• Korean Journal of Optics and Photonics
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• v.7 no.2
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• pp.101-111
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• 1996

Optical microscopes integrated with CCD cameras are widely used for automatic inspection of precision circuit patterns fabricated on glass masks and silicon wafers. For this application it is important to position the object always is focus so that the image appears in good quality while the microscope scans the object. However, as the magnification of the microscope is taken large for fine resolution the depth of focus becomes small, often in submicron ranges, requiring special care in focusing. This study proposes a new auto-focusing method, which can be readily incorporated in existing optical configuration of microscope. This method is based on optical triangulation using a separate beam of laser and two photodiodes, eliminating focus errors caused by surface roughness and waviness. Experimental results prove that the method can produce focus error signals which are very sensitive with a resolution of 5 nm within 0.5 ${\mu}{\textrm}{m}$ accuracy.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.8
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• pp.1029-1034
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• 2010

In this paper, we present the roundness profile and run-out error measurement for a rotating shaft. The devices for measuring the roundness require a precision rotation table which is used as a reference to obtain the circular profile. Therefore, the roundness measuring system is expensive and requires precision manufacturing. The two-point method for succession measurement has been used to obtain a linear profile or used in straightness measurement using two displacement measuring devices. In this paper, the method is used for measuring the circular profile of a rotating shaft. A method to remove the vibration of the shaft, i.e., the run-out, is used, and the original circular profile is obtained from the measured raw data that excludes the run-out error of the rotating shaft. This method will be useful for obtaining the precise circular profile without using a precision reference circular artifact.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.21-28
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• 2008

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.405-408
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• 2002

A high speed feeding type laser cutting UC is developed for the precise cutting of sheet metal. The M/C is a flying optics type one with specified functions of movability and strength in order to increase workability. The gantry frame should be moved with a certain velocity within a relatively short time for the proper cutting of object materials. The gantry is actuated by rack and pinion. In this paper, modal and structural analysis for a laser culling M/C, is carried out in development of the machine The machine is modeled by placing proper shell and solid finite elements and fictitious mass properties to represent the real one.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.124-132
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• 2004

A hydraulic system is difficult to keep the performance due to non-linearity, load pressure which changes according to working condition and system parameter variation, the requirement of control algorithm has been risen in order to satisfy them. An adaptive control is a control method which is suggested to achieve a control object though plant characteristics change. In spite of the case that plant characteristics and the degree of variation are difficult to grasp, adaptive control can keep the characteristics of closed-loop system regularly. In this study GMVAC(generalized minimum variance adaptive control) combined with output error feedback is proposed in order to solve problems of non-minimum phase, vibration and overshoot in initial response of the plant. The control performance according to the variation of characteristics of the plant is evaluated by changing the supply pressure only.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.10
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• pp.41-48
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• 2000

Manufacturing devices must be integrated for constructing CIM environment, but integration of heterogeneous system meets several economical and technological difficulties. In this case, MMS(Manufacturing Message Specification) can be an effective method, but it has problems which MMS products are generally very expensive and majority of the existing manufacturing devices do not support MMS. This paper describes the development of a gateway for Non-MMS-Compatible CNC machine tools to serve MMS and the implementation of OSI(Open System Interconnection) upper layer on TCP/IP. The developed system is applied to construct cell controller with heterogeneous devices under CIM environment and to evaluate interoperability and portability.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.12
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• pp.182-189
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• 1999

In this paper, we present an ultrasonic sensor based path planning method using fuzzy logic for obstacle avoidance of an intelligent vehicle in unknown environments. Generally, Robot navigation in unknown terrains is a very complex task difficult to control because of the great amount of imprecise and ambiguous sensor information that has to be considered. In this case, fuzzy logic can satisfactorily deal with such information in quite efficient manner. In this study, we propose two fuzzy logic controller which is composed of steering controller and velocity controller respectively. Our object is to develop a fuzzy controller that can enable a mobile robot to navigate from a start point to a goal point without collisions, in the least possible travel time. The ability and effectiveness for the proposed algorithm will be demonstrated by simulation and expeiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.894-897
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• 2004

In this paper, we address a position control scheme for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal forces. Dynamic equations of the stage system are derived based on Newton-Euler method and its special Jacobian matrix describing a relation between the Joint velocity and platen velocity is done. There are proposed two control schemes for positioning, which are Cartesian space controller and Joint space controller. The control performance of the Cartesian space controller is better than the Joint space controller in task space trajectory while the Joint space controller is simpler than the Cartesian space controller in controller realization.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.