• Transactions on Electrical and Electronic Materials
• /
• v.12 no.2
• /
• pp.56-59
• /
• 2011

The characterization of the chemical mechanical polishing (CMP) process for undensified phophosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been used by experimenters to understand the relationship between the input variables and responses of interest in a simple and efficient way, and it typically is beneficial for determining the appropriatesize of experiments with multiple process variables and making statistical inferences for the responses of interest. The equipment controllable parameters used to operate the machine consist of the down force of the wafer carrier, pressure on the back side wafer, table and spindle speeds (SS), slurry flow (SF) rate, pad condition, etc. None of these are independent ofeach other and, thus, the interaction between the parameters also needs to be understoodfor improved process characterization in CMP. In this study, we selected the five controllable equipment parameters the most recommendedby process engineers, viz. the down force (DF), back pressure (BP), table speed (TS), SS, and SF, for the characterization of the CMP process with respect to the material removal rate and film uniformity in percentage terms. The polished material is undensified PSG which is widely used for the plananization of multi-layered metal interconnects. By statistical modeling and the analysis of the metrology data acquired from a series of $2^{5-1}$ fractional factorial designs with two center points, we showed that the DF, BP and TS have the greatest effect on both the removal rate and film uniformity, as expected. It is revealed that the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that process control based on a better understanding of the process is the key to success in current semiconductor manufacturing, in which the size of the wafer is approaching 300 mm and is scheduled to continuously increase up to 450 mm in or slightly after 2012.

• Transactions on Electrical and Electronic Materials
• /
• v.12 no.3
• /
• pp.115-118
• /
• 2011

Process characterization of the chemical mechanical polishing (CMP) process for undensified phosphosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been addressed to experimenters to understand the relationship between input variables and responses of interest in a simple and efficient way. It is typically beneficial for determining the adequate size of experiments with multiple process variables and making statistical inferences for the responses of interests. Equipment controllable parameters to operate the machine include the down force (DF) of the wafer carrier, pressure on the backside of the wafer, table and spindle speed (SS), slurry flow rate, and pad condition. None of them is independent; thus, the interaction between parameters also needs to be indicated to improve process characterization in CMP. In this paper, we have selected the five controllable equipment parameters, such as DF, back pressure (BP), table speed (TS), SS, and slurry flow (SF), most process engineers recommend to characterize the CMP process with respect to material removal rate (RR) and film uniformity as a percentage. The polished material is undensified PSG. PSG is widely used for the plananization in multi-layered metal interconnects. We identify the main effect of DF, BP, and TS on both RR and film uniformity, as expected, by the statistical modeling and analysis on the metrology data acquired from a series of $2^{5-1}$ fractional factorial design with two center points. This revealed the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that the process control based on better understanding of the process is the key to success in semiconductor manufacturing, typically when the wafer size reaches 300 mm and is continuously scheduled to expand up to 450 mm in or little after 2012.

• Journal of Industrial Technology
• /
• v.9
• /
• pp.29-41
• /
• 1989

A general study on the upgrading of mica minerals which are mainly found in pegmatite deposits was carried out for the purpose of developing a technique for recovering mica in form of comercial grade products. By the way the grade one of about 5~6% $K_2O$ still is not developed. The target of this research work is to be establish a process for the efficient concentration of muscovite, containing more than 10% $K_2O$. The tests are applied to incraese the recovery and grade of concentrates in term of variations of conditions. The test sample consists of mainly muscovite and gangue mineral such as quartz, pyrite and chlorite. Decantation and shaking table tests were ineffective to up-grade this low grade one, but flotation method gave satisfactory result. By means of grade one, but flotation method gave satisfactory result. By means of grindability tests, an optimum result could be obtained from the sample ground to -48mesh feed size. The flotation result indicates that the dodecyl ammonium chloride used as a cationic collector is effective on the negatively charged surface, while the sodium dodecyl sulfate as an anionic collector is effective on the positively charged surface. Muscovite was floated by petroleum sulfonate as well as amine type collector, it also floated by MIBC as well as pine oil frother under well condition. Fine muscovite concentrates of about 10.68% $K_2O$ was obtained with 22.4% yield, by decantation, the muscovite concentrates of 10.10% $K_2O$ was obtained with 23.54% yield, by table concentration, the muscovite concentrates of 11.51% $K_2O$ was obtained with 23.0% yield by flotation.

• Asian Pacific Journal of Cancer Prevention
• /
• v.15 no.10
• /
• pp.4307-4309
• /
• 2014

Purpose: To calculate the probability of one person's life-time death caused by a malignant tumor and provide theoretical basis for cancer prevention. Materials and Methods: The probability of one person's death caused by a tumor was calculated by a probability additive formula and based on an abridged life table. All data for age-specific mortality were from the third retrospective investigation of death cause in China. Results: The probability of one person's death caused by malignant tumor was 18.7% calculated by the probability additive formula. On the same way, the life-time death probability caused by lung cancer, gastric cancer, liver cancer, esophageal cancer, colorectal and anal cancer were 4.47%, 3.62%, 3.25%, 2.25%, 1.11%, respectively. Conclusions: Malignant tumor is still the main cause of death in one's life time and the most common causes of cancer death were lung, gastric, liver, esophageal, colorectal and anal cancers. Targeted forms of cancer prevention and treatment strategies should be worked out to improve people's health and prolong life in China. The probability additive formula is a more scientific and objective method to calculate the probability of one person's life-time death than cumulative death probability.

