• Title/Summary/Keyword: Optical interferometry

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Development of Optical Probe to Inspect Micron Scale Part in Micro-Factory (Micro-Factory 공정간 마이크로 부품 검사 프로브 개발)

  • Kim Geehong;Lee D.W.
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.424-428
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    • 2005
  • This paper shows a non-contact optical method to inspect micron scale parts which will be manufactured in micro-factory system. This inspection system should have some characteristics like a small size, flexibility, and high measuring speed. In the viewpoint of measuring capabilities, it also has resolution under micron scale with measuring range over millimeter scale. Two methods will be presented in this paper, one is Moire and the other is white-light scanning interferometry. Also some experimental results will be presented to show the possibilities of the proposed inspection system.

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The Analysis on the Error of Diverging Beam and Cylindrical Surface in Holographic Interferometer for Measuring out-of-plane Displacement. (면외변위 측정을 위한 홀로그래피 간섭게에서 발산빔과 원통표면에 대한 오차해석)

  • Kang, Young-June;Moon, Sang-Joon
    • Journal of the Korean Society for Precision Engineering
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    • v.14 no.6
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    • pp.128-134
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    • 1997
  • Holographic interferometry is a useful whole-field nondestructive tesing method for measuring deformations and vibrations of engineering structure. In practical way most holographic interferometer uses a diverging beam, a point light source. When an oject is relatively small, the optical arrangement using a collimated light source has no difficulty technically but for a large object the collimated beam connot be applied anymore practically. In this paper we calculate the error of measured displacement from the sensi- tivity vector dominated by the geometry of optical arrangement for holographic interferometer and show the result with 2-D plots. A plane surface and a cylindrical surface were chosen as objects to be measured and the results from the cases of a diverging and a collimated beams were compared and analyzed.

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A study on real time measuring microscopic movements in sinusoidal phase modulating interferometry using a laser diode (레이저 다이오드를 이용한 정현파 위상변조 간섭에 의한 실시간 극미세 진동 측정에 관한 연구)

  • 구자남;염정덕;지철근
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 1990.10a
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    • pp.23-27
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    • 1990
  • A new signal processing system for real time displacement measurement in sinusoidal phase modulating interferometry is described. Although sinusoidal phase modulating interferometry is effective in measuring with high accuracy the displacement of an object, conventional signal processing takes a long time. In this method, detection of the object's displacement is easily achieved by sampling the interference signal at those times that satisfy certain conditions and by processing the sampled signals with electric circuits in real time. The delay time of this signal processing system is < 45${\mu}$s. Specially in this paper we describe all electronic circuit and optical system design

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The Measurement Method of Small Deformation by using Holographic Interferometry (홀로그래픽 산섭법을 이용한 미소변형 측정법)

  • 강영준;문상준;최장섭
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.10a
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    • pp.273-278
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    • 1993
  • Conventional measurement methods for non-destructive testing(NDT) in nuclear power plants other industrial plants have been performed as the methods of contact with objects to be inspect, but those methods have been taken relatively much time to be inspected. Holographic interferometry which is a non-contact optical measurement method using a coherent light can overcome these demerit, and also has an advantage that the quantitative measurement of small deformation for large areas can be accomplished at a time with high precision. In this paper the comparisons of the experimental results from holographic interferometry with those form the finite element method(FEM) and the analytical solutions of elastic equation are discussed.

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A study on real time measuring microscopic movements in sinusoidal phase modulating interferometry using a laser diode (레이저 다이오드를 이용한 정현파 위상변조 간섭에 의한 실시간 극미세 진동 측정에 관한 연구)

  • 강성철;진상규;지철근
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 1991.10a
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    • pp.33-37
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    • 1991
  • A now signal precessing system for real time displacement measurement in sinusoidal phase modulating interferometry is described. Although sinusoidal phase modulating interferometry is effective in measuring with high accuracy the displacement of an object, conventional signal processing takes along time. In this method, detection of the object's displacement is easily achieved by sampling the interference signal at those times that satisfy certain conditions and by processing the sampled signals with electric circuits in real time. the delay time of this signal processing system is < 45 $\mu$s. Specially in this paper we describe all electronic circuit and optical system design

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Visualization and Measurement of Fluids with Real-time Holographic Interferometry (실시간 홀로그래픽 간섭법을 이용한 유체의 가시화)

  • Eom, Chul;Kang, Young-June;Kim, Dong-Woo;Ryu, Weon-Jae;An, Jung-Keun
    • Proceedings of the KSME Conference
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    • 2001.11b
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    • pp.539-544
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    • 2001
  • The holographic measurement techniques can be applied to various industrial fields such as automobile, airplane, construction, electronics, medical, mechanics and physics. The visualization of fluids is very important in aerodynamics, heat transfer and stress analysis. There are classically optical methods such as shadowgraph, schlieren method, and Mach-Zehnder interferometry for visualizing the fluid flow phenomena. But, it is difficult to understand the continuous state of fluids well in those methods. In this study, the real-time holographic interferometer with high-speed camera is applied to the flow visualization. In addition, collimated laser beam and rotating wedge are used for recording and formation of carrier fringes, respectively.

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Thermal Strain Analysis of Composite Materials by Electronic Speckle Pattern Interferometry

  • Kim, Koung-Suk;Jang, Wan-Shik;Hong, Myung-Seak;Kang, Ki-Soo;Jung, Hyun-Chul;Kang, Young-Jun;Yang, Sung-Pil
    • Journal of Mechanical Science and Technology
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    • v.14 no.5
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    • pp.477-482
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    • 2000
  • This study discusses a non-contact optical technique (electronic speckle pattern interferometry) that is well suited for thermal deformation measurement without any surface preparation and compensating process. Fiber reinforced plastics ($[0]_{16},\;[0/90]_{8S}$) were analyzed by ESPI to determine their thermal expansion coefficients. The thermal expansion coefficient of the transverse direction of a uniaxial composite is evaluated as $48.78{\times}10^{-6}(1/^{\circ}C)$. Also, the thermal expansion coefficient of the cross-ply laminate $[0/90]_{8S}$ is numerically estimated as $3.23{\times}10^{-6}(1/^{\circ}C)$ that is compared with that measured by ESPI.

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Improvement of Measurement Accuracy for Absolute Height by Using Two Types of Doppler and Heterodyne Optical Interferometry (도플러방식과 헤테로다인 방식의 광간섭법을 병용한 절대높이 측정 정밀도 향상)

  • Ahn, Geun-Sik;Jhang, Kyung-Young;Moon, Heui-Kwan
    • Journal of the Korean Society for Precision Engineering
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    • v.13 no.6
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    • pp.128-135
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    • 1996
  • This paper proposes a high precision measurement technique to obtain the height of gage block with a few millimeter height. The proposed technique is consisted of two steps : In the first step, laser position transducer and electric micrometer are adopted to obtain a coarse value of the height of gage block, and then, in the second step, heterodyne laser interferometry is adopted to acquire the precision value. A new kind of phase detector is constructed in the low cost for the heterodyne interferometer and its linearity with ${\pm}1%$ is confirmed by experiment. Also measurement error factors due to enviroments are discussed and methodology to reduce such errors is proposed. Preliminary experiments are carried out for the gage blocks of as high as a few millimeter.

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The measruement method for internal defect of pressure vessels by using holographic interferometry (홀로그래픽 간섭법을 이용한 압력용기의 내부결함 측정법)

  • 문상준;강영준;최장섭
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.04b
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    • pp.377-382
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    • 1995
  • Conventional measurement methods using ultrasonic wave or x-ray, eddy current for non-destructive testing(NDT) in nuclear power plants and other industrial plants have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time and the inspected area is limited by the location of probe or film. But holographic interferometry which is a non-contact optical measurement method using a coherent light source has an advantage that the quantitative measurement can be performed at a time. In this paper a new method using holographic interferometry and image processing for detecting internal flaws of pressure vessels is presented.

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A New Algorithm for Determination of Reference Phases in Phase-Shifting Interferometry (위상변이간섭법에서 기준위상 결정을 위한 새로운 알고리즘 개발)

  • 한건수
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.397-402
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    • 1993
  • This paper presents a new computational algorithm of phase-shifting interferometry which can effectively eliminate the uncertainty errors of the reference phases encountered in obtaining multiple interferograms. The algorithm treats the reference phases as additional unknowns and determines their exact values by analyzing interferograms using numerical least square technique. A series of simulations prove that this algorithm can improve measuring accuracy being unaffected by the nonlinear and random errors of phase-shifters.

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