPR characteristics, a matched piezoelectric sensor and actuator pair is considered. but this pair suffers from the in-plane motion coupling problem with the out-of-plane motion due to the piezo sensor and actuator interaction. This coupling phnomenon limits the stability and performance of the matched pair with DVFBcontrol. As a new alternative, a point sensor and distributed piezoelectric actuator pair is also considered, which provides SPR property in all frequency range when the pair is implemented on a clamped-clapmed beam. The use of this sensor-actuator pair is highly expected for the applications to more practical active control of sound and vibration systems with the DVFB control strategy.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1983-1989
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• 2005

Industrial robots are powerful, extremely accurate multi-jointed systems, but they are heavy and highly rigid because of their mechanical structure and motorization. Therefore, sharing the robot working space with its environment is problematic. A novel pneumatic artificial muscle actuator (PAM actuator) has been regarded during the recent decades as an interesting alternative to hydraulic and electric actuators. Its main advantages are high strength and high power/weight ratio, low cost, compactness, ease of maintenance, cleanliness, readily available and cheap power source, inherent safety and mobility assistance to humans performing tasks. The PAM is undoubtedly the most promising artificial muscle for the actuation of new types of industrial robots such as Rubber Actuator and PAM manipulators. However, some limitations still exist, such as the air compressibility and the lack of damping ability of the actuator bring the dynamic delay of the pressure response and cause the oscillatory motion. In addition, the nonlinearities in the PAM manipulator still limit the controllability. Therefore, it is not easy to realize motion with high accuracy and high speed and with respect to various external inertia loads in order to realize a human-friendly therapy robot To overcome these problems a novel controller, which harmonizes a phase plane switching control method with conventional PID controller and the adaptabilities of neural network, is newly proposed. In order to realize satisfactory control performance a variable damper - Magneto-Rheological Brake (MRB) is equipped to the joint of the manipulator. Superb mixture of conventional PID controller and a phase plane switching control using neural network brings us a novel controller. This proposed controller is appropriate for a kind of plants with nonlinearity uncertainties and disturbances. The experiments were carried out in practical PAM manipulator and the effectiveness of the proposed control algorithm was demonstrated through experiments, which had proved that the stability of the manipulator can be improved greatly in a high gain control by using MRB with phase plane switching control using neural network and without regard for the changes of external inertia loads.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.924-927
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• 2004

Measurements of fluctuating wall pressures were made with a linear array of 16 piezo-electric transducers beneath a fully-developed turbulent boundary layer. The piezoelectric bimorph actuator applied in this experiment has bonding structures of each polarity to make out-of-plane displacements rather than in-plane ones by using piezoelectric effect To specify the boundary layer characteristics at the location where the actuation was applied, the wall friction coefficients and $Re_\theta$ were measured by using the CPM method. The actuating frequency for the bimorph film was determined according to the priori bursting frequency from boundary layer parameters. The reduction of convecting energies in wave-number space was clearly observed at the specified actuating frequencies.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.1
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.572-575
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• 2005

A novel pneumatic artificial muscle actuator (PAM actuator), which has achieved increased popularity to provide the advantages such as high strength and high power/weight ratio, low cost, compactness, ease of maintenance, cleanliness, readily available and cheap power source, inherent safety and mobility assistance to humans performing tasks, has been regarded during the recent decades as an interesting alternative to hydraulic and electric actuators. In order to realize satisfactory control performance, a variable damper Magneto Rheological Brake (MRB), Is equipped to the Joint of the manipulator. Superb mixture of conventional PID controller and a phase plane switching control method brings us a novel controller. This proposed controller is appropriate for a kind of plants with nonlinearity, uncertainties and disturbances. The experiments were carried out in practical PAM manipulator and the effectiveness of the proposed control algorithm was demonstrated through experiments, which had proved that the stability of the manipulator can be improved greatly in a high gain control by using MRB with phase plane switching control method and without regard for the changes of external inertia loads.

• Journal of Mechanical Science and Technology
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• v.19 no.3
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• pp.778-791
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• 2005

A novel pneumatic artificial muscle actuator (PAM actuator), which has achieved increased popularity to provide the advantages such as high strength and high power/weight ratio, low cost, compactness, ease of maintenance, cleanliness, readily available and cheap power source, inherent safety and mobility assistance to humans performing tasks, has been regarded during the recent decades as an interesting alternative to hydraulic and electric actuators. However, some limitations still exist, such as the air compressibility and the lack of damping ability of the actuator bring the dynamic delay of the pressure response and cause the oscillatory motion. Then it is not easy to realize the performance of transient response of pneumatic artificial muscle manipulator (PAM manipulator) due to the changes in the external inertia load with high speed. In order to realize satisfactory control performance, a variable damper-Magneto­Rheological Brake (MRB), is equipped to the joint of the manipulator. Superb mixture of conventional PID controller and a phase plane switching control method brings us a novel controller. This proposed controller is appropriate for a kind of plants with nonlinearity, uncertainties and disturbances. The experiments were carried out in practical PAM manipulator and the effectiveness of the proposed control algorithm was demonstrated through experiments, which had proved that the stability of the manipulator can be improved greatly in a high gain control by using MRB with phase plane switching control method and without regard for the changes of external inertia loads.

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.