• Title/Summary/Keyword: Off-gas

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A Novel Approach for Controlling Process Uniformity with a Large Area VHF Source for Solar Applications

  • Tanaka, T.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.146-147
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    • 2011
  • Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

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Effect of $CO_2$ Concentration of CA Conditions on Quality of Kiwifruit (Actinidia chinensis Planch.) during Storage (한국산 양다래(Actinidia chinensis Planch.)의 CA 저장성에 관한 연구)

  • Lee, Sei-Eun;Kim, Dong-Man;Kim, Kil-Hwan;Rhee, Chul
    • Korean Journal of Food Science and Technology
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    • v.21 no.6
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    • pp.869-875
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    • 1989
  • For the evaluation of storage stability of kiwifruit, the conditions of CA storage were based on the following gas compositions; 2% oxygen and 2, 4, 6% carbon dioxide, respectively. The results obtained from the experiment were as follows; The flesh softening was considerably reduced at the storage atmospheres of 4% $CO_2$ plus 2% $O_2$, and fruit firmness of 3.0kg was marked in this CA condition after storage for 180 days. The concentration of $CO_2$ affected clearly on the respiration rate and organic acid compositions of kiwifruit during CA storage. The respiration rate at the storage condition of 6% $CO_2$ was lower than those at 2 and 4% $CO_2$. Quinic and succinic acid contents were obviously increased in the kiwifruit stored at all the CA conditions studied. In comparision of the developed amounts of off-flavor substances, ethanol and acetaldehyde, depended upon the concentration of $CO_2$ in the CA conditions, the larger amount were produced in the storage condition of higher concentration of $CO_3$. From the results mentioned above, it could be concluded that the optimum atmosphere combination for CA storage of kiwifruit was 4% $CO_2$ plus 2% $O_2$.

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Volatile Compounds and Sensory Properties of Commercial Brown Rice Vinegars Fermented with and without Ethanol (시판 현미식초의 주정첨가 유무에 따른 휘발성 성분 및 관능적 특성 비교)

  • Yoon, Sung-Ran;Kim, Gui-Ran;Lee, Ji-Hyun;Lee, Su-Won;Jeong, Yong-Jin;Yeo, Soo-Hwan;Choi, Han-Seok;Kwon, Joong-Ho
    • Korean Journal of Food Science and Technology
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    • v.42 no.5
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    • pp.527-532
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    • 2010
  • The properties of volatile flavor components were compared in commercial brown rice vinegars that were fermented with and without ethanol addition, for which solid phase microextraction-gas chromatography (SPME-GC), electronic nose, and sensory evaluations were performed. A total of 24 volatile compounds, mainly composed of acetic acid, ethyl acetate, benzaldehyde, iso-valeric acid, phenylethyl alcohol, 2-phenylethyl acetate, acetoin, and isobutyric acid, were identified in the brown rice vinegar fermented without ethanol, while major volatiles in the brown rice vinegar fermented with ethanol were acetic acid, ethyl acetate, 1-hexyl acetate, benzaldehyde, 2-phenylethyl acetate, and phenylethyl alcohol. The electronic nose patterns of samples indicated a significant difference in the brown rice vinegars fermented with and without ethanol. Pungent flavor and off-flavor intensity were high in the brown rice vinegar fermented without ethanol. According to the results, fermentation conditions affect the volatile properties of brown rice vinegars.

