• Title/Summary/Keyword: Optical MEMS

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Optical Temperature Sensor Based on the Etched Planar Waveguide Bragg Grating Considering Linear Thermo-optic Effect (평면 광도파로 상의 식각 브래그 격자를 이용한 광온도 센서의 개발)

  • Kook-Chan Ahn;Sang-Mae Lee
    • Journal of the Korean Society of Safety
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    • v.16 no.2
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    • pp.121-129
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    • 2001
  • This paper demonstrates the development of optical temperature sensor based on the etched planar waveguide Bragg grating. Topics include design and fabrication of the etched planar waveguide Bragg grating, investigation of the grating reflection characteristics, and temperature measurement capabilities. The typical bandwidth and reflectivity of the surface etched grating has been ~0.2nm and ~7%, respectively, at a wavelength of ~1552nm. The temperature-induced wavelength change of the optical sensor is found to be slightly non-linear over ~20$0^{\circ}C$ temperature range. Theoretical models for the grating response of the sensor based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.

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Characteristics of Micro-stereolithography Apparatus Using UV Lamp as Light Source (UV램프 광원 마이크로 광 조형장치의 성능평가)

  • Lee I.H.;Choi J.S.;Lee S.P.;Ko T.J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.161-162
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    • 2006
  • Micro-stereolithography technology is used for fabricating of 3-dimensional micro-structures. In some cases, this technology is more economical and simpler than MEMS and LIGA technologies based on semiconductor process. In this research, the micro-sterolithography apparatus that is more economical and simpler than current micro-stereolithography apparatus was developed. This apparatus uses UV lamp and optical fiber as a light source and tight delivery system, respectively.

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The Fabrication of SiOB by using Bulk Micromachining Process for the Application of Slim Pickup (벌크 마이크로머시닝 기술을 이용한 박형 광픽업용 SiOB 제작)

  • Choi, Seog-Moon;Park, Sung-Jun;Hwang, Woong-Lin
    • Transactions of the Society of Information Storage Systems
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    • v.1 no.2
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    • pp.175-181
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    • 2005
  • SiOB is an essential part of slim optical pickup, where the silicon mirror, LD stand, silicon PD are integrated and LD is flip chip bonded. SiOB is fabricated with bulk micromachining. Especially the fabrication of silicon wafer with stepped concave areas has many extraordinary difficulties. As a matter of fact, experiences and knowledges are rare in the fabrication of the highly stepped silicon wafer. The difficulties occurring in the integration of PD and SiOB, and highly stepped patterning, and silicon mirror roughness and how-to-solve will be discussed.

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이것이 신기술이다 - 대출력 레이저를 이용한 재료 가공의 최신 동향

  • Lee, Mok-Yeong
    • The Optical Journal
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    • s.125
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    • pp.28-31
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    • 2010
  • 지구 온난화 혹은 에너지 고갈 문제에 대응하기 위하여 새로운 소재에 대한 요구가 증가하고 있다. 또한 국내 제조업의 국제적인 경쟁력을 확보하기 위하여 고강도강, 비철재료 등 고기능 소재의 산업 적용이 증가하고 있다. 종래의 철강소재에 비해 새로운 소재들은 가공이 까다로울 뿐만아니라 상대적으로 높은 정밀도를 필요로 한다. 레이저는 높은 에너지 강도를 갖는 일종의 빛이며, 비접촉으로 재료를 가공하는 것이 가능하다. 또한 동일한 장치를 이용하여 용접, 절단 열처리 등 대부분의 재료 가공이 가능하며 기존의 가공 방법에 비하여 가공속도가 빠를 뿐만 아니라 가공품질이 우수한 장점이 있기 때문에 산업 적용이 급격히 증가하고 있는 기술이다. 레이저를 이용하여 재료를 가공하는 방법에는 MEMS 등의 초미세 가공으로부터 조전용 후판에 이르기까지 다양하지만 본 보고에서는 출력 1kW 이상의 레이저를 이용한 금속의 용접 및 절단 가공에 대해서 서술하였다. 금속의 가공에 이용 가능한 출력 1kW 이상의 레이저는 $CO_2$ 레이저, YAG 레이저, Diode 레이저 등이 있다.

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Design and Analysis of Diffractive Grating Imprinted Light-guide Plate for LCD Illumination

  • Choi, Hwan-Young;Park, Young-Pil
    • Journal of Information Display
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    • v.5 no.1
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    • pp.7-15
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    • 2004
  • A highly simplified backlight unit mainly composed of diffractive grating in sub-micron order imprinted light-guide plate (LGP) is proposed for edge-lit backlight unit. Optical characteristics of the imprinted LGP are examined by RCWA and the performance is verified through Monte Carlo simulation. Results show that the diffraction efficiency, luminous flux and its uniformity over the area are significantly affected by the angle of incident ray. Consequently couples of design considerations are additionally proposed to enhance luminous flux. In terms of peak luminance and out-coupling luminous flux, the experimental results are agreed well with the performance simulation. Finally, compared with optical characteristics of conventional backlight unit, we could conclude that the proposed simplified backlight unit made of diffractive grating imprinted light-guide plate is a good substitute for the conventional backlight unit.

