• Title/Summary/Keyword: Optical MEMS

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OXC switch Fabric Structure and Control using MEMS (MEMS를 이용한 OXC 스위치 패브릭 구조 및 제어)

  • Lee, Sang-Hwa;Kim, Byung-Hwi;Kim, Kwang-Jun;Park, Hyuk;Lee, Wang-Ju
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.258-259
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    • 2002
  • 광회선 분배 시스템(OXC)은 전광통신망(Optical Transport Network)에서 광신호 간 연결을 원격으로 설정해 줄 수 있는 노드(Optical Network Element)이다. OXC는 다수의 입력/출력 링크를 가지며 하나의 입력/출력 링크에는 다수의 파장 다중된 광신호 채널이 존재한다. OXC는 하나의 입력 링크를 통하여 입력되는 다수의 파장 채널을 서로 다른 출력 링크로 연결해 주거나, 다수의 입력 링크로부터 입력되는 파장채널을 하나의 출력 링크로 연곁해 줄 수 있는 optical grooming 기능을 수행한다. 또한 자국에서 광신호를 Add/Drop할 수 있는 기능을 가질 수 있다. (중략)

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Study on the integration of a micro lens on a 2-DOF in-plane positioning actuator (2-자유도 정밀구동기와 마이크로렌즈의 집적화에 관한 연구)

  • 김재흥;김용권
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.02a
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    • pp.32-33
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    • 2000
  • 최근 디지털 정보 처리 기술의 획기적인 발전과 함께 저가의 반도체 레이저의 개발로 말미암아 광기록 장치(optical pickup device) 및 고속 광통신(optical fiber communication)분야에 응용을 위한 레이저 광학 시스템에 대한 연구가 활발하다. 광신호의 커플링(coupling) 및 스위칭(switching)을 기반으로 하는 이러한 광학 시스템은 일반적으로 광신호의 변조를 위한 광학 요소와 광학 요소의 공간적 제어를 위한 정밀 구동기로 구성되는데, 기존의 상용 시스템의 경우에는 독립적으로 기 제작된 광학 요소와 정밀 구동기를 사후에 조립하는 방법으로 소기의 목적을 달성하였다. 이와 같은 경우 제작에 많은 노력과 비용이 요구되며, 성능의 획기적인 향상을 기대하기 어려우므로 최근에는 Optical MEMS 혹은 MOEMS(Micro-Opto-Electro-Mechanical System)로 대변되는 마이크로머시닝기술(micromachining technology)을 이용한 초정밀 광학계의 제작 기술을 통하여 기존 시스템의 한계를 극복하고자 하는 노력이 다각도로 모색되고 있다. (중략)

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The Development of Optical Temperature Sensor Based on the Etched Bragg Gratings

  • Ahn, Kook-Chan;Lee, Sang-Mae
    • International Journal of Aeronautical and Space Sciences
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    • v.2 no.2
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    • pp.56-64
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    • 2001
  • An optical temperature sensor based on the etched planar waveguide Bragg grating is developed and its performance is explored using theoretical and experimental methods. The planar waveguide is designed and fabricated using optical lithography and wet chemical etching. An efficient butt coupled optical fiber is used to examine the spectral characteristics of the grating sensor, and to investigate the grating parameters. The typical bandwidth and reflectivity of the surface etched grating has been ~0.2 nm and ~7%, respectively, at a wavelength of ~1,552 nm. The temperature-induced wavelength change of the optical sensor is found to be slightly non-linear over ${\sim}200^{\circ}C$ temperature range. Theoretical models for the grating response of the sensor based on waveguide and classical laminated plate deformation theories agree with experiments to within acceptable tolerance.

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Research on the electron-beam characteristics according to the shape of electron lenses in low-energy microcolumn using Monte Carlo numerical analysis (Monte Carlo 수치해석법을 이용한 저 에너지 초소형 마이크로칼럼에 사용되는 전자렌즈의 모양에 따른 전자빔 특성 연구)

  • Kim, Young-Chul;Kim, Ho-Seob;Kim, Dae-Wook;Ahn, Seung-Joon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.1
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    • pp.23-28
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    • 2008
  • Due to the modem MEMS technologies, the electron lenses that are used in the microcolumn can have much smaller optical aberrations compared with conventional electron lenses for the bulky electron columns. Since the electron lens system have great effect on the performance of the microcolumn, it is important to study the dependence of image quality on the configuration of the electronic imaging system, among which the source-lens part is most sensitive. In this work, we investigated the electron beam characteristics according to the shapes of extractor and limiting aperture that are elements of the source-lens part. By analyzing the data obtained, we proposed the optimum configuration of the electron lens system.