Analysis of Methamphetamine and Amphetamine in Oral Fluid of Eleven Drug Abusers (마약남용자 11명의 타액 중 메스암페타민의 분석)

  • Kim, Eun-Mi;Lee, Ju-Seon;Choi, Hye-Young;Choi, Hwa-Kyung;Chung, Hee-Sun
    • YAKHAK HOEJI
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    • v.52 no.6
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    • pp.419-425
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    • 2008
  • A qualitative and quantitative analytical method was developed for detection of methamphetamine (MA) and its main metabolite amphetamine (AM) in oral fluid. Oral fluids of eleven drug abusers were provided by Police, specimens were collected by stimulation with a cotton swab treated with 20 mg of citric acid ($Salivette^{(R)}$; Sarstedt, USA). As the preliminary test, oral fluid samples were screened for amphetamines by Fluorescence Polarization Immunoassay (TDxFLx, Abbott Co.). Extraction for MA was performed using solid-phase extraction (SPE) by $RapidTrace^{TM}$ (Zymark, USA) with mixed mode cation exchange cartridge, CLEAN $SCREEN^{(R)}$ (130 mg/3 ml, UCT) after dilution with phosphate buffer. Samples were evaporated and derivatized by pentafluoropropionic acid anhydride (PFPA). Quantitation of MA and AM was performed by gas chromatography-mass spectrometry (GC-MS) using selective ion monitoring (SIM), the quantitation ions were m/z 204 (MA), 208 (MA-$D_5$), 190 (AM) and 194 (AM-$D_5$). The selectivity, linearity of calibration, limit of detection (LOD) and quantification (LOQ) within- and between day precision, accuracy and recoveries were examined as parts of the method validation. All oral fluid samples gave positive results to immunoassay for MA (cut-off level, 50 ng/ml as d-amphetamine). Concentrations of MA and AM by GC-MS in eleven samples were ranged 104.2${\sim}$4603.3 ng/ml and 32.4${\sim}$268.6 ng/ml, respectively. Extracted calibration curves of MA and AM were linear over the two concentration range of 1${\sim}$100 and 50${\sim}$1000 ng/ml with correlation coefficient of above 0.999. LOQ of MA and AM was 1 and 3 ng/ml, respectively. The intraand inter-day run precisions (CV) for MA and AM were less than 10%, and the accuracies (bias) for MA and AM were also less than 10% at the two different concentrations 5 and 100 ng/ml at low calibration range, 50 and 1000 ng/ml at high calibration range. The absolute recoveries of MA and AM at low and high calibration ranges were more than 82% and 75%, respectively. In this study the qualitative and quantitative analytical method of MA in oral fluid was established. Oral fluid testing may detect drug use in past hours because of its shorter detection window than urine, and be useful in post-accident situations. So oral fluids will be most useful for testing drug abuse in the driving under the influence of drug (DUID) as the alternative specimens of urine.

Acute Respiratory Failure Treated with Veno-venous Extracorporeal Membrane Oxygenation (정-정맥 체외막형산소화요법을 이용한 급성호흡부전의 치료)

  • Kim, Hyoung-Soo;Han, Sang-Jin;Hong, Kyung-Soon;Yoon, Duck-Hyoung;Lee, Chang-Youl;Lee, Myung-Goo;Hong, Won-Ki;Lee, Sun-Hee;Kim, Kun-Il;Lee, Hee-Sung;Cho, Sung-Woo
    • Tuberculosis and Respiratory Diseases
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    • v.68 no.2
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    • pp.62-66
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    • 2010
  • Background: Extracorporeal membrane oxygenation (ECMO) during severe acute respiratory failure helps to recover the pulmonary function. This study evaluated our experience with veno-venous ECMO in adult patients with acute respiratory failure. Methods: From January 2007 to July 2009, ECMO was used on 54 patients. Of these 54 patients, 7 were placed on veno-venous ECMO for acute respiratory failure. The indications of ECMO were based on the lung dysfunction measured as a $PaO_2/FiO_2$ ratio <100 mm Hg on $FiO_2$ of 1.0, or an arterial blood gas pH <7.25 due to hypercapnia despite the optimal treatment. $EBS^{(R)}$, $Bio-pump^{(R)}$, and Centrifugal Rotaflow $pump^{(R)}$ were used and all cannulations were performed percutaneously via both femoral veins. When the lung function was improved, an attempt was made to wean on ECMO at moderate ventilator settings followed by decannulation. Results: Five of the 7 patients were male and the mean age was $46.3{\pm}18.3$. The causes of acute respiratory failure were 3 cases of pneumonia, 2 near-drownings, 1 pulmonary hemorrhage due to acute hepatic failure and 1 mercury vapor poisoning. The mean support time of ECMO was $17.3{\pm}13.7$ days. Of the 7 patients implanted with ECMO, 5 patients (71%) were weaned off ECMO and 3 patients (43%) survived to hospital discharge after a mean 89.6 hospital days. Conclusion: The early use of ECMO for acute respiratory failure in adults due to any cause is a good therapeutic option for those unresponsive to the optimal conventional treatments.

