• 한국정밀공학회지
• /
• 제27권10호
• /
• pp.93-99
• /
• 2010

A nano-stereolithography is the direct patterning process with a nanoscale resolution using twophoton absorption induced by a femtosecond laser. However, in the majority of the works, the fabrication of 3D microstructures have been done only onto transparent glass due to the use of an oil immersion objective lens for achieving a high resolution. In this work, the coaxial illumination and the auto-focusing system are proposed for the direct patterning of nano-precision patterns on an opaque substrate such as a silicon wafer and a metal substrate. Through this work, 3D polymer structures and metallic patterns are fabricated on a silicon wafer using the developed process.

• 한국가시화정보학회:학술대회논문집
• /
• 한국가시화정보학회 2004년도 Proceedings of 2004 Korea-Japan Joint Seminar on Particle Image Velocimetry
• /
• pp.125-134
• /
• 2004

The improvement of artificial respiration method has brought about the decrease in mortality of pulmonary diseases patients. Various respiratory curative methods, inclusive of HFOV (High Frequency Oscillatory Ventilation), have been developed for more effectual and less harmful management of acute respiratory failure. However, the mechanism of gas transfer and diffusion in a bronchiole has not yet been clarified in detail. As a first approach to the problem, we measured oscillatory flows in a Y-shaped micro-channels as bronchiole model by micro Particle Image Velocimetry(micro PIV). In order to establish the fundamental technique of PIV measurements on oscillatory air flow in a micro-channel, we used about 500-nm-diameter incense smoke particles, a diode laser, a high speed camera including an objective lens, and a HFOV, which is effective technique for medical care of pulmonary disease patients, especially, infants. The bronchiole model size is that parent tube is $500\{mu}m$ width and $500\{mu}m$ depth, and daughter tubes are $450\{mu}m$ width and $500\{mu}m$ depth. From this study made on the phenomenon of fluid in micro size bronchus branch of a lung, we succeeded to get time series velocity distribution in a micro scale bronchial mode. The experimental results of velocity distribution changing with time obtained by micro PIV can give fundamental knowledge on oscillatory airflow in micro-channel.

• 한국레이저가공학회지
• /
• 제18권4호
• /
• pp.17-22
• /
• 2015

In this paper, ablation rate of $Al_2O_3$ ceramics by femtosecond laser fluence is derived with experimental method. The automatic three axis linear stage makes laser optics to move with high spatial resolution. With 10 times objective lens, minimal pattern width of $Al_2O_3$ is measured in the focal plane. Ablated surface area is shown as linear tendency increasing number of machining times with various laser power conditions. Machining times is most sensitive condition to control $Al_2O_3$ pattern width. Also, the linear increment of pattern width with laser power change is investigated. In high machining speed, the ablation volume rate is more linear with fluence because pulse overlap is minimized in this condition. Thermal effect to surrounding medium can be minimized and clean laser process without melting zone is possible in high machining speed. Ablation volume rate decelerates as increasing machining times and multiple machining times should be considered to achieve proper ablation width and depth.

• Current Optics and Photonics
• /
• 제4권3호
• /
• pp.193-199
• /
• 2020

In this paper we propose a dark-field digital holographic microscopy system based on 360-degree oblique illumination. This setup is constructed without using a dark-field objective. The principle of 360-degree oblique illumination of vortex beam and dark-field digital holographic microscopy are introduced theoretically and experimentally. By analyzing the reconstructed image of a dark-field digital hologram of a USAF 1951 target, it is proved that the imaging resolution can be improved by this method. And also, comparison and analysis are made on the reconstructed image of a bright-dark field digital hologram of a pumpkin stem slice, the result shows that the imaging contrast is also enhanced with this method, and it is effective for dark-field digital holographic microscopy imaging of large transparent biological samples.