Effect of Surface Treatments of Polycrystalline 3C-SiC Thin Films on Ohmic Contact for Extreme Environment MEMS Applications (극한 환경 MEMS용 옴익 접촉을 위한 다결정 3C-SiC 박막의 표면 처리 효과)

  • Chung, Gwiy-Sang;Ohn, Chang-Min
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.3
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    • pp.234-239
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    • 2007
  • This paper describes the TiW ohmic contact characteristics under the surface treatment of the polycrystalline 3C-SiC thin film grown on $SiO_2/Si(100)$ wafers by APCVD. The poly 3C-SiC surface was polished by using CMP(chemical mechanical polishing) process and then oxidized by wet-oxidation process, and finally removed SiC oxide layers. A TiW thin film as a metalization process was deposited on the surface treated poly 3C-SiC layer and was annealed through a RTA(rapid thermal annealing) process. TiW/poly 3C-SiC was investigated to get mechanical, physical, and electrical characteristics using SEM, XRD, XPS, AFM, optical microscope, I-V characteristic, and four-point probe, respectively. Contact resistivity of the surface treated 3C-SiC was measured as the lowest $1.2{\times}10^{-5}{\Omega}cm^2$ at $900^{\circ}C$ for 45 sec. Therefore, the surface treatments of poly 3C-SiC are necessary to get better contact resistance for extreme environment MEMS applications.

Thermo-optic Effects of Bragg Grating Optical Temperature Sensor

  • Ahn, Kook-Chan;Lee, Sang-Mae;Lee, Gwang-Seok;Park, Seung-Bum
    • International Journal of Aeronautical and Space Sciences
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    • v.3 no.2
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    • pp.24-30
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    • 2002
  • This paper demonstrates a comparison of linear and nonlinear analyses for thermo-optic effects of optical temperature sensor based on the etched silica-based planar waveguide Bragg grating. Topics include theoretical analyses and experiment of the etched planar waveguide Bragg grating optical temperature sensor. Theoretical models with nonlinear than linear temperature effect for the grating response based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.

Fabrication of 50GHz internal wavelength locker module for DWDM applications (DWDM 광통신용 50GHz 내장형 파장안정화 모듈 제작)

  • Choi, Kwang-Seung;Park, Heung-Woo;Park, Jun-Hee;Choi, Byung-Seok;Lee, Jong-Hyun;Yun, Ho-Kyung;Eom, Yong-Sung;Moon, Jong-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.04a
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    • pp.198-202
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    • 2003
  • Tunable laser diode module with 50GHz-spacing internal wavelength locker was developed. Angle tilting dependency on FSR and peak wavelength shift and the proper initial tilting angle was calculated. By tilting the etalon, the response of the internal wavelength locker module was tuned. As a result, the fabricated internal wavelength locker module showed good performance over 62 channels.

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Development of Integrated Optical Pickup for Small Form Factor Optical Disc Drive (Small Form Factor 광 디스크 드라이브용 초소형 집적형 광픽업 개발)

  • Cho, Eun-Hyoung;Sohn, Jin-Seung;Lee, Myung-Bok;Suh, Sung-Dong;Kim, Hae-Sung;Kang, Sung-Mook;Park, No-Cheol;Park, Young-Pil
    • Transactions of the Society of Information Storage Systems
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    • v.2 no.3
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    • pp.163-168
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    • 2006
  • Small form factor optical pickup (SFFOP) corresponding to BD specifications is strongly proposed for the next-generation portable storage device. In order to generate SFFOP, small sized optical pickup has been fabricated. We have developed a small sited optical pickup that is called the integrated optical pickup (IOP). The fabrication method of this system is mainly dependant on the use of the wafer based micro fabrication technology, which has been used in MEMS process such as photolithography, reactive ion etching, wafer bonding, and packaging process. This approach has the merits for mass production and high assembling accuracy. In this study, to generate the small sized optical pickup for high recording capacity, IOP corresponding to BD specifications has been designed and developed, including three main parts, 1) design, fabrication and evaluation of objective lens unit, 2) design and fabrication of IOP and 3) evaluation process of FES and TES.

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Fabrication and feasibility estimation of Micro Engine Component (미세 엔진 운용성 검증 및 요소 기술 개발)

  • Lee, Dae-Hoon;Park, Dae-Eun;Choi, Kwon-Hyoung;Yoon, Joon-Bo;Kwon, Se-Jin;Yoon, Eui-Sik
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.31-36
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    • 2001
  • As a part of micro engine development feasibility estimation was done through fabrication and test of down scaled combustor and MEMS fabricated spark electrode. In an experimental observation of the down scaled combustion phenomena where flame propagation was observed by optical method and pressure change in combustor which gives the information about the reaction generated thermal energy was recorded and analyzed. Optimal combustor scale was derived to be about 2mm considering increased heat loss effect and thermal energy generation capability. Through the fabrication and discharge test of MEMS electrode effects of electrode width and gap was investigated. Electrode was fabricated by thick PR mold and electroplating. From the result discharge voltage characteristic in sub millimeter scale electrode having thickness of $40{\mu}m$ was obtained. From the result base technology for design and fabrication of micro engine was obtained.

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The Improvement of Blur Phenomenon at Laser Beam Scanner (레이저 빔 스캔 시스템의 Blur현상 개선)

  • Roh, Jin Ki;Kim, Hye Jin;Kim, Kab Il
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.63 no.9
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    • pp.1281-1285
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    • 2014
  • Recently, as the wide spread of smart phone, pico projector which is used at the smart phone is appeared as a portable display device. In this paper, among several pico projectors, laser beam scanner module is dealt with in which laser is used as light source, and mems-mirror is used as optical panel. In this device, screen image quality is a special issue, and blur effect is a typical adverse effect to the quality of this device. So the enhancement of this blur effect has an important factor of the quality of the device. The definition of the blur and the main source of the blur are studied and the simulation results and way of improvement are also suggested.