Development for Penetrative Performance Improving Agent to In Prevent Deterioration of Concrete Structures (콘크리트 구조물의 내구성능 저하를 방지하는 침투형 성능개선제 개발)

  • Ryu Gum-Sung;Koh Kyoung-Taek;Kim Sung-Wook;Kim Do-Gyeum
    • Journal of the Korea Concrete Institute
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    • v.17 no.4 s.88
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    • pp.489-498
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    • 2005
  • Recently, the deterioration of concrete structures have been increased by the damage from salt, carbonization, freezing & thawing and the others. Therefore, the measures for the deterioration of concretes have been taken. Among them, it has been often used that surface treatment which cut off the deterioration factors of durability by protecting the surface of concrete. The water proof and repair materials for concrete mainly use organic materials such as epoxy, these materials excel in intial bonding force and resistance to chemical agents. But they cause difference in the modulus of elasticity and the rate of shrinkage and expansion of concrete, and thus result in such problems as scaling and spatting in the progress of time. Therefore in this study it develop the performance Improving agent of concrete surface that can block a deterioration cause such as $CO_2$ gas, chloride ion and water from the outside and enhance waterproofing ability by reinforcing the concrete surface when applying it to concrete structures.

Concentration Distribution of PCBs in Soil Around Industrial Complex and Relationship with PCBs Sources (공단지역 주변 토양 중 PCBs 농도분포 및 발생원 추정에 관한 연구)

  • Park, Seok-Un;Kim, Kyoung-Soo;Kim, Jong-Guk
    • Journal of Korean Society of Environmental Engineers
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    • v.29 no.5
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    • pp.521-527
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    • 2007
  • To investigate the relationship between PCB sources and concentration level in soil, PCBs concentration of 8 soil samples around Shiwa industrial complex were measured. The concentration of PCBs in soil samples were ranged from 2.43 to 274 ng/g dry (0.116 to 60.5 pg WHO-TEQ/g dry) md off-gas were ranged from 48.6 to $2872ng/m^3(0.00150\sim15.2ng\;WHO-TEQ/m^3)$; these are similar levels with results of previous study in Korea. The homologue patterns in soil samples were varied from sample to sample, but isomer patterns were very similar with each other. The two principal components were extracted by Principal Component Analysis(PCA) of 8 soil samples and cumulative factor loading was 95.7%. As the result of PCA, it could be expected that PCBs in soil samples of this study were more affected by PCB products than combustion process and mostly affected by already-known sources.

Processing and MAP(modified atmosphere packaging) Storage of Fresh-cut Apples using CA Stored Apples (CA저장 사과를 이용한 Fresh-cut Apple의 제조 및 MAP저장)

