Effects of Substrate Temperature on Properties of (Ga,Ge)-Codoped ZnO Thin Films Prepared by RF Magnetron Sputtering (RF 마그네트론 스퍼트링에 의한 Ga 와 Ge가 도핑된 ZnO 박막 특성의 온도효과)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.24 no.7
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- pp.584-588
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- 2011