The design and manufacturing of micro fabricated optical pick-up head (Micro Fabricated Optical Pick-up 헤드 설계 및 제작)

  • Kim, I.H.;Park, K.B.;Jung, S.W.;Kim, K.N.;Moon, H.C.;Park, H.D.
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.2263-2265
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    • 2000
  • 본 연구에서는 광 픽업의 소형, 경량 제작을 위해 MEMS 기술을 이용하여 planar micro optics 방법으로 광 픽업을 구성하는 micro lens, actuator, beamsplitter 등을 설계, 제작하고 집적화한 픽업헤드를 구성하여 그 특성을 분석하였다. 특성분석 결과 disk에 focusing 되는 beam의 형상은 circle type의 비교적 양호한 결과를 얻을 수 있었고 beam spot size는 약 22$\mu m$로 실제 system에서 요구되는 0.9$\mu m$이내의 beam spot size에 비해 약 25배 가량 큰 beam spot size를 얻을 수 있었다.

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Laser Micro Machining in MEMS (레이저를 이용한 미세가공)

  • 윤경구;이성국;김재구;최두선;신보성;황경현
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.08a
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    • pp.48-49
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    • 2000
  • 최근 몇 년 동안 레이저는 품질과 신뢰성의 계속적인 향상으로 인하여 여러 산업 응용분야에서 폭넓게 사용되어 지고 있다. 재료가공에 있어서 레이저의 적용분야는 금속의 절단, 용접 및 드릴링, 세라믹의 스크라이빙, 플라스틱과 복합재료의 절단 및 여러 가지 재료의 마킹, 등을 포함한다. 이러한 가공 메카니즘은 레이저의 조사에 의하여 재료를 용융, 증발시키는 열적 메카니즘이다. 특히 요즘에는 자외선 영역의 조사와 높은 빔의 세기에 의해 다른 종류의 에너지 전달 메카니즘이 가능한 UV 영역의 엑사이머 레이저의 사용이 증가하고 있다.$^{(1)}$ 이러한 엑사이머 레이저가 기존의 다른 레이저에 비해서 갖는 이점은 다음과 같다. 첫째, 모든 금속이 엑사이머 레이저에 대해서는 높은 흡수율을 가지므로 레이저 에너지가 가공 에너지로 효율적으로 변환되기 때문에 얇은 표면층에서 완전히 흡수하게 된다. (중략)

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Fabrication of a Micro fluidic Lens having variable focal length (가변 초점거리 마이크로 유체렌즈 제작)

  • Lee J.S.;Park J.G.;Kim G.M.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.572-575
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    • 2005
  • A microlens connected to microfluidic channel is fabricated. The microlens is sealed with an elastomeric membrane which deforms by pressure of fluid driven by a syringe pump resulting in the shape change of the microlens. The optical properties of the microlens could be controlled by changing the microlens shape. The microlens system were made of an elastomer, PDMS, using molding from a photoplastic master patterned by UV photolithography. The test results show the optical property of the lens could be made into convex and concave type by applying the fluidic pressure positive and negative.

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Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films (원자층 증착법에 의한 Al2O3 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향)

  • Yun, Eun Young;Lee, Woo-Jae;Jang, Kyung Su;Choi, Hyun-Jin;Choi, Woo-Chang;Kwon, Se Hun
    • Journal of the Korean institute of surface engineering
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    • v.48 no.2
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    • pp.50-55
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    • 2015
  • $Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD-$Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a high optical transmittance of 95.47% at a wavelength of 550 nm and a very poor hardness of 0.1381 GPa. With increasing the thickness of $Al_2O_3$ thin films from 5 to 25 nm, the transmittance of moth eye anti-reflective nanostructured films was gradually decreased from 94.94 to 93.12%. On the other hand, the hardness of the films was greatly increased from 0.3498 to 0.7806 GPa with increasing the thickness of $Al_2O_3$ thin films. This result shows that ALD thin films can be applied to improve mechanical properties with an adequate optical transmittance of the conventional moth eye anti-reflection nanostructure films.

Basic Research of Non-Invasive Optical Transcutaneous pCo2 Gas Sensor & Analytic Equipment (비침습적 방법에 의한 광학식 Transcutaneous pCo2 가스센서 및 분석장치 개발을 위한 기초연구)

  • Kim, Do-Eok;Lee, Seung-Ha;Cho, Eun-Jong;Kang, Shin-Won
    • Journal of Sensor Science and Technology
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    • v.13 no.4
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    • pp.258-263
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    • 2004
  • In this study, we carried out a basic study for the development of optical transcutaneous $pCO_{2}$ gas sensor and analyzer using non-invasive method. The basic principle of $pCO_{2}$ measurement is adapted Beer lambert's law and embodied the system using NDIR method. This measuring system was composed of a IR lamp, a optical filter, a optical reaction chamber, pyroelectric sensor and a signal process. We measured $EtCO_{2}'s$ concentration in basis step instead of $pCO_{2}$ gas that can collect by inflicting heat in outer skin. We minimize the size of optical reaction chamber which takes up the largest volume, to make the portable sensor. We made optical reaction chamber in Si wafer using MEMS technology and the optical reaction chamber was shortened to 2 mm and we carried out an experiment. When we injected the $EtCO_{2}$ to the inside of the optical reaction chamber, we could confirm change of 4.6 mV. The system response time was within 2 second that is fairly fast.