The Development of Optical Temperature Sensor Based on the Etched Bragg Gratings

  • Ahn, Kook-Chan (Department of Mechanical Design Engineering Chinju National University) ;
  • Lee, Sang-Mae (Center for Microelectronic Sensors and MEMS Department of Electrical & Computer Engineering and Computer Science University of Cincinnati)
  • Published : 2001.11.01

Abstract

An optical temperature sensor based on the etched planar waveguide Bragg grating is developed and its performance is explored using theoretical and experimental methods. The planar waveguide is designed and fabricated using optical lithography and wet chemical etching. An efficient butt coupled optical fiber is used to examine the spectral characteristics of the grating sensor, and to investigate the grating parameters. The typical bandwidth and reflectivity of the surface etched grating has been ~0.2 nm and ~7%, respectively, at a wavelength of ~1,552 nm. The temperature-induced wavelength change of the optical sensor is found to be slightly non-linear over ${\sim}200^{\circ}C$ temperature range. Theoretical models for the grating response of the sensor based on waveguide and classical laminated plate deformation theories agree with experiments to within acceptable tolerance.

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