• Journal of the Optical Society of Korea
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• 제8권4호
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• pp.174-181
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• 2004

Various kinds of systems, that can do target recognition and position detection simultaneously by using infrared sensing detectors, have been developed. In this paper, the detection system TRSS (Thermal target Recognition by Spiral Scanning) adopts linear array shaped uncooled IR detector and uses spiral type fast scanning method for relative position detection of target objects, which radiate an IR region wavelength spectrum. It can detect thermal energy radiating from a 9 m-size target object as far as 200 m distance. And the maximum field of a detector is fully filled with the same size of target object at the minimum approaching distance 50 m. We investigate two types of lens systems. One is a singlet lens and the other is a doublet lens system. Every system includes one aspheric surface and free positioned aperture stop. Many designs of F/1.5 system with ${\pm}5.2^{\circ}$ field at the Efl=20, 30 mm conditions for single element and double elements lens system respectively are compared in their resolution performance [MTF] according to the aspheric surface and stop position changing on their optimization process. Optimum design is established including mechanical boundary conditions and manufacturing considerations.

• 한국광학회지
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• 제15권3호
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• pp.248-253
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• 2004

광섬유 탐침의 끝 단에서 반사하는 광을 이용하는 근접장 주사 광간섭계를 제안하고 제안한 근접장 주사 광간섭계를 이용하여 초점의 위치와 집광 초점면에서의 파면을 분석하였다. 파면의 분석은 광섬유 탐침의 끝 단에서 반사된 빛과 시료표면에서 반사된 빛을 간섭시키고, 탐침의 끝 단을 λ/4씩 위상천이 시키면서 4장의 간섭무늬를 얻은 후, 위상천이 알고리즘을 통하여 광학 수차를 구하는 방법을 이용하였다. 실험 결과 근접 주사시의 초점의 위치를 파장의 3분의 1 이하로 제어할 수 있음을 알 수 있었으며, 제안한 근접장 주사 광간섭계를 이용하여 구한 집광 초점면에서의 파면 수차 값이 트와이만-그린 간섭계를 이용하여 구한 파면 수차값과 잘 일치함을 확인할 수 있었다.

• ETRI Journal
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• 제26권3호
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• pp.189-194
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• 2004

We demonstrate a high-speed recording based on field-induced manipulation in combination with an optical reading of recorded bits on Au cluster films using the atomic force microscope (AFM) and the near-field scanning optical microscope (NSOM). We reproduced 50 nm-sized mounds by applying short electrical pulses to conducting tips in a non-contact mode as a writing process. The recorded marks were then optically read using bent fiber probes in a transmission mode. A strong enhancement of light transmission is attributed to the local surface plasmon excitation on the protruded dots.

• Journal of the Optical Society of Korea
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• 제10권1호
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• pp.48-54
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• 2006

White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces ($Ra{\approx}500\;nm$), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

• 한국정밀공학회지
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• 제17권1호
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• 한국광학회지
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• 제8권2호
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• pp.165-168
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• 1997

780 nm의 반도체 레이저, compact disk의 광 pick-up용 actuator, 그리고 4분할 photodiode를 이용하여 scanning confocal microscope를 구성하여 시료면의 높이와 재질의 차이를 측정하였다. 4분할 photodiode에 검출되는 오차 신호를 이용하여 렌즈가 장착되어 있는 actuator를 움직이면서 시료면에 레이저 광속의 초점이 항상 위치하도록 하였으며, 이 때 actuator에 흐르고 있는 전류를 시료면의 높이로 나타내어 3차원 영상으로 표현하였다. 또한 재질의 차이는 4분할 photodiode에 검출되는 합산 신호를 이용하여 컬러 프린터에 나타나는 3차원 영상의 색을 다르게 나타내었다. 전체적인 크기도 30 mm * 20 mm * 20 mm 로서 작고 간단하며 scan 영역은 최대 1.6 mm * 1.6 mm이다. 반사광의 세기를 이용한 scanning confocal microscope의 영상과 4분할 photodiode에 검출되는 오차 신호를 적분하는 방식을 이용한 scanning confocal microscope의 영상을 구하여 그 차이를 비교하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.409-412
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• 2002

This paper presents a measurement method to compromise surface error in surface machining processes. In order to compromise the surface error in machining process, on-machine measurement is essential. There are two kinds of on-machine measurement methods available to measure the surface errors in flat workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are inevitably engaged in both methods. This paper proposes a new idea to measure the surface error for error compensation. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The experimental results show that the proposed method is useful to compensate the surface errors of machined workpieces.

• 전기학회논문지
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• 제61권4호
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• pp.639-642
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• 2012

Optical coherence tomography(OCT) can provide real-time and non-invasive subsurface imaging with ultra-high resolution of micrometer scale. However, conventional OCT systems generally have a limited imaging depth range within a depth of only 1-2 mm. To overcome the limitation, we have proposed an active surface tracking algorithm used in common-path Fourier-domain OCT system in order to extend the imaging depth range. The surface tracking algorithm based on the threshold and Savitzky-Golay filter of A-scan data was applied to real-time tracking. The algorithm has controlled a moving stage according to the sample's surface variance in real time. An OCT image obtained by the algorithm clearly show an extended imaging depth range. Consequently, the proposed algorithm demonstrated the potential for improving the conventional OCT systems with limitary depth range.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.193-198
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• 1990

We constructed Langmuir trough for the ultra-thin films (from a few tens {{{{ ANGSTROM }}) of nonlinear optical organic materials. Surface pressure - area isotherm for the tetracosanoic acid which is a fatty acids, was recorded and Langmuir -Blodgett films was deposited using it. The homogenity was investigated using scanning electron microscopy (SEM).

• 한국광학회지
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• 제9권1호
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• pp.1-4
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• 1998

CD-Player에서 사용되고 있는 4분할 광검출기를 이용하여 작고 간단하며 표면 추적 효과를 가지는 공초점 현미경을 구성하였다. 구성한 공초점 현미경은 4분할 광검출기에서 검출되는 오차 신호의 거리에 따른 변화를 이용하였다. 초점 근처에서 민감하게 변하며 양극성인 성질을 가지는 오차 신호를 이용하여 표면 추적을 하지 않아도 정확한 높이 변화를 알 수 있는 표면 추적 효과를 얻었다. 또한 시료의 높이 차이가 크지 않을 경우 반사 신호를 통하여 재질의 차이까지 알 수가 있다. 구성한 공초점 현미경은 간단한 조작으로 반사 신호를 이용하여 영상을 구현할 수도 있어 두 방식으로 얻은 결과를 비교, 분석하였다.