• 정보저장시스템학회논문집
• /
• 제2권3호
• /
• pp.163-168
• /
• 2006

Small form factor optical pickup (SFFOP) corresponding to BD specifications is strongly proposed for the next-generation portable storage device. In order to generate SFFOP, small sized optical pickup has been fabricated. We have developed a small sited optical pickup that is called the integrated optical pickup (IOP). The fabrication method of this system is mainly dependant on the use of the wafer based micro fabrication technology, which has been used in MEMS process such as photolithography, reactive ion etching, wafer bonding, and packaging process. This approach has the merits for mass production and high assembling accuracy. In this study, to generate the small sized optical pickup for high recording capacity, IOP corresponding to BD specifications has been designed and developed, including three main parts, 1) design, fabrication and evaluation of objective lens unit, 2) design and fabrication of IOP and 3) evaluation process of FES and TES.

• Journal of the Optical Society of Korea
• /
• 제13권1호
• /
• pp.75-79
• /
• 2009

A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a $1{\mu}m$ peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A $1{\mu}m$ pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).

• 천문학논총
• /
• 제30권2호
• /
• pp.223-224
• /
• 2015

We present the results of visual double stars speckle observations from 2013 using a Zeiss Double Refractor 60 cm with visual focal length f = 1,078 cm, and CCD SBIG ST-402 MEA. A Bessel V filter with ${\lambda}=550nm$ was placed in front of the CCD camera to reduce the chromatic aberration of the objective lens. The objects selected for this observation were calibration candidates and program stars with separations ranging from 0.9-6 arc second, and were located in both the northern and southern hemispheres. Seeing at Bosscha Observatory is generally 1-2 arc second, imposing a limit on visual double star separation below which the system cannot be resolved by long exposure imaging (longer than ~50 ms). Speckle interferometry methods are used to resolve double stars with separations below the typical size of seeing effects. A series of images were captured in fast short-time exposures (~50 ms) using a CCD camera. The result of our experiment shows that our system can be used to measure separations of 0.9 arc second (for systems with small ${\Delta}m$) and ${\Delta}m{\approx}3.7$ (for wide systems).

• 한국정밀공학회지
• /
• 제25권1호
• /
• pp.122-129
• /
• 2008

Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

• 정보저장시스템학회논문집
• /
• 제3권4호
• /
• pp.191-195
• /
• 2007

The optical disc drive has used a high NA objective lens and a shorter wavelength laser diode for high recording density. But high NA and shorter wavelength cause several margins to become short. Focusing and tracking servo has to be more accurate and active tilt compensation mechanism is also needed for coma aberration compensation. In this paper, we proposed 3-axis moving magnet type actuator. For 3-DOF motion, moving coil actuator has to be equipped with 6 wires for supplying 3 independent signals. However, moving magnet type actuator doesn't need to change the configuration of wires because coils are in stator. So, we added a tilt mechanism to the 2-axis moving magnet actuator which is designed in previous research. Addition of the tilt mechanism cuts down the focus sensitivity. So, maximization the tilting sensitivity and securing the focusing sensitivity are objectivities of this research. DOE (design of experiments) procedures of electromagnetic circuit are performed for parameter study and the optimization is also performed to maximize the tilt sensitivity. And then the final design is suggested and its performance is verified by FE simulation.

• 한국광학회지
• /
• 제11권3호
• /
• pp.141-146
• /
• 2000

직경 $3~5{\mu}m$ 크기의 폴리그티렌 라텍스 입자들을 40배 또는 100배의 대물렌즈로 집속하여 조명한 2mW의 저출력 헬륨 네온 광속의 광압으로 포획하고, 이를 자유로이 이동시키면서 영문자 'A' 형태로 배열하였다. 그리고 수${\mu}m$ 크기의 미생물도 성공적으로 포획하고 이동시킬 수 있었다. 이 결과 저출력 헬륨네온 레이저의 광압을 이용하여 미립자나 미생물을 자유자재로 이동시키거나 모을수 있는 광집게로의 가능성을 확인하였다.