  • 정헌식;문광덕;최종욱
    • Food Science and Preservation
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    • v.6 no.4
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    • pp.351-356
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    • 1999
  • To develop and extend the shelf-life of vitamin C enriched fresh-cut apples using CA stored Fuji apples, dipping in 10% L-ascorbic acid and packaging with 0.03 mm LDPE, 0.04 mm PP and 0.08 mm Nylon/PE film(N$_2$displacement) were carried out. The changes of gas concentrations in the packaging and quality attributes of fresh-cut apples were examined during storage at 10$^{\circ}C$. The concentrations of O$_2$was maintained lower in Nylon/PE film than the other film, the level of O$_2$was in the range of 1∼3%. The increase of C$_2$H$_4$ concentrations in Nylon/PE film bag was more suppressed than the others. The vitamin C content of fresh-cut apples was enriched by dipping in L-ascorbic acid solution up to 241 mg$.$100 g-1 f.w., and the loss or that content was retarded differently by the package conditions of lower O$_2$level during storage. Browning in fresh-cut apples was shown after 6 days of storage in LDPE and PP film. but it was not shown by 14 days of storage in Nylon/PE film. Spoilage and off odor in fresh-cut apples were not detected up to 14 days of storage in Nylon/PE film. The results indicated that the vitamin C enriched fresh-cut apples can be processed from the long-term CA stored apples, and maintaining high quality of the products ill be possible in cases of the application of sealing packaging after O$_2$removal with film having low O$_2$permeability.

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Molecular Identification of Pseudanabaena Strains and Analysis of 2-MIB Production Potential in the North Han River System (북한강 수역에 분포하는 Pseudanabaena 균주의 동정 및 2-MIB 생산 잠재성 분석)

  • Kim, Keonhee;Lee, Sejin;Seo, Kyunghwa;Hwang, Soon-Jin
    • Korean Journal of Ecology and Environment
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    • v.53 no.4
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    • pp.344-354
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    • 2020
  • Identification of the target species of 2-MIB (2-methyllisoborneol) production is crucial in the management of off-flavor problem in the freshwater system. This study was conducted to identify 2-MIB-producing Pseudanabaena strains occurring in the North Han River system using molecular genetic method. Eleven phenotypes of Pseudanabaena were isolated from several mainstream sites of the North Han River, including Sambong-ri, Joam-myun, and Lake Uiam areas. Despite of morphological similarity of the strains, the phylogenetic analysis using 16S rDNA classified them into different species with low genetic similarity (40~55%). Isolated Pseudanabaena strains were converged to four species; Pseudanabaena cinerea, P. yagii, P. mucicola, and P. redekei. Among them, the 2-MIB synthesizing gene (mibC) was detected in P. cinerea, P. yagii, and P. redekei. However, actual 2-MIB production was detected only in P. cinerea and P. redekei based on gas chromatography analysis. This study is the first report of the molecular identification of Pseudanabaena strains and their 2-MIB production potential in Korea. The results of this study provides an evidence of species diversity of Pseudanabaena occurring in the North Han River.

Evaluation of Ventilation Performance of a Residential Unit for Different Sampling Points through Actual Field Tests (실증실험을 통한 측정 위치에 따른 주거공간 환기성능 평가)

  • Kwag, Byung Chang;Lee, Soo Man;Kim, Gil Tae;Kim, Jong Yeob
    • Land and Housing Review
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    • v.13 no.3
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    • pp.93-106
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    • 2022
  • Ventilation plays an important role in controlling indoor air quality. Due to the recent spread of infectious diseases such as COVID-19 and with people spending more time indoors, there's been increased attention on the importance of ventilation performance. In many countries, ventilation is regulated by airflow rates and the number of air changes per hour (ACH). However, airflow rates and ACH alone do not provide an accurate account of actual indoor pollutant removal and ventilation uniformity in a space. This study looked into the ventilation performance of an actual residential unit using several sampling points instead of basing it off of airflow and air change rates. Literature review was used to derive relevant influencing factors and the tracer gas dilution method was used for the field test. The study measured air velocity, age of air, and ventilation efficiency at several locations and compared them to the average value at the center of the test space to determine the differences in ventilation performance at the selected measurement points. The study showed that different sampling locations resulted in different ventilation values. Findings of this study will be used to develop an experimental procedure for evaluating indoor ventilation performance of actual residential spaces.