• The Journal of Sustainable Design and Educational Environment Research
• /
• v.17 no.3
• /
• pp.26-34
• /
• 2018

This research is a pre-research to find out profit module of 20 students in a classroom. I researched the widths of passages in the 30 classrooms of 5 elementary schools in Nothern Kyeonggi-do. I found the conclusions as follows. 1st, the area of 1 student's unit is $650(W){\times}950(D)$ 2nd, most of classrooms' students table placements are one-way types(77%). U-types are 13%. group study-types are 7% 3rd, The width between blackboard and front student's table is 2.08m. The width of passage between back seat and backboard is 1.12m. The width of passage between side wall and near student's table is 0.89m. The width of passage between window and near student's table is 0.74m. The width of vertical passage(A) between student's tables is 0.68m. The width of vertical passage(B) between student's tables is 0.7m. 4th, The area of teachers' is $2.1m{\sim}2.25m{\times}2.1m=4.41{\sim}4.73m^2$

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.34 no.12B
• /
• pp.1475-1482
• /
• 2009

In ZigBee network, using energy efficiently is necessary because ZigBee node works by battery. To use energy efficiently, it is one of the way to reduce unnecessary network traffic. In this paper, it presents efficient shortcut routing algorithm using depth of destination node in ZigBee network. In traditional tree routing, each node transfers data only to its own parent or child node, which is inefficient way. Efficient shortcut routing algorithm is also based on tree routing. However, we suggests the algorithm with using neighbor table and depth of destination that is able to transfer data to other neighbor node, not only to parent or child node. It minimizes coordinator bottleneck state and unnecessary intermediate routing path which happens in traditional tree routing.

• Proceedings of the IEEK Conference
• /
• 2002.07a
• /
• pp.281-284
• /
• 2002

Error resilience for image coding is an important component of multimedia communication system. Error resilience schemes address loss recovery from the compression perspective. Multiple description coding (MDC) is one of the error resilience techniques promising for robust video transmission. It is the way to achieve tradeoff description such as scalar quantization, correlating transform and the quantized frame expansion. In this paper, we consider Multiple Description Scalar Quantization (MDSQ) to wavelet domain. Conventional MDSQ schemes considered description with equal weights in each sub-bands. But, we can see that the each sub-bands is unequal contribution to whole image quality. Therefore, we experiment the multiple design MDSQ table to make probability of zero index high, which gives high efficiency in arithmetic symbol coder. We also compare our proposed method with the conventional methods and show improved performance in terms of redundancy-rate-distortion.

• Journal of Animal Science and Technology
• /
• v.60 no.6
• /
• pp.15.1-15.10
• /
• 2018

Methane emission from the enteric fermentation of ruminant livestock is a main source of greenhouse gas (GHG) emission and a major concern for global warming. Methane emission is also associated with dietary energy lose; hence, reduce feed efficiency. Due to the negative environmental impacts, methane mitigation has come forward in last few decades. To date numerous efforts were made in order to reduce methane emission from ruminants. No table mitigation approaches are rumen manipulation, alteration of rumen fermentation, modification of rumen microbial biodiversity by different means and rarely by animal manipulations. However, a comprehensive exploration for a sustainable methane mitigation approach is still lacking. Dietary modification is directly linked to changes in the rumen fermentation pattern and types of end products. Studies showed that changing fermentation pattern is one of the most effective ways of methane abatement. Desirable dietary changes provide two fold benefits i.e. improve production and reduce GHG emissions. Therefore, the aim of this review is to discuss biology of methane emission from ruminants and its mitigation through dietary manipulation.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1126-1129
• /
• 2003

In this paper, we propose a multi-agent system for assisting those who need help in taking objects around him/her. One may imagine this kind of situation when a person is lying in bed and wishes to take an object on a distant table that cannot be reached only by stretching his/her hand. The proposed multi-agent system is composed of three main independent agents; a vision agent, a robot agent, and a pass agent. Once a human expresses his/her intention by pointing to a particular object using his/her hand and a finger, these agents cooperatively bring the object to him/her. Natural communication between a human and the multi-agent system is realized in this way. Performance of the proposed system is demonstrated in an experiment, in which a human intends to take one of the four objects on the floor and the three agents successfully cooperate to find out the object and to bring it to the human.

• Journal of Computing Science and Engineering
• /
• v.9 no.1
• /
• pp.1-8
• /
• 2015

Accessing and searching in a sequence of numbers are fundamental operations in computing that are encountered in a wide range of applications. One of the applications of the problem is cryptanalytic time-memory tradeoff which is aimed at a one-way function. A rainbow table, which is a common method for the time-memory tradeoff, contains elements from an input domain of a hash function that are normally sorted integers. In this paper, we present a practical indexing method for a monotonically increasing static sequence of numbers where the access and search queries can be addressed efficiently in terms of both time and space complexity. For a sequence of n numbers from a universe $U=\{0,{\ldots},m-1\}$, our data structure requires n lg(m/n) + O(n) bits with constant average running time for both access and search queries. We also give an analysis of the time and space complexities of the data structure, supported by experiments with rainbow tables.