• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.10a
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• pp.66-71
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• 1998

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.187-190
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• 2002

Confocal microscopy is very popular technology in bio-medical inspection due to its ability to reject background signals and to measure very thin slide of thick specimens, which is called optical sectioning. But intensity of detected signal in fluorescence type confocal microscopy is so small that only 0.2% of emitted fluorescence light can be detected in the best case. In this paper, we proposed the reflecting optical system to improve the detection intensity and designed the optical system by optimal design method. At the end of the paper, we analyzed the characteristics of the proposed reflecting optical system.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.6
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• pp.1030-1035
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• 1992

This paper presents a non-contact type displacement sensor designed based on optical triangulation method. The optical principles of the sensor are described in detail with aids of paraxial geometric optics. A prototype sensor is designed and fabricated by using modern optoelectronic hardware. Its measuring performances are evaluated and discussed through a series of calibration processes.

• Proceedings of the Optical Society of Korea Conference
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• 1991.06a
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• pp.1-1
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• 1991

The fabrication of computer components requires a great variety of optical equipment. The patterning of integrated circuits is performed either on step-and-repeat cameras, scanning systems or step-and-repeat systems. The image forming optics used in these machines is quite difficult to design and fabricate. In addtion several layers of patterns must be precisely superposed, and also the illuminators have to provide the final irradiance in the image plane constant to within 1%. Other uses of specialized optical equipment are mass production of chip packages, inspection scanners and laser ablation cameras for polymers. The details of some of these systems will be described with particular ephasis on different optical structures and the use of excimer lasers as light sources.

• Korean Journal of Optics and Photonics
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• v.19 no.4
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• pp.310-314
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• 2008

The light from the exterior considerably deteriorates the performance of displays including PDP (plasma display panel). Thus semi-conductor industries have developed a special optical film that can block or absorb the exterior light. In this paper, we propose a new inspection system for tracing the defects of the film. Our system is able to inspect a $1.5\;m\;{\times}\;1\;m$ area for 10 sec with $127\;{\mu}m\;{\times}\;50{\mu}m$ spatial resolution.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2000.10a
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• pp.590-594
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• 2000

One of the most important factors for a leather quality inspection is its surface condition. So far a leather quality level has been discriminated by human's eye inspection, But, these kinds of method needs a lot of labor time and cause decision mistakes from an optical illusion. It means leather quality inspection is very subjective and there is no consistency. In this study, we present computer vision based a leather quality inspection system using an Artificial intelligence. Suggested system ran give standard spec for a leather quality and take human inspection duty place.

• Journal of the Microelectronics and Packaging Society
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• v.17 no.2
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• pp.29-33
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• 2010

Among several critical topics in semiconductor fabrication technology, particles in addition to bonded surface contaminations are issues of great concerns. This study reports the development of a system which inspects wafer bond integrity by analyzing laser beam transmittance deviations and the variations of the intensity caused by the defect thickness. Since the speckling phenomenon exists inherently as long as the laser is used as an optical source and it degrades the inspection accuracy, speckle contrast is another obstacle to be conquered in this system. Consequently speckle contrast reduction methods were reviewed and among the all remedies have been established in the past 30 years the most adaptable solution for inline inspection system is applied. Simulation and subsequently design of experiments has been utilized to discover the best solution to improve irradiance distribution and detection accuracy. Comparison between simulation and experimental results has been done and it confirms an outstanding detection accuracy achievement. Bonded wafer inspection system has been developed and it is ready to be implemented in FAB in the near future.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.2
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• pp.68-75
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• 1996

More accurate inspection method for facilities of nuclear power plants is required to guarantee the continuous and stable energy supply. The portion of inspection for pipes and pressure vessels is relatively big in the power plants. Conventional inspection methods using ultrasonic wave, x-ray and eddy current for nondestructive testing in nuclear power plants have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time, money and manpower. And the area to be inspected is limited by the location of probe or film. These difficulties make the inspection into a time-consuming work. We propose an optical defect detection method using phase shifting realtime holographic interferometry. This method has an advantage that the inspection can be performed at a time for relatively wide area illuminated by the laser beam, a coherent light source and can help an inspector recognize not only defects but also the high stressed areas. In this paper we show that the quantitative measurement using holographic interferometry and image processing for defect in pressure vessels is possible.

• Journal of the Optical Society of Korea
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• v.19 no.6
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• pp.687-694
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• 2015

A photoluminescence (PL) imaging method using a vision camera was employed to inspect InGaN/GaN quantum-well light-emitting diode (LED) epi-wafers. The PL image revealed dark spot defective regions (DSDRs) as well as a spatial map of integrated PL intensity of the epi-wafer. The Shockley-Read-Hall (SRH) nonradiative recombination coefficient increased with the size of the DSDRs. The high nonradiative recombination rates of the DSDRs resulted in degradation of the optical properties of the LED chips fabricated at the defective regions. Abnormal current-voltage characteristics with large forward leakages were also observed for LED chips with DSDRs, which could be due to parallel resistances bypassing the junction and/or tunneling through defects in the active region. It was found that the SRH nonradiative recombination process was dominant in the voltage range where the forward leakage by tunneling was observed. The results indicated that the DSDRs observed by PL imaging of LED epi-wafers were high density SRH nonradiative recombination centers which could affect the optical and electrical properties of the LED chips, and PL imaging can be an inspection method for evaluation of the epi-wafers and estimation of properties of the LED chips before fabrication.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.5
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• pp.330-335
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• 2017

This study applied SONAR(Sound Navigation And Ranging) to the inspection and evaluation of underwater structures. Anactual river bridge was chosen for inspection and evaluation. SONAR and an optical camera were operated together to analyze the underwater image of the bridge. SONAR images were obtained by various methods to remove the environmental variables from the field experiment, and it was confirmed that the reliability of detecting damaged areas on piers was decreased when using SONAR alone. The SONAR equipment and the optical camera can be used simultaneously to overcome the limitations of SONAR in inspecting underwater structures.These results can be used as basic data for the development of similar technologies for underwater structure inspection.