• Journal of the Optical Society of Korea
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• 제11권4호
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• pp.173-176
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• 2007

We present a very simple and efficient bare-wafer inspection method using a knife-edge test. The wafer front surface and inner structures are inspected simultaneously. The wafer front surface is inspected visually using a knife-edge test while the inner structure is simultaneously inspected by a camera in the infrared region with a single white-light source. This paper presents a laboratory implementation of the test method with some experimental results.

• 한국광학회:학술대회논문집
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• 한국광학회 2007년도 하계학술발표회 논문집
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• pp.65-66
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• 2007

We present a new simple and fast bare-wafer inspection method. This method inspects the wafer front surface and inner structures simultaneously. The wafer surface is inspected using a knife-edge test in visible while the inner structure is inspected by a looking-through camera in infrared, at the same time and with a single white-light source. This paper presents a laboratory implementation of the test method with some experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.35.3-35
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• 2001

Developed is an optical auto-inspection system to detect some microscopic defects on the Inside surface of the hydraulic automobile brakes at the production line. A small cylindrical detection module with a solid laser source at its center has two rings of optical fibers to separately collect light reflected and scattered from the defects on the surface. The cylindrical brake part rotates with respect to the detection module that will move parallel to the rotational axis of the cylinder. Thus, the optical module can scan the whole inside surface area. The automatic detection of the defects is to compare the intensity distributions ...

• 비파괴검사학회지
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• 제21권2호
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• pp.197-203
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• 2001

항공기나 대형 플랜트 등의 경년구조물에 있어서 제조 및 설계 혹은 작업환경 등에 의해 발생하는 미소결함은 응력부식파괴로 이어지는 결정적인 원인으로 알려져 있다. 따라서 제조단계에서의 결함의 검출뿐만 아니라 운전개지 후에 있어서도 비파괴검사에 기초를 둔 정기적인 건전성평가가 요구된다. 특히 구조물내의 미소균열 평가는 구조건전성 평가에 있어서 중요한 과제라 할 수 있다. 자기광학소자를 이용한 비파괴탐상법은 균열부근의 누설자속에 의한 자구 및 자벽의 변화를 이용하여 균열정보를 화상형태로 얻는다. 그러므로 빠른 탐상속도와 결과데이터 해석의 용이 그리고 실시간적으로 탐상결과를 획득할 수 있다는 장점을 지니고 있다. 본 논문은 자기광학소자를 이용한 새로운 비파괴적 탐상법을 제안하고, 본 탐상법을 이용하여 구조물에 존재하는 표면결함의 검출가능성 및 균열깊이의 평가를 실증하였다. 표면결함을 갖는 시험편과 파이프의 내면에 존재하는 피로균열을 대상으로 실험을 실시한 결과, 표면결함의 위치 및 2차원적 형상을 화상형식으로 얻을 수 있음을 증명하였다. 또한 피로시험중의 시험편을 대상으로 균열발생 및 균열진전과정을 평가를 통하여 원격탐상의 가능성을 제시하였다.

• 반도체디스플레이기술학회지
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• 제14권4호
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• pp.67-71
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• 2015

Product of technology developed in this study is an external interface for controlling the equipment of pendant key remote control system circuit board, and it is used in the electronic component test equipment system. Main control system module is in the role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer engineers to control the inspection equipment. The pentane-key interface module to its role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer for the engineer to control the inspection equipment. Development of the control system can be expected in the configuration of a system for efficient and accurate inspection of high-precision parts.

• International journal of advanced smart convergence
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• 제8권3호
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• pp.39-45
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• 2019

This paper presents an optical technique for the three-dimensional (3D) shape inspection of micro solder balls used in ball-grid array (BGA) packaging. The proposed technique uses an optical source composed of spatially arranged light-emitting diodes (LEDs) and the results are derived based on the specular reflection characteristics of the micro solder balls for BGA A vision system comprising a camera and LEDs is designed to capture the reflected images of multiple solder balls arranged arbitrarily on a tray and the locations of the LED point-light-source reflections in each ball are determined via image processing, for shape inspection. The proposed methodology aims to determine the presence of defects in 3D BGA shape using the statistical information of the relative positions of multiple BGA balls, which are included in the image. The presence of the BGA balls with large deviations in relative position imply the inconsistencies in their shape. Experiments were conducted to verify that the proposed method could be applied to inspection without sophisticated mechanism and productivity problem.

• 대한전자공학회논문지SD
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• 제43권8호
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• pp.1-5
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• 2006

본 논문은 극자외선 리소그래피용 마스크의 결함을 극자외선을 이용하여 검출하는 방법과 기존의 가시광선을 이용하여 결함을 검출해 내는 시스템과 비교하고, 인위적으로 만들어진 결함을 이용하여 극자외선이 결함에 조사되었을 때의 반사되는 패턴을 분석하였다. 포커스된 극자외선을 래스터 스캔 방식으로 조사하면서 반사되는 극자외선의 세기를 비교함으로서 결함을 발견해 내는 시스템을 구축하였고, 이를 이용하여 기존의 가시광선을 이용하는 결함 검출 장비와 상관 실험을 진행하여 반사된 빛의 세기로 예측한 결함의 크기가 두 검출 방법 사이에 강한 상관관계를 가짐을 확인하였다. 또한, 인광판을 이용하여 극자외선이 결함에 조사되어 반사되는 패턴을 영상화하여 크기별, 결함의 종류별로 다른 프린지 패턴을 가지는 것을 확인하였다.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2000년도 봄 학술발표회 논문집
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• pp.896-902
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• 2000

Crack detection technique for concrete structures has been developed in this study,. The technique utilizes OTDR(Optical Time Domain Reflectometer) method that is widely used in the field of optical engineering. At present, some techniques, such as the naked eye inspection, inspection by crack gauge, ultra sonic detection and os on, are used for crack detection. However, these are not economical and are often time-consuming works. This method employs a common optical fiber as a means of crack detection. Th optical fiber is fully attached to concrete surface, and a crack on concrete could be detected to synchronize with the crack on optical fiber. The experimental verification was performed for concrete beams and the intial crack on the beam was detected under cracking force.

• 한국광학회:학술대회논문집
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• 한국광학회 1999년도 제16회 광학 및 양자전자 학술발표회Proceedings of 16th Optics and Quantum Electronics Conference, 1999
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• pp.58-59
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• 1999

• 한국광학회:학술대회논문집
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• 한국광학회 1997년도 Advance Program of 14th optics andquantum Electronics conference, 1997제14 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.81-81
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• 1997