• Journal of the Optical Society of Korea
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• v.11 no.4
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• pp.173-176
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• 2007

We present a very simple and efficient bare-wafer inspection method using a knife-edge test. The wafer front surface and inner structures are inspected simultaneously. The wafer front surface is inspected visually using a knife-edge test while the inner structure is simultaneously inspected by a camera in the infrared region with a single white-light source. This paper presents a laboratory implementation of the test method with some experimental results.

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.65-66
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• 2007

We present a new simple and fast bare-wafer inspection method. This method inspects the wafer front surface and inner structures simultaneously. The wafer surface is inspected using a knife-edge test in visible while the inner structure is inspected by a looking-through camera in infrared, at the same time and with a single white-light source. This paper presents a laboratory implementation of the test method with some experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.35.3-35
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• 2001

Developed is an optical auto-inspection system to detect some microscopic defects on the Inside surface of the hydraulic automobile brakes at the production line. A small cylindrical detection module with a solid laser source at its center has two rings of optical fibers to separately collect light reflected and scattered from the defects on the surface. The cylindrical brake part rotates with respect to the detection module that will move parallel to the rotational axis of the cylinder. Thus, the optical module can scan the whole inside surface area. The automatic detection of the defects is to compare the intensity distributions ...

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.2
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• pp.197-203
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• 2001

Micro-defects induced by design and production failure or working environments are known as the cause of SCC(Stress Corrosion Cracking) in aged structures. Therefore, the evaluation of structural integrity based on micro-cracks is required not only a manufacturing step but also in-service term. So we introduce a new nondestructive inspection method using the magneto-optical film to detect micro-cracks. The method has some advantage such as high testing speed, real time data acquistion and the possibility of remote sensing by using of a magneto-optical film that takes advantage of the change of magnetic domains and domain walls. This paper introduces the concept of the new nondestructive inspection method using the magneto-optical film, also proves the possibility of this method as a remote testing system under oscillating load considering application on real fields by applying the method to four types of specimens.

• Journal of the Semiconductor & Display Technology
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• v.14 no.4
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• pp.67-71
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• 2015

Product of technology developed in this study is an external interface for controlling the equipment of pendant key remote control system circuit board, and it is used in the electronic component test equipment system. Main control system module is in the role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer engineers to control the inspection equipment. The pentane-key interface module to its role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer for the engineer to control the inspection equipment. Development of the control system can be expected in the configuration of a system for efficient and accurate inspection of high-precision parts.

• International journal of advanced smart convergence
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• v.8 no.3
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• pp.39-45
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• 2019

This paper presents an optical technique for the three-dimensional (3D) shape inspection of micro solder balls used in ball-grid array (BGA) packaging. The proposed technique uses an optical source composed of spatially arranged light-emitting diodes (LEDs) and the results are derived based on the specular reflection characteristics of the micro solder balls for BGA A vision system comprising a camera and LEDs is designed to capture the reflected images of multiple solder balls arranged arbitrarily on a tray and the locations of the LED point-light-source reflections in each ball are determined via image processing, for shape inspection. The proposed methodology aims to determine the presence of defects in 3D BGA shape using the statistical information of the relative positions of multiple BGA balls, which are included in the image. The presence of the BGA balls with large deviations in relative position imply the inconsistencies in their shape. Experiments were conducted to verify that the proposed method could be applied to inspection without sophisticated mechanism and productivity problem.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.8 s.350
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• pp.1-5
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• 2006

At-wavelength inspection system of extreme Ultra-violet lithography was developed and the inspection results were compared with the optical mask inspection system by cross correlation experiments. In at-wavelength EUV mask inspection system, a raster scan of focused euv light is used to illuminate euv light to mask blank and specularly and non-specularly reflected euv light are detected by photo diode and microchannel plate. The cross correlation results between at-wavelength inspection tool and optical inspection tool shows strong correlation. Far-field scattering fringe pattern from programmed phase and opqque defect, which were detected by phosphor plate and CCD camera shows that distinct diffraction fringes were observed with fringe spacing dependent on the defect size.

• Proceedings of the Korea Concrete Institute Conference
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• 2000.04a
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• pp.896-902
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• 2000

Crack detection technique for concrete structures has been developed in this study,. The technique utilizes OTDR(Optical Time Domain Reflectometer) method that is widely used in the field of optical engineering. At present, some techniques, such as the naked eye inspection, inspection by crack gauge, ultra sonic detection and os on, are used for crack detection. However, these are not economical and are often time-consuming works. This method employs a common optical fiber as a means of crack detection. Th optical fiber is fully attached to concrete surface, and a crack on concrete could be detected to synchronize with the crack on optical fiber. The experimental verification was performed for concrete beams and the intial crack on the beam was detected under cracking force.

• Proceedings of the Optical Society of Korea Conference
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• 1999.08a
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• pp.58-59
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• 1999

• Proceedings of the Optical Society of Korea Conference
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• 1997.08a
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• pp.81-81
